ACM RESEARCH, INC.
Patent Owner
Stats
- 5 US PATENTS IN FORCE
- 2 US APPLICATIONS PENDING
- Apr 28, 2016 most recent publication
Details
- 5 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 1,569 Total Citation Count
- Nov 10, 1987 Earliest Filing
- 28 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
6638863 Electropolishing metal layers on wafers having trenches or vias with dummy structuresMar 27, 02Oct 28, 03[H01L]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2011/0259,752 METHOD FOR SUBSTANTIALLY UNIFORM COPPER DEPOSITION ONTO SEMICONDUCTOR WAFERAbandonedSep 16, 08Oct 27, 11[C25D]
2011/0079,247 SOLUTION PREPARATION APPARATUS AND METHOD FOR TREATING INDIVIDUAL SEMICONDUCTOR WORKPIECEAbandonedMar 17, 08Apr 07, 11[B08B]
2007/0131,561 Controlling removal rate uniformity of an electropolishing process in integrated circuit fabricationAbandonedDec 17, 04Jun 14, 07[B23H]
2007/0125,661 Controlling removal rate uniformity of an electropolishing process in integrated circuit fabricationAbandonedFeb 23, 05Jun 07, 07[B23H]
2007/0039,827 Measuring alignment between a wafer chuck and polishing/plating receptacleAbandonedDec 09, 03Feb 22, 07[B23H]
2005/0245,086 Adaptive electropolishing using thickness measurement and removal of barrier and sacrificial layersAbandonedJan 06, 05Nov 03, 05[H01L]
2005/0218,003 Electropolishing and/or electroplating apparatus and methodsAbandonedOct 06, 04Oct 06, 05[C25D]
6837984 Methods and apparatus for electropolishing metal interconnections on semiconductor devicesExpiredApr 10, 02Jan 04, 05[C25D, C25F]
2004/0256,245 Methods and apparatus for electropolishing metal interconnections on semiconductor devicesAbandonedJul 21, 04Dec 23, 04[C25D, C25F]
2004/0253,809 Forming a semiconductor structure using a combination of planarizing methods and electropolishingAbandonedAug 10, 04Dec 16, 04[H01L]
2004/0253,810 Dummy structures to reduce metal recess in electropolishing processAbandonedJul 27, 04Dec 16, 04[H01L]
2004/0238,481 Electropolishing assembly and methods for electropolishing conductive layersAbandonedMay 10, 04Dec 02, 04[C23F]
2004/0211,664 Methods and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workpiecesAbandonedMay 25, 04Oct 28, 04[C25C]
6749728 Methods and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workpiecesExpiredDec 16, 02Jun 15, 04[C25B]
6726823 Methods and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workpiecesExpiredMay 23, 01Apr 27, 04[C25D, C25F]
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