ADTEC PLASMA TECHNOLOGY CO., LTD.
Patent Owner
Stats
- 6 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Dec 20, 2016 most recent publication
Details
- 6 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 212 Total Citation Count
- May 05, 1993 Earliest Filing
- 3 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9526160 Cavity resonator of microwave plasma generating apparatusMay 27, 13Dec 20, 16[H01J, H01P, H05H]
7514377 Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor deviceDec 26, 03Apr 07, 09[H01L]
7378062 Object processing apparatus and plasma facility comprising the sameMay 28, 01May 27, 08[B01J]
5936481 System for impedance matching and power control for apparatus for high frequency plasma treatmentJan 15, 98Aug 10, 99[H03H]
5394061 High frequency plasma power source and impedance matching device for supplying power to a semiconductor processing apparatusMay 05, 93Feb 28, 95[H01J]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
7795818 Microwave plasma generation method and microwave plasma generatorExpiredSep 12, 06Sep 14, 10[H05B]
2009/0317,294 Method of low-temperature dry sterilization and apparatus thereforAbandonedAug 25, 05Dec 24, 09[A61L]
6080271 Plasma source for generating inductively coupled, plate-shaped plasma, having magnetically permeable coreExpiredJul 16, 97Jun 27, 00[C23F]
Top Inventors for This Owner
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