AKRION SYSTEMS LLC

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 2038
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 13349
 
  
 
F26B DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM 426
 
  
 
B06B GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL 321
 
  
 
C23G CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS 310
 
  
 
H04R LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS 2105
 
  
 
B44C PRODUCING DECORATIVE EFFECTS 133
 
  
 
C03C CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS159
 
  
 
H02N ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR130
 
  
 
H03M CODING, DECODING OR CODE CONVERSION, IN GENERAL 1110

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0133,242 METHOD OF PRIMING AND DRYING SUBSTRATESJun 09, 16May 11, 17[H01L]
2014/0305,471 REDUCED CONSUMPTIONS STAND ALONE RINSE TOOL HAVING SELF-CONTAINED CLOSED-LOOP FLUID CIRCUIT, AND METHOD OF RINSING SUBSTRATES USING THE SAMEAug 20, 12Oct 16, 14[H01L]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9337065 Systems and methods for drying a rotating substrateJun 03, 14May 10, 16[H01L, F26B, C11D]
9305768 Method for processing flat articlesNov 27, 12Apr 05, 16[H01L, B08B]
9070722 System and method for the sonic-assisted cleaning of substrates utilizing a sonic-treated liquidOct 17, 07Jun 30, 15[H01L, B08B]
9049520 Composite transducer apparatus and system for processing a substrate and method of constructing the sameMay 19, 14Jun 02, 15[H01L, B06B, B08B, H04R]
8987032 Method for selective under-etching of porous siliconMar 03, 10Mar 24, 15[H01L]
8771427 Method of manufacturing integrated circuit devicesSep 04, 12Jul 08, 14[B08B]
8739429 Systems and methods for drying a rotating substrateOct 02, 12Jun 03, 14[F26B]
8343287 Apparatus for ejecting fluid onto a substrate and system and method incorporating the sameMay 10, 11Jan 01, 13[B08B]
8316869 Acoustic energy system, method and apparatus for processing flat articlesAug 30, 10Nov 27, 12[B08B]
8276291 Systems and methods for drying a rotating substrateNov 15, 11Oct 02, 12[F26B]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2015/0360,261 SYSTEM AND METHOD FOR THE SONIC-ASSISTED CLEANING OF SUBSTRATES UTILIZING A SONIC-TREATED LIQUIDAbandonedJun 29, 15Dec 17, 15[H01L, B08B]
2015/0194,563 METHOD FOR SELECTIVE UNDER-ETCHING OF POROUS SILICONAbandonedMar 24, 15Jul 09, 15[H01L]
2015/0118,785 METHOD FOR CONSISTENTLY TEXTURIZING SILICON WAFERS DURING SOLAR CELL WET CHEMICAL PROCESSINGAbandonedMay 06, 13Apr 30, 15[H01L]
2014/0216,508 SYSTEM, APPARATUS AND METHOD FOR PROCESSING SUBSTRATES USING ACOUSTIC ENERGYAbandonedFeb 03, 14Aug 07, 14[B06B, B08B]
2013/0167,881 COMPOSITE TRANSDUCER APPARATUS AND SYSTEM FOR PROCESSING A SUBSTRATE AND METHOD OF CONSTRUCTING THE SAMEAbandonedOct 02, 12Jul 04, 13[B08B, H04R]
8257505 Method for megasonic processing of an articleExpiredOct 11, 11Sep 04, 12[B08B]
2012/0102,778 METHOD OF PRIMING AND DRYING SUBSTRATESAbandonedApr 22, 11May 03, 12[B08B, F26B]
6843859 Dump doorExpiredFeb 26, 02Jan 18, 05[B08B]
6817369 Device and method for cleaning substratesExpiredApr 18, 02Nov 16, 04[B08B]
6805754 Device and method for processing substratesExpiredSep 28, 01Oct 19, 04[B08B]
6647641 Device and method for the treatment of substrates in a fluid containerExpiredDec 03, 99Nov 18, 03[F26B]
6607604 Method and apparatus for treating substratesExpiredJun 30, 00Aug 19, 03[B08B]
6523552 Facility for treating objects in a process tankExpiredJul 07, 98Feb 25, 03[B08B]
6286688 Compliant silicon wafer handling systemExpiredApr 02, 97Sep 11, 01[B65G]
6269822 Installation for wet-treating substratesExpiredMar 22, 99Aug 07, 01[B08B]
6261845 Methods and systems for determining chemical concentrations and controlling the processing of semiconductor substratesExpiredFeb 25, 99Jul 17, 01[G01N]
6245158 Wet processing methods for the manufacture of electronic components using liquids of varying temperatureExpiredJun 02, 99Jun 12, 01[B08B]
6240938 Device for treating substrates in a fluid containerExpiredDec 06, 96Jun 05, 01[B08B]
6189552 Substrate processing deviceExpiredMay 24, 99Feb 20, 01[B08B]
6145520 Apparatus for processing substrates in a fluid tankExpiredOct 23, 98Nov 14, 00[B08B]

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