AMORPHOUS SILICON, INC., 5800 MONROE STREET, BLDG. F., SYLVANIA, OH 43560, A CORP. OF OH

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
5252140 Solar cell substrate and process for its productionExpiredMar 29, 90Oct 12, 93[H01L, C03B]
5016562 Modular continuous vapor deposition systemExpiredFeb 07, 89May 21, 91[C23C]
4865999 Solar cell fabrication methodExpiredOct 29, 87Sep 12, 89[H01L]
4808462 Solar cell substrateExpiredMay 22, 87Feb 28, 89[H01L, B32B]
4763602 Thin film deposition apparatus including a vacuum transport mechanismExpiredFeb 25, 87Aug 16, 88[C23C]

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