ANELVA CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 9328
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 23339
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 16112
 
  
 
H05H PLASMA TECHNIQUE 1020
 
  
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 978
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 850
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 828
 
  
 
B01D SEPARATION 7127
 
  
 
B05C APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 441
 
  
 
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 463

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8524094 Masking material for dry etchingJul 16, 08Sep 03, 13[C23F, B44C]
7914654 Method and apparatus for depositing a magnetoresistive multilayer filmMar 20, 07Mar 29, 11[C23C]
7322368 Plasma cleaning gas and plasma cleaning methodAug 26, 02Jan 29, 08[B08B]
7202474 Ion attachment mass spectrometry apparatusMar 22, 06Apr 10, 07[H01J]
7164121 Ion attachment mass spectrometry methodSep 10, 03Jan 16, 07[H01J]
7164571 Wafer stage with a magnetFeb 19, 05Jan 16, 07[H01L]
7159537 Device for fixing a gas showerhead or target plate to an electrode in plasma processing systemsJun 24, 04Jan 09, 07[C23C]
7156961 Sputtering apparatus and film forming methodOct 24, 02Jan 02, 07[C23C]
7138364 Cleaning gas and etching gasJan 28, 03Nov 21, 06[B08B]
7091138 Forming method and a forming apparatus of nanocrystalline silicon structureAug 27, 04Aug 15, 06[H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
7589002 Method of forming an oxygen- or nitrogen-terminated silicon nanocrystalline structure and an oxygen- or nitrogen-terminated silicon nanocrystalline structure formed by the methodExpiredMay 19, 08Sep 15, 09[H01L]
2009/0155,491 Film-forming method for forming metal oxide on substrate surfaceAbandonedJul 02, 08Jun 18, 09[C23C]
2008/0180,862 METHOD OF PRODUCTION OF A MAGNETORESISTANCE EFFECT DEVICEAbandonedMar 28, 08Jul 31, 08[G11B, G11C]
2008/0113,149 Surface processing apparatusAbandonedDec 26, 07May 15, 08[B32B]
2008/0055,793 MAGNETORESISTANCE EFFECT DEVICEAbandonedOct 23, 07Mar 06, 08[G11B]
2006/0158,823 Electrostatic chuck deviceAbandonedMar 09, 06Jul 20, 06[H01L]
7005634 Ionization apparatusExpiredMar 22, 02Feb 28, 06[H01J]
2005/0252,451 Cvd apparatus having means for cleaning with fluorine gas and method of cleaning cvd apparatus with fluorine gasAbandonedApr 01, 04Nov 17, 05[C23C]
6955836 Silicon oxide film formation methodExpiredDec 23, 02Oct 18, 05[C23C]
6942892 Hot element CVD apparatus and a method for removing a deposited filmExpiredAug 04, 00Sep 13, 05[C23C, B05D, B08B]
6935181 Anticorrosive vacuum sensorExpiredMay 11, 04Aug 30, 05[G01L]
6922325 Electrostatic attraction mechanism, surface processing method and surface processing deviceExpiredJul 02, 01Jul 26, 05[H01T]
6887522 Method for forming a copper thin filmExpiredApr 26, 02May 03, 05[C23C]
2004/0255,854 Cvd apparatus and method of cleaning the cvd apparatusAbandonedApr 27, 04Dec 23, 04[C23C]
2004/0244,684 System and method of deposition of magnetic multilayer film, method of evaluation of film deposition, and method of control of film depositionAbandonedJan 27, 04Dec 09, 04[C23C]
2003/0198,743 Silicon nitride film forming apparatus and film forming methodAbandonedApr 22, 03Oct 23, 03[C23C]
2003/0143,846 Gas compositions for cleaning the interiors of reactors as well as for etching films of silicon- containing compoundsAbandonedDec 27, 02Jul 31, 03[H01L]
6598483 Capacitive vacuum sensorExpiredMar 09, 01Jul 29, 03[G01L]
6590205 Ionization method for mass spectrometry and mass spectrometry apparatusExpiredAug 08, 01Jul 08, 03[H01J]
6561343 Magnetic carrying deviceExpiredAug 27, 01May 13, 03[B65G]

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