Applied Komatsu Technology, Inc.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 1388
 
  
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 384
 
  
 
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 364
 
  
 
F27B FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS321
 
  
 
F27D DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE 322
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 3359
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 234
 
  
 
F16K VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING271
 
  
 
G01J MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 276
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 2126

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6881305 Heated and cooled vacuum chamber shieldNov 06, 01Apr 19, 05[C23C, F27B, F25B]
6773562 Shadow frame for substrate processingFeb 20, 98Aug 10, 04[C23C]
6552297 RF matching network with distributed outputsNov 01, 01Apr 22, 03[B23K]
6471459 Substrate transfer shuttle having a magnetic driveNov 23, 99Oct 29, 02[B65G]
6468601 Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technologyMar 10, 00Oct 22, 02[B05D, H05H]
6355108 Film deposition using a finger type shadow frameJun 22, 99Mar 12, 02[C23C]
6308932 Isolation valvesFeb 22, 00Oct 30, 01[F16K]
6294219 Method of annealing large area glass substratesMar 03, 98Sep 25, 01[C23C, B05D]
6257045 Automated substrate processing systems and methodsSep 08, 99Jul 10, 01[G01J]
6225601 Heating a substrate support in a substrate handling chamberJul 13, 98May 01, 01[F27B]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2005/0150,757 Heated and cooled vacuum chamber shieldAbandonedJan 04, 05Jul 14, 05[C23C]
6647993 Surface-treated shower head for use in a substrate processing chamberExpiredDec 19, 00Nov 18, 03[B08B]
6534007 Method and apparatus for detecting the endpoint of a chamber cleaningExpiredAug 01, 97Mar 18, 03[B08B]
6517303 Substrate transfer shuttleExpiredMay 20, 98Feb 11, 03[B65G]
6472329 Etching aluminum over refractory metal with successive plasmasExpiredAug 16, 99Oct 29, 02[H01L]
6435868 Multi-function chamber for a substrate processing systemExpiredDec 07, 00Aug 20, 02[F27D]
6432203 Heated and cooled vacuum chamber shieldExpiredJan 09, 98Aug 13, 02[C23C, B05C, C23F]
6371712 Support frame for substratesExpiredOct 20, 00Apr 16, 02[F27D]
6362097 Collimated sputtering of semiconductor and other filmsExpiredJul 14, 98Mar 26, 02[H01L]
2002/0033,183 METHOD AND APPARATUS FOR ENHANCED CHAMBER CLEANINGAbandonedMay 29, 99Mar 21, 02[B08B]
6359250 RF matching network with distributed outputsExpiredSep 18, 00Mar 19, 02[B23K]
6352910 Method of depositing amorphous silicon based films having controlled conductivityExpiredFeb 12, 99Mar 05, 02[H01L]
6286230 Method of controlling gas flow in a substrate processing systemExpiredSep 07, 99Sep 11, 01[F26B]
6267851 Tilted sputtering target with shield to block contaminantsExpiredOct 28, 99Jul 31, 01[C23C]
6235634 Modular substrate processing systemExpiredMay 20, 98May 22, 01[H01L]
6215897 Automated substrate processing systemExpiredMay 20, 98Apr 10, 01[G06K]
6204607 Plasma source with multiple magnetic flux sources each having a ferromagnetic coreExpiredMay 28, 98Mar 20, 01[H05H]
6199259 Autoclave bonding of sputtering target assemblyExpiredSep 25, 96Mar 13, 01[B23P]
6191390 Heating element with a diamond sealing materialExpiredMay 14, 99Feb 20, 01[H05B, C23L]
6187649 Shallow trench isolation processExpiredJul 07, 99Feb 13, 01[H01L]

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