ASM LITHOGRAPHY B.V.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 889
 
  
 
A61N ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY 1106
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS198
 
  
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 1204
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 1103
 
  
 
H02K DYNAMO-ELECTRIC MACHINES 1106

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6967756 Lithographic apparatus device manufacturing method and device manufactured therebyApr 30, 04Nov 22, 05[G02B]
6879063 Displacement deviceMar 06, 03Apr 12, 05[H02K]
6466304 Illumination device for projection system and method for fabricatingOct 21, 99Oct 15, 02[G03B]
6388736 Imaging method using phase boundary masking with modified illuminationNov 15, 00May 14, 02[G03L, G03B, A61N, G03F]
6297876 Lithographic projection apparatus with an alignment system for aligning substrate on maskMar 06, 98Oct 02, 01[G03B, G01B]
6144442 Pneumatic support device with a controlled gas supply, and lithographic device provided with such a support deviceJun 10, 98Nov 07, 00[G03B]
5844664 Positioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning deviceApr 25, 96Dec 01, 98[G03B]
5204712 Support device with a tiltable object table, and optical lithographic device provided with such a support deviceOct 09, 91Apr 20, 93[G03B]
5172160 Optical lithographic device having a machine frame with force compensationOct 29, 91Dec 15, 92[G03B]
5150153 Lithographic device with a suspended object tableDec 10, 91Sep 22, 92[G03B]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2004/0184,018 Abbe arm calibration system for use in lithographic apparatusAbandonedApr 02, 04Sep 23, 04[G03B]
6525806 Apparatus and method of image enhancement through spatial filteringExpiredJun 29, 00Feb 25, 03[G03C, G03B]
6480263 Apparatus and method for phase shift photomaskingExpiredMar 16, 00Nov 12, 02[G03B]
6445440 Motion feed-through into a vacuum chamber and its application in lithographic projection apparatusesExpiredApr 17, 00Sep 03, 02[G03B]
5673101 Method of repetitively imaging a mask pattern on a substrate, and apparatus for performing the methodExpiredMay 25, 95Sep 30, 97[G03B]
5144363 Apparatus for and method of projecting a mask pattern on a substrateExpiredJan 24, 91Sep 01, 92[G03B]
5026166 Apparatus for pre-aligning substrate preparatory to fine alignmentExpiredOct 01, 84Jun 25, 91[G01B]
4872358 Driving mechanism having a pressure memberExpiredFeb 29, 88Oct 10, 89[F16H]
4866262 Optical imaging arrangement comprising an opto-electronic focussing-error detection systemExpiredFeb 09, 88Sep 12, 89[G01J]
4817930 Guiding deviceExpiredNov 09, 87Apr 04, 89[B23Q]
4778275 Method of aligning a mask and a substrate relative to each other and arrangement for carrying out the methodExpiredSep 24, 86Oct 18, 88[G01B]
4772119 Device for detecting a magnification error in an optical imaging systemExpiredOct 14, 86Sep 20, 88[G01B]
4655594 Displacement device, particularly for the photolithographic treatment of a substrateExpiredMar 11, 86Apr 07, 87[G01B]
4628238 Positioning device comprising pre-stressed contactless bearingsExpiredJun 05, 85Dec 09, 86[G05B]
4522489 Device for photolithographically treating a thin substrateExpiredJan 03, 84Jun 11, 85[G03B]

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