ASML MASKTOOLS B.V.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 2102
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 196
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1361

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7573142 Alignment key structure in a semiconductor device and method of forming the sameApr 19, 06Aug 11, 09[H01L]
6934010 Optical proximity correction method utilizing gray bars as sub-resolution assist featuresFeb 27, 02Aug 23, 05[G03B, G03F]
6881523 Optical proximity correction method utilizing ruled ladder bars as sub-resolution assist featuresMar 13, 02Apr 19, 05[G03F]

Expired/Abandoned/Withdrawn Patents

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Top Inventors for This Owner

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