ASML NETHERLANDS B.V.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 1538 3
 
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 922 2
 
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS 250 4
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 219 246
 
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 162 65
 
 
H05G X-RAY TECHNIQUE 144 4
 
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 142 84
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 119 245
 
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 90 5
 
 
G01J MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 80 17
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2018/0073,992 Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method Aug 22, 17 Mar 15, 18 [G03F, G01N]
2018/0067,900 METHOD AND APPARATUS FOR INSPECTION AND METROLOGY Mar 25, 16 Mar 08, 18 [G03F, G06F]
2018/0063,935 OPTICAL ISOLATION MODULE Oct 23, 17 Mar 01, 18 [H01S, H05G]
2018/0045,657 VARIABLE CORRECTOR OF A WAVE FRONT Jul 31, 17 Feb 15, 18 [G01N]
2018/0046,091 Inspection Apparatus, Inspection Method, Lithographic Apparatus, Patterning Device and Manufacturing Method Oct 24, 17 Feb 15, 18 [G03F]
2018/0046,094 LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD Oct 26, 17 Feb 15, 18 [G03F]
2018/0046,737 METHOD AND APPARATUS FOR INSPECTION AND METROLOGY Mar 24, 16 Feb 15, 18 [G03F, G06F]
2018/0034,235 Radiation Source Jan 18, 16 Feb 01, 18 [H01S, G03F, H05G]
2018/0024,443 DEVICE MANUFACTURING METHOD AND PATTERNING DEVICES FOR USE IN DEVICE MANUFACTURING METHOD Feb 05, 16 Jan 25, 18 [G03F]
2018/0011,014 Method and Apparatus for Calculating Electromagnetic Scattering Properties of Finite Periodic Structures Jul 07, 17 Jan 11, 18 [G01N]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9921485 Method of performing model-based scanner tuning Oct 09, 15 Mar 20, 18 [G03F]
9921489 Focus monitoring arrangement and inspection apparatus including such an arrangement Sep 28, 15 Mar 20, 18 [G02B, G03F, G01B]
9921494 Lithographic apparatus comprising an actuator, and method for protecting such actuator Apr 12, 13 Mar 20, 18 [G03B, G03F]
9921497 Lithographic apparatus and device manufacturing method Mar 17, 15 Mar 20, 18 [G03F, H01L]
9924585 Radiation source, metrology apparatus, lithographic system and device manufacturing method Nov 14, 14 Mar 20, 18 [G03F, H05G, H01J, G01N]
9915877 Object holder and lithographic apparatus Jun 21, 17 Mar 13, 18 [G03B, G03F, H01L, H02K]
9915879 Substrate and patterning device for use in metrology, metrology method and device manufacturing method May 12, 15 Mar 13, 18 [G03B, G03F]
9915880 Stage apparatus, lithographic apparatus and method of positioning an object table Mar 22, 16 Mar 13, 18 [G03B, G03F]
9909983 Method and apparatus for improving measurement accuracy Feb 02, 16 Mar 06, 18 [G03F, G01B, G01N]
9909996 Diffraction based overlay metrology tool and method of diffraction based overlay metrology Mar 10, 14 Mar 06, 18 [G03F, G01N]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2017/0269,483 Lithographic Apparatus and Device Manufacturing Method Utilizing Data Filtering Abandoned Jun 05, 17 Sep 21, 17 [G03F]
2017/0261,866 THERMAL CONDITIONING FLUID PUMP Abandoned Oct 05, 15 Sep 14, 17 [G02B, F28D, G03F, F28F]
2017/0031,246 Inspection Apparatus, Inspection Method and Manufacturing Method Abandoned Jul 22, 16 Feb 02, 17 [G03F, G01B, G01N]
2016/0349,628 ROTATABLE FRAME, LITHOGRAPHIC APPARATUS, PROJECTION SYSTEM, METHOD FOR FOCUSING RADIATION AND DEVICE MANUFACTURING METHOD Abandoned Aug 12, 16 Dec 01, 16 [G03F]
2016/0165,709 System and Method for Isolating Gain Elements in a Laser System Abandoned Dec 05, 14 Jun 09, 16 [H05G]
2016/0041,478 Lithography Cluster, Method and Control Unit for Automatic Rework of Exposed Substrates Abandoned Mar 18, 14 Feb 11, 16 [G03F]
2016/0018,742 Method of Measuring Overlay Error and a Device Manufacturing Method Abandoned Sep 28, 15 Jan 21, 16 [G03F]
2015/0261,095 Radiation Source Abandoned Sep 06, 12 Sep 17, 15 [G03F]
2015/0264,791 Method and Apparatus for Generating Radiation Abandoned Jul 05, 13 Sep 17, 15 [H05G]
2015/0241,797 Reticle Cleaning by Means of Sticky Surface Abandoned Jul 30, 13 Aug 27, 15 [B08B, G03F]
2015/0124,231 Assembly For Modifying Properties Of A Plurality Of Radiation Beams, A Lithography Apparatus, A Method Of Modifying Properties Of A Plurality Of Radiation Beams And A Device Manufacturing Method Abandoned May 06, 13 May 07, 15 [G03F]
2015/0124,234 SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD Abandoned Mar 19, 13 May 07, 15 [G03F]
2015/0095,858 METHOD, PROGRAM PRODUCT AND APPARATUS FOR PERFORMING DOUBLE EXPOSURE LITHOGRAPHY Abandoned Dec 08, 14 Apr 02, 15 [G06F]
2015/0034,788 Rotatable Frame For a Lithographic Apparatus Abandoned Jan 30, 13 Feb 05, 15 [G03F]
2015/0009,481 Lithography Apparatus and System, a Method of Calibrating a Lithography Apparatus, and Device Manufacturing Methods Abandoned Jan 24, 13 Jan 08, 15 [G03F]
2014/0346,141 SELF-ASSEMBLABLE POLYMER AND METHODS FOR USE IN LITHOGRAPHY Abandoned Dec 18, 12 Nov 27, 14 [B05D]
2014/0340,663 Apparatus for Monitoring a Lithographic Patterning Device Abandoned Aug 21, 12 Nov 20, 14 [G03F]
2014/0293,251 Projection System, Lithographic Apparatus, Method of Projecting a Beam of Radiation onto a Target and Device Manufacturing Method Abandoned Jun 16, 14 Oct 02, 14 [G03F]
2014/0247,435 RADIATION SOURCE DEVICE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING METHOD Abandoned Oct 23, 12 Sep 04, 14 [G03F]
2014/0218,706 RADIATION SOURCE AND LITHOGRAPHIC APPARATUS Abandoned Jul 27, 12 Aug 07, 14 [G03F, H05G]

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