ATTOFEMTO, INC.
Patent Owner
Stats
- 18 US PATENTS IN FORCE
- 1 US APPLICATIONS PENDING
- Oct 06, 2016 most recent publication
Details
- 18 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 572 Total Citation Count
- Dec 23, 1998 Earliest Filing
- 3 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2016/0291,088 ADVANCED 4-DIMENSIONAL SIGNAL AND DEVICE TESTING USING CIRCUIT-STATE RECOGNITIONJun 09, 16Oct 06, 16[G01R]
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9366719 Optical to optical methods enhancing the sensitivity and resolution of ultraviolet, electron beam and ion beam devicesDec 17, 13Jun 14, 16[G01B, G01R]
9250064 Multiple beam transmission interferometric testing methods for the development and evaluation of subwavelength sized features within semiconductor and anisotropic devicesOct 23, 14Feb 02, 16[H01L, G01N, G01B]
8879071 Multiple optical wavelength interferometric testing methods for the development and evaluation of subwavelength sized features within semiconductor devices and materials, wafers, and monitoring all phases of development and manufactureMay 28, 13Nov 04, 14[H01L, G01N, G01B]
8736823 Methods and processes for optical interferometric or holographic test in the development, evaluation, and manufacture of semiconductor and free-metal devices utilizing anisotropic and isotropic materialsMar 05, 13May 27, 14[G01L, G01B]
8462350 Optically enhanced holographic interferometric testing methods for the development and evaluation of semiconductor devices, materials, wafers, and for monitoring all phases of development and manufactureFeb 03, 12Jun 11, 13[G01J, G01B]
8139228 Methods for optically enhanced holographic interferometric testing for test and evaluation of semiconductor devices and materialsMay 13, 10Mar 20, 12[G01B]
8040521 Holographic condition assessment system for a structure including a semiconductor materialApr 10, 09Oct 18, 11[G01B]
7773230 Interferometric condition assessment system for a microelectronic structure including a semiconductor or free-metal materialJul 14, 08Aug 10, 10[G01B]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2007/0018,662 CONDITION ASSESSMENT METHOD FOR A STRUCTURE INCLUDING A SEMICONDUCTOR MATERIALAbandonedSep 28, 06Jan 25, 07[G01R]
Top Inventors for This Owner
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