Advanced Metrology Systems LLC

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS297
 
  
 
G01J MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 177

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
5812261 Method and device for measuring the thickness of opaque and transparent filmsJan 15, 97Sep 22, 98[G01J]
5392118 Method for measuring a trench depth parameter of a materialSep 22, 93Feb 21, 95[G01B]
5384639 Depth measurement of high aspect ratio structuresMay 17, 93Jan 24, 95[G01B]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
7839509 Method of measuring deep trenches with model-based optical spectroscopyExpiredJun 30, 06Nov 23, 10[G01B]
7499183 Method of measuring sub-micron trench structuresExpiredJun 23, 04Mar 03, 09[G01B]
7365864 Method of determining properties of patterned thin film metal structures using transient thermal responseExpiredDec 10, 03Apr 29, 08[G01B]
2008/0049,214 Measuring Diffractive Structures By Parameterizing Spectral FeaturesAbandonedAug 28, 07Feb 28, 08[G01B]
7327468 Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces and thin filmsExpiredJul 26, 02Feb 05, 08[G01B]
2007/0109,540 Method for measuring thin filmsAbandonedApr 12, 04May 17, 07[G01N, G01B]
6812479 Sample positioning method for surface optical diagnostics using video imagingExpiredJun 05, 01Nov 02, 04[G01V]
6795198 Method and device for measuring thin films and semiconductor substrates using reflection mode geometryExpiredMay 28, 98Sep 21, 04[G01B]
6734982 Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structureExpiredFeb 28, 01May 11, 04[G01B]
6587794 Method for measuring thin metal filmsExpiredMay 10, 00Jul 01, 03[G06F]
6393915 Method and device for simultaneously measuring multiple properties of multilayer filmsExpiredJul 29, 99May 28, 02[G01H, G01B]
6256100 Method and device for measuring the thickness of thin films near a sample's edge and in a damascene-type structureExpiredApr 27, 98Jul 03, 01[G01N]
6188478 Method and apparatus for film-thickness measurementsExpiredOct 21, 98Feb 13, 01[G01N, G01B]
6175421 Method and apparatus for measuring material properties using transient-grating spectroscopyExpiredMay 25, 99Jan 16, 01[G01B]
6122064 Method for measuring thickness of filmsExpiredMay 28, 99Sep 19, 00[G01B]
6118533 Method and apparatus for measuring the concentration of ions implanted in semiconductor materialsExpiredSep 10, 97Sep 12, 00[G01B]
6075602 Method and apparatus for measuring material properties using transient-grating spectroscopyExpiredMay 25, 99Jun 13, 00[G01B]
6069703 Method and device for simultaneously measuring the thickness of multiple thin metal films in a multilayer structureExpiredMay 28, 98May 30, 00[G01N]
6052185 Method and apparatus for measuring the concentration of ions implanted in semiconductor materialsExpiredJun 30, 97Apr 18, 00[G01B]
6016202 Method and apparatus for measuring material properties using transient-grating spectroscopyExpiredJun 30, 97Jan 18, 00[G01B]

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