BROOKS AUTOMATION, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 112243
 
 
 
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 8010
 
 
 
B25J MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES 6513
 
 
 
B01D SEPARATION 4489
 
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 41398
 
 
 
F25B REFRIGERATION MACHINES, PLANTS, OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS 3635
 
 
 
G05B CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS 2174
 
 
 
G05D SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES 1760
 
 
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 14179
 
 
 
F04B POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS 1253

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0306,939 Multi-Refrigerator High Speed CryopumpJun 26, 17Oct 26, 17[F04B, F25B, B01D]
2017/0301,576 SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATIONJun 27, 17Oct 19, 17[H01L]
2017/0236,739 HIGH SPEED SUBSTRATE ALIGNER APPARATUSMar 21, 17Aug 17, 17[H01L]
2017/0205,437 AUTOMATED SAMPLE STORAGE SYSTEM HAVING STORAGE CONSUMABLE WITH SUB-OPTIMAL STORAGE DENSITYJan 19, 17Jul 20, 17[G01N]
2017/0087,720 TIME-OPTIMAL TRAJECTORIES FOR ROBOTIC TRANSFER DEVICESDec 12, 16Mar 30, 17[H01L, B25J]
2017/0084,476 PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERINGDec 05, 16Mar 23, 17[H01L]
2017/0018,446 ON THE FLY AUTOMATIC WAFER CENTERING METHOD AND APPARATUSJul 13, 16Jan 19, 17[H01L]
2017/0009,756 CRYOPUMP HYBRID FRONTAL ARRAYSep 20, 16Jan 12, 17[F04B]
2017/0002,802 Helium Management Control SystemApr 29, 16Jan 05, 17[F04B, F25B, B01D]
2016/0325,440 SUBSTRATE TRANSPORT APPARATUSJan 16, 15Nov 10, 16[H01L, B25J]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9812343 Load stationSep 14, 12Nov 07, 17[H01L]
9791466 Method and device for compensation for dimensional variations in low temperature sample group holdersJul 23, 12Oct 17, 17[B65G, G01N, B25J]
9761478 Substrate transport apparatusJan 28, 15Sep 12, 17[H01L]
9751209 Compact direct drive spindleNov 16, 15Sep 05, 17[H01L, B65H, B25J]
9752615 Reduced-complexity self-bearing brushless DC motorJun 27, 07Sep 05, 17[F16C]
9723832 Modular sample storeOct 19, 09Aug 08, 17[A01N, A47F, B65G, G01N]
9702887 Automated system for storing, retrieving and managing samplesAug 27, 12Jul 11, 17[B65G, G01N]
9687753 Multi-refrigerator high speed cryopumpJan 29, 13Jun 27, 17[F04B, F25D, F25B, B01D]
9691649 Linear vacuum robot with z motion and articulated armOct 31, 11Jun 27, 17[H01L]
9691651 Substrate handling system for aligning and orienting substrates during a transfer operationNov 25, 13Jun 27, 17[H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0069,339 Method And Apparatus For Providing Temperature Control To A CryopumpABANSep 11, 15Mar 10, 16[F04B, B01D]
9134161 Volumetric measurementWithdrawnFeb 25, 13Sep 15, 15[G01F]
2014/0367,051 DEVICE AND METHOD FOR REMOVING A PEELABLE SEALABANJun 26, 14Dec 18, 14[B01L]
2013/0180,171 Systems and Methods for Harvesting and/or Analyzing Biological SamplesABANJan 10, 13Jul 18, 13[A01G]
2011/0162,391 Method and Apparatus for Providing Temperature Control to a CryopumpABANDec 30, 10Jul 07, 11[B01D]
2011/0008,136 REDUCED CAPACITY CARRIER, TRANSPORT LOAD PORT, BUFFER SYSTEMABANSep 20, 10Jan 13, 11[H01L]
2010/0158,643 ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEMABANJan 29, 10Jun 24, 10[H01L]
2010/0147,181 Elevator-based tool loading and buffering systemABANJan 29, 10Jun 17, 10[E01B]
2008/0267,790 Electronically Controlled Vacuum PumpABANJul 10, 08Oct 30, 08[F04B]
7413411 Electronically controlled vacuum pumpExpiredApr 27, 05Aug 19, 08[F04B]
2008/0163,096 METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESSABANOct 23, 07Jul 03, 08[G06F]
2008/0155,444 METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESSABANOct 23, 07Jun 26, 08[G06F]
2008/0107,507 Reduced capacity carrier, transport, load port, buffer systemABANApr 18, 07May 08, 08[H01L]
2007/0201,967 REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEMABANNov 03, 06Aug 30, 07[B65H]
2007/0183,871 Substrate processing apparatusABANMay 26, 06Aug 09, 07[B65G]
7155919 Cryopump temperature control of arraysExpiredDec 31, 03Jan 02, 07[B01D]
2006/0196,023 Reduced cost process modulesABANMar 02, 05Sep 07, 06[B21D, B32B]
2006/0104,712 Transportation systemABANAug 24, 05May 18, 06[E01C]
7037083 Radiation shielding coatingExpiredJan 08, 03May 02, 06[F04B]
6986636 Device for positioning disk-shaped objectsExpiredMay 10, 01Jan 17, 06[G06F]

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