BROOKS AUTOMATION, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 123241
 
 
 
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 8211
 
 
 
B25J MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES 7015
 
 
 
B01D SEPARATION 4490
 
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 43404
 
 
 
F25B REFRIGERATION MACHINES, PLANTS, OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS 3635
 
 
 
G05B CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS 2180
 
 
 
G05D SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES 1767
 
 
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 14192
 
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 1190

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2018/0019,155 SUBSTRATE PROCESSING APPARATUSJun 27, 17Jan 18, 18[H01L, B25J]
2018/0009,173 TUBE SEALERFeb 05, 16Jan 11, 18[B29L, B29C, B65B]
2018/0005,866 SUBSTRATE TRANSPORT APPARATUSSep 12, 17Jan 04, 18[H01L]
2017/0361,459 COMPACT DIRECT DRIVE SPINDLESep 05, 17Dec 21, 17[H01L, B25J]
2017/0306,939 Multi-Refrigerator High Speed CryopumpJun 26, 17Oct 26, 17[F04B, F25B, B01D]
2017/0301,576 SUBSTRATE HANDLING SYSTEM FOR ALIGNING AND ORIENTING SUBSTRATES DURING A TRANSFER OPERATIONJun 27, 17Oct 19, 17[H01L]
2017/0236,739 HIGH SPEED SUBSTRATE ALIGNER APPARATUSMar 21, 17Aug 17, 17[H01L]
2017/0205,437 AUTOMATED SAMPLE STORAGE SYSTEM HAVING STORAGE CONSUMABLE WITH SUB-OPTIMAL STORAGE DENSITYJan 19, 17Jul 20, 17[G01N]
2017/0087,720 TIME-OPTIMAL TRAJECTORIES FOR ROBOTIC TRANSFER DEVICESDec 12, 16Mar 30, 17[H01L, B25J]
2017/0084,476 PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERINGDec 05, 16Mar 23, 17[H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9895695 Device and method for removing a peelable sealJun 26, 14Feb 20, 18[B01L, B29C, B32B, B67B]
9884726 Semiconductor wafer handling transportMar 17, 14Feb 06, 18[B65G, H01L]
9878453 Workpiece structures and apparatus for accessing sameAug 05, 14Jan 30, 18[B66F, B65G, H01L, B25J]
9880817 Tool compilerMar 19, 14Jan 30, 18[G06F]
9881825 Reduced capacity carrier and method of useNov 14, 14Jan 30, 18[H01L]
9868140 Recirculation substrate container purging systemsApr 11, 16Jan 16, 18[B08B, H01L]
9862554 Semiconductor wafer handling and transportOct 26, 12Jan 09, 18[B65G, H01L]
9859140 Fast swap dual substrate transport for load lockJul 30, 12Jan 02, 18[H01L]
9852935 Substrate processing apparatusJan 05, 16Dec 26, 17[G06F, H01L, B25J]
9842756 Integrated systems for interfacing with substrate container storage systemsNov 10, 14Dec 12, 17[H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0069,339 Method And Apparatus For Providing Temperature Control To A CryopumpABANSep 11, 15Mar 10, 16[F04B, B01D]
9134161 Volumetric measurementWithdrawnFeb 25, 13Sep 15, 15[G01F]
2013/0180,171 Systems and Methods for Harvesting and/or Analyzing Biological SamplesABANJan 10, 13Jul 18, 13[A01G]
2011/0162,391 Method and Apparatus for Providing Temperature Control to a CryopumpABANDec 30, 10Jul 07, 11[B01D]
2011/0008,136 REDUCED CAPACITY CARRIER, TRANSPORT LOAD PORT, BUFFER SYSTEMABANSep 20, 10Jan 13, 11[H01L]
2010/0158,643 ELEVATOR-BASED TOOL LOADING AND BUFFERING SYSTEMABANJan 29, 10Jun 24, 10[H01L]
2010/0147,181 Elevator-based tool loading and buffering systemABANJan 29, 10Jun 17, 10[E01B]
2008/0267,790 Electronically Controlled Vacuum PumpABANJul 10, 08Oct 30, 08[F04B]
7413411 Electronically controlled vacuum pumpExpiredApr 27, 05Aug 19, 08[F04B]
2008/0163,096 METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESSABANOct 23, 07Jul 03, 08[G06F]
2008/0155,444 METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESSABANOct 23, 07Jun 26, 08[G06F]
2008/0107,507 Reduced capacity carrier, transport, load port, buffer systemABANApr 18, 07May 08, 08[H01L]
2007/0201,967 REDUCED CAPACITY CARRIER, TRANSPORT, LOAD PORT, BUFFER SYSTEMABANNov 03, 06Aug 30, 07[B65H]
2007/0183,871 Substrate processing apparatusABANMay 26, 06Aug 09, 07[B65G]
7155919 Cryopump temperature control of arraysExpiredDec 31, 03Jan 02, 07[B01D]
2006/0196,023 Reduced cost process modulesABANMar 02, 05Sep 07, 06[B21D, B32B]
2006/0104,712 Transportation systemABANAug 24, 05May 18, 06[E01C]
7037083 Radiation shielding coatingExpiredJan 08, 03May 02, 06[F04B]
6986636 Device for positioning disk-shaped objectsExpiredMay 10, 01Jan 17, 06[G06F]
2005/0180,439 Network system, terminal setting method, address resolving server, and client terminalABANJan 20, 05Aug 18, 05[H04L]

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