BROOKS INSTRUMENT, LLC

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
 
 
G01F MEASURING VOLUME, VOLUME FLOW, MASS FLOW, OR LIQUID LEVEL; METERING BY VOLUME 3726
 
 
 
G05D SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES 1569
 
 
 
F16K VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING1459
 
 
 
G01L MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE 1145
 
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 3444
 
 
 
1004 OTHER MEASURING INSTRUMENTS, APPARATUS AND DEVICES234
 
 
 
A01G HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS, OR SEAWEED; FORESTRY; WATERING 131
 
 
 
B23P OTHER WORKING OF METAL; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS 155
 
 
 
F16L PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL169
 
 
 
F17D PIPE-LINE SYSTEMS; PIPE-LINES 113

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9631993 Self-heated MEMs based capacitance diaphragm gaugeDec 09, 11Apr 25, 17[G01L]
9464729 Pressure balanced valveJun 08, 12Oct 11, 16[F16K, G05D]
9099231 Pressure retaining sleeveOct 23, 07Aug 04, 15[F16K, H01F]
8887549 Valve leakby diagnosticsFeb 19, 07Nov 18, 14[F17D, G01F]
8751180 Methods and apparatus for pressure compensation in a mass flow controllerSep 18, 08Jun 10, 14[G01F]
8511169 Monolithic vacuum manometer utilizing electrostatic interference as a means of detectionJan 09, 12Aug 20, 13[G01L, H05K]
8504318 System, method and computer program for determining fluid flow rate using a pressure sensor and a thermal mass flow sensorMar 05, 08Aug 06, 13[G01F]
8141430 Monolithic vacuum manometer utilizing electrostatic interference as a means of detectionJun 30, 10Mar 27, 12[G01L, H05K]
8100382 Valve assemblyOct 08, 04Jan 24, 12[F16K, B05B]
8068999 Multi-gas flow deviceOct 13, 09Nov 29, 11[G01F]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2012/0197,446 ADVANCED FEED-FORWARD VALVE-CONTROL FOR A MASS FLOW CONTROLLERAbandonedDec 01, 11Aug 02, 12[G05D]
8197133 System and method for sensor thermal drift offset compensationExpiredDec 01, 08Jun 12, 12[G01K]
8118054 Solenoid needle valve assemblyExpiredDec 15, 09Feb 21, 12[F16K, F15D]
2011/0191,038 MASS FLOW CONTROLLER WITH IMPROVED DYNAMIC RESPONSEAbandonedFeb 24, 11Aug 04, 11[G06F, G01F]
7941284 Systems, apparatuses, and methods for measuring a fluid characteristic using a coriolis flow meterExpiredMar 03, 09May 10, 11[G01F]
7377152 Method and device for determining a characteristic value that is representative of the condition of a gasExpiredOct 17, 03May 27, 08[G01N]
2008/0097,657 Method and System for Wafer Temperature ControlAbandonedOct 13, 05Apr 24, 08[G05D]
7216019 Method and system for a mass flow controller with reduced pressure sensitivityExpiredJul 08, 04May 08, 07[G05D]
7133785 Valve control system and methodExpiredJul 08, 04Nov 07, 06[G06F]
7113895 System and method for filtering output in mass flow controllers and mass flow metersExpiredAug 26, 04Sep 26, 06[G06F]
7073388 Variable capacitance measuring device comprising a glass-ceramic insulatorExpiredNov 23, 04Jul 11, 06[G01L]
7043994 Variable capacitance measuring deviceExpiredSep 28, 04May 16, 06[G01L]
7004453 Pendulum valve with a full range of position controlExpiredSep 12, 01Feb 28, 06[F16K]
6964187 Vacuum sensorExpiredJan 31, 02Nov 15, 05[G01N, G01D]
6714878 System and method for a digital mass flow controllerExpiredJan 31, 02Mar 30, 04[G06F, G01F]
6575027 Mass flow sensor interface circuitExpiredJul 09, 99Jun 10, 03[G01F]
6539792 Method and apparatus for balancing resistanceExpiredFeb 14, 01Apr 01, 03[G01F]
6449571 System and method for sensor response linearizationExpiredJul 09, 99Sep 10, 02[G06F, G01F]
6445980 System and method for a variable gain proportional-integral (PI) controllerExpiredJul 10, 99Sep 03, 02[G05D]
6404612 Method for system for driving a solenoidExpiredJul 10, 99Jun 11, 02[H01H]

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