CVC, INC.
Patent Owner
Stats
- 1 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jul 15, 2003 most recent publication
Details
- 1 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 534 Total Citation Count
- Jul 10, 1996 Earliest Filing
- 9 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
6221217 Physical vapor deposition system having reduced thickness backing plateDec 03, 98Apr 24, 01[C23C]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
6167195 Multizone illuminator for rapid thermal processing with improved spatial resolutionExpiredMar 03, 00Dec 26, 00[F26B]
6124198 Ultra high-speed chip interconnect using free-space dielectricsExpiredNov 05, 98Sep 26, 00[H01L]
6106148 Apparatus including integral actuator with control for automated calibration of temperature sensors in rapid thermal processing equipmentExpiredJun 25, 99Aug 22, 00[G01K, H01L, F27D]
6108490 Multizone illuminator for rapid thermal processing with improved spatial resolutionExpiredDec 09, 98Aug 22, 00[A21B]
6016000 Ultra high-speed chip semiconductor integrated circuit interconnect structure and fabrication method using free-space dielectricsExpiredApr 22, 98Jan 18, 00[H01L]
5876573 High magnetic flux cathode apparatus and method for high productivity physical-vapor depositionExpiredJul 10, 96Mar 02, 99[C23C]
5871588 Programmable ultraclean electromagnetic substrate rotation apparatus and method for microelectronics manufacturing equipmentExpiredJul 10, 96Feb 16, 99[C23C]
5846883 Method for multi-zone high-density inductively-coupled plasma generationExpiredJul 10, 96Dec 08, 98[H01L]
Top Inventors for This Owner
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