Carl-Zeiss-Stiftung
Patent Owner
Stats
- 146 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Mar 30, 2010 most recent publication
Details
- 146 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 13,820 Total Citation Count
- Sep 27, 1977 Earliest Filing
- 443 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
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Recent Patents
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Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
7276718 System and method for determining a position or/and orientation of two objects relative to each other as well as beam guiding arrangement, interferometer arrangement and device for changing an optical path length for use in such a system and methodWithdrawnApr 10, 02Oct 02, 07[G01N]
7218445 Microlithographic reduction projection catadioptric objectiveExpiredMay 13, 03May 15, 07[G02B]
2006/0126,789 Catheter with inflatable balloon assembly and optically activated x-ray sourceAbandonedDec 10, 04Jun 15, 06[H01J, G21G, H05G]
6972831 Projection exposure system for microlithography and method for generating microlithographic imagesExpiredNov 09, 04Dec 06, 05[G03B]
6950174 Projection exposure system for microlithography and method for generating microlithographic imagesExpiredNov 09, 04Sep 27, 05[G03B]
6902283 Microlithography reduction objective and projection exposure apparatusExpiredJun 25, 03Jun 07, 05[G02B]
6903802 Projection objective having adjacently mounted aspheric lens surfacesExpiredNov 07, 03Jun 07, 05[G02B, G03B]
6885491 Diffraction-optical component, illumination system and exposure system comprising such a diffraction-optical component as well as an exposure method employing such an exposure systemExpiredMar 20, 02Apr 26, 05[H01L, H04B, G02F, H03H]
6854193 Rotating swivel unit for sensors of a coordinate measuring apparatus and method for determining corrective parameters of the rotating swivel unitExpiredMar 28, 03Feb 15, 05[G01B]
6822729 Projection exposure system for microlithography and method for generating microlithographic imagesWithdrawnMar 05, 01Nov 23, 04[G03B]
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