CYBEROPTICS SEMICONDUCTOR, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS297
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 1205
 
  
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 1158
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 1127
 
  
 
H01S DEVICES USING STIMULATED EMISSION191

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7804306 Capacitive distance sensing in semiconductor processing toolsFeb 20, 07Sep 28, 10[G01R]
7456977 Wireless substrate-like sensorMar 15, 06Nov 25, 08[G01B]
7289230 Wireless substrate-like sensorJan 31, 03Oct 30, 07[G01B]
7095763 Semiconductor wafer carrier mapping sensorDec 16, 02Aug 22, 06[H01S]
6130437 Sensor and detection system having wide diverging beam opticsApr 24, 98Oct 10, 00[G01N]
5504345 Dual beam sensor and edge detection system and methodApr 14, 94Apr 02, 96[H01J]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
7891981 System for maintaining a printed circuit board in an enclosureExpiredJul 02, 07Feb 22, 11[H01R]
7893697 Capacitive distance sensing in semiconductor processing toolsExpiredMar 26, 08Feb 22, 11[G01R]
2010/0201,984 IN-LINE HIGH PRESSURE PARTICLE SENSING SYSTEMAbandonedJan 25, 10Aug 12, 10[G01N]
2009/0101,792 WIRELESS ILLUMINATION SENSING ASSEMBLYAbandonedOct 14, 08Apr 23, 09[G01J]
2009/0015,268 DEVICE AND METHOD FOR COMPENSATING A CAPACITIVE SENSOR MEASUREMENT FOR VARIATIONS CAUSED BY ENVIRONMENTAL CONDITIONS IN A SEMICONDUCTOR PROCESSING ENVIRONMENTAbandonedJul 09, 08Jan 15, 09[G01R]
2009/0003,411 HIGH-TEMPERATURE SENSING SYSTEM WITH PASSIVE WIRELESS COMMUNICATIONAbandonedJun 04, 08Jan 01, 09[G01K, G01D]
2008/0246,493 Semiconductor Processing System With Integrated Showerhead Distance Measuring DeviceAbandonedMar 26, 08Oct 09, 08[C23C, H01L, G01R]
2008/0097,646 Calibration of a substrate handling robotAbandonedOct 23, 07Apr 24, 08[G05B, G01P, G01B]
2008/0087,116 Level sensor with redundant accelerometersAbandonedSep 27, 07Apr 17, 08[G01M]
7283255 Wireless substrate-like sensorExpiredMar 01, 06Oct 16, 07[G01B]
2005/0233,770 Wireless substrate-like sensorAbandonedMar 08, 05Oct 20, 05[H04M]
2005/0224,899 Wireless substrate-like sensorAbandonedMar 08, 05Oct 13, 05[H01L]
2005/0224,902 Wireless substrate-like sensorAbandonedMar 08, 05Oct 13, 05[H01L]
6897463 Wafer carrier mapping sensor assemblyExpiredJul 08, 02May 24, 05[H01J]
2005/0086,024 Semiconductor wafer location sensing via non contact methodsAbandonedSep 15, 04Apr 21, 05[G06F]
6825486 System for mapping wafers using predictive dynamic lightingExpiredJul 08, 02Nov 30, 04[G06K]
6392247 Sensor and detection system having wide diverging beam opticsExpiredAug 02, 00May 21, 02[G01N]
6346988 Laser position array optical measuring system and methodExpiredAug 01, 97Feb 12, 02[G01N, G01B]

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