EBARA TECHNOLOGIES INCORPORATED
Patent Owner
Stats
- 3 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jul 05, 2011 most recent publication
Details
- 3 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 366 Total Citation Count
- Sep 18, 1978 Earliest Filing
- 10 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2008/0051,011 Ethylene terephthalate polymer retaining ring for a chemical mechanical polishing headAbandonedOct 02, 06Feb 28, 08[B24B]
7125326 Apparatus and method for removing a CMP polishing pad from a platenExpiredJun 13, 05Oct 24, 06[B24D]
6913514 Chemical mechanical polishing endpoint detection system and methodExpiredJun 23, 03Jul 05, 05[B24B]
2004/0108,063 Method and polishing pad design enabling improved wafer removal from a polishing pad in a CMP processAbandonedMar 07, 03Jun 10, 04[C23F]
4295338 Cryogenic pumping apparatus with replaceable pumping surface elementsExpiredOct 18, 79Oct 20, 81[B01D]
4285710 Cryogenic device for restricting the pumping speed of selected gasesExpiredSep 18, 78Aug 25, 81[F25J]
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