ELECTRO SCIENTIFIC INDUSTRIES, INC.
Patent Owner
Stats
- 279 total patents issued
- 300 Total Apps Published
- May 23, 2013 most recent publication
Details
- 279 Issued Patents
- 98 Issued in last 3 years
- 88 Published in last 3 years
- 3,638 Total Citation Count
- Feb 21, 1980 Earliest Filing
- 45 Expired/Abandoned/Withdrawn Patents
Technologies
Intl Class
Technology
# of Patents
Rank
Top Patents (by citation)
Patent #
Title
Filing Date
Issue Date
Intl Class
Cited #
5,593,606 Ultraviolet laser system and method for forming vias in multi-layered targetsJul 18, 94Jan 14, 97[B23K]124
5,841,099 Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targetsMay 17, 96Nov 24, 98[B23K]114
5,751,585 High speed, high accuracy multi-stage tool positioning systemMar 12, 96May 12, 98[G06F, G06G]100
6,100,815 Compound switching matrix for probing and interconnecting devices under test to measurement equipmentDec 24, 97Aug 08, 00[H04Q]91
6,407,363 Laser system and method for single press micromachining of multilayer workpiecesMar 30, 01Jun 18, 02[B23K]74
6,574,250 Laser system and method for processing a memory link with a burst of laser pulses having ultrashort pulse widthsJan 09, 01Jun 03, 03[H01S, B23K]70
5,265,114 System and method for selectively laser processing a target structure of one or more materials of a multimaterial, multilayer deviceSep 10, 92Nov 23, 93[H01S]70
Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2013/0089,701 SUBSTRATE CONTAINING APERTURE AND METHODS OF FORMING THE SAMEOct 06, 11Apr 11, 13[B44C, B23K, B32B, H01L]
2013/0042,703 SAMPLE CHAMBER FOR LASER ABLATION INDUCTIVELY COUPLED PLASMA MASS SPECTROSCOPYOct 23, 12Feb 21, 13[H01J, G01N]
2013/0030,717 METHOD AND APPARATUS FOR CHARACTERIZING OBJECTS AND MONITORING MANUFACTURING PROCESSESJul 25, 12Jan 31, 13[H01J, G06F]
2012/0329,246 ETCHING A LASER-CUT SEMICONDUCTOR BEFORE DICING A DIE ATTACH FILM (DAF) OR OTHER MATERIAL LAYERJun 24, 11Dec 27, 12[H01L]
2012/0318,639 Shallow Angle Vertical Rotary Loader For Electronic Device TestingJun 17, 11Dec 20, 12[B65G]
2012/0319,712 Probe Module With Interleaved Serpentine Test Contacts For Electronic Device TestingJun 17, 11Dec 20, 12[G01R]
2012/0273,472 LASER PROCESSING SYSTEMS AND METHODS FOR BEAM DITHERING AND SKIVINGOct 24, 11Nov 01, 12[B23K, B29C]
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
8,415,586 Method for increasing throughput of solder mask removal by minimizing the number of cleaning pulsesOct 16, 09Apr 09, 13[B23K]
8,404,998 Acousto-optic deflector applications in laser processing of dielectric or other materialsMay 28, 10Mar 26, 13[B23K]
8,394,301 Process for forming panel with an optically transmissive portion and products related theretoMay 01, 07Mar 12, 13[B23K, B29D]
8,383,982 Methods and systems for semiconductor structure processing using multiple laser beam spotsOct 30, 07Feb 26, 13[B23K]
8,378,252 Method and apparatus for hybrid resolution feedback of a motion stageMay 27, 10Feb 19, 13[G02F, B23K]
8,378,259 Eliminating head-to-head offsets along common chuck travel direction in multi-head laser machining systemsSep 30, 08Feb 19, 13[B23K]
Top Inventors for This Owner
Inventor Name
Address
# of Patent/Pub
