Excimer Laser Systems, Inc.

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6032997 Vacuum chuckExpiredApr 16, 98Mar 07, 00[B25J]
5771260 Enclosure system for laser optical systems and devicesExpiredOct 04, 96Jun 23, 98[H01S]
5559338 Deep ultraviolet optical imaging system for microlithography and/or microfabricationExpiredOct 04, 94Sep 24, 96[H01L, B23K]
5488229 Deep ultraviolet microlithography systemExpiredOct 04, 94Jan 30, 96[G21K]
5206515 Deep ultraviolet photolithography and microfabricationExpiredAug 29, 91Apr 27, 93[H01L, B23K]

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