FEI COMPANY

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 35810
 
 
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 14774
 
 
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 499
 
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 4754
 
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 34328
 
 
 
G06K RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS 17181
 
 
 
G06T IMAGE DATA PROCESSING OR GENERATION, IN GENERAL 15120
 
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 1422
 
 
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 14191
 
 
 
G21G CONVERSION OF CHEMICAL ELEMENTS; RADIOACTIVE SOURCES 108

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2018/0061,613 CHARGED-PARTICLE MICROSCOPE WITH EXCHANGEABLE POLE PIECE EXTENDING ELEMENTAug 22, 17Mar 01, 18[H01J]
2017/0169,991 PREPARATION OF CRYOGENIC SAMPLE FOR CHARGED-PARTICLE MICROSCOPYJul 25, 16Jun 15, 17[H01J, F25B]
2017/0103,868 INVESTIGATION OF HIGH-TEMPERATURE SPECIMENS IN A CHARGED PARTICLE MICROSCOPEJul 11, 16Apr 13, 17[H01J]
2017/0002,467 ADAPTIVE CONTROL FOR CHARGED PARTICLE BEAM PROCESSINGJul 04, 16Jan 05, 17[C23C]
2016/0307,727 METHOD OF MANIPULATING A SAMPLE IN AN EVACUATED CHAMBER OF A CHARGED PARTICLE APPARATUSApr 14, 16Oct 20, 16[H01J]
2016/0244,871 MULTI-SOURCE GIS FOR PARTICLE-OPTICAL APPARATUSFeb 24, 16Aug 25, 16[C23C, B05B]
2016/0056,015 Radiation Sensor, and its Application in a Charged-Particle MicroscopeAug 24, 15Feb 25, 16[H01J]
2016/0032,281 FUNCTIONALIZED GRIDS FOR LOCATING AND IMAGING BIOLOGICAL SPECIMENS AND METHODS OF USING THE SAMEJul 31, 14Feb 04, 16[C12N, C12Q]
2015/0357,159 Fiducial Design for Tilted or Glancing Mill Operations with a Charged Particle BeamDec 30, 13Dec 10, 15[H01J]
2015/0332,891 USER INTERFACE FOR AN ELECTRON MICROSCOPEMay 05, 15Nov 19, 15[H01J]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9899181 Collision ionization ion sourceJan 12, 17Feb 20, 18[H01J]
9885660 Standing wave interferometric microscopeAug 24, 16Feb 06, 18[G02B, G01N]
9881766 Differential imaging with pattern recognition for process automation of cross sectioning applicationsMar 28, 16Jan 30, 18[H01J, G01N]
9875879 Charged particle microscope with vibration detection / correctionAug 22, 16Jan 23, 18[H01J]
9865427 User interface for an electron microscopeMay 05, 15Jan 09, 18[H01J]
9865428 Preparation of cryogenic sample for charged-particle microscopyJul 25, 16Jan 09, 18[H01J, F25B, G01N]
9852750 Method and apparatus for controlling topographical variation on a milled cross-section of a structureApr 18, 12Dec 26, 17[G11B]
9837246 Reinforced sample for transmission electron microscopeJul 22, 16Dec 05, 17[C09K, G03F, H01J]
9821486 Integrated lamellae extraction stationOct 30, 13Nov 21, 17[B26D, B23K, G01N]
9818584 Internal split faraday shield for a plasma sourceJul 07, 14Nov 14, 17[B44C, C23F, H01J, C03C]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2015/0369,710 Method and System of Creating a Symmetrical FIB DepositionAbandonedOct 27, 14Dec 24, 15[C23C, G03F, H01J, G01N]
2015/0330,877 METHOD FOR PREPARING SAMPLES FOR IMAGINGAbandonedDec 30, 13Nov 19, 15[H01L, G01N]
9190244 Method and apparatus for slice and view sample imagingWithdrawnMay 30, 14Nov 17, 15[H01J]
2015/0279,615 Imaging a Sample with Multiple Beams and Multiple DetectorsAbandonedMar 25, 15Oct 01, 15[H01J]
8928210 System for attachment of an electrode into an inductively coupled plasma sourceWithdrawnNov 30, 11Jan 06, 15[H01J]
2014/0077,080 X-ray Detector for Electron MicroscopeAbandonedNov 26, 13Mar 20, 14[H01J]
2014/0054,267 GAS-ASSISTED LASER ABLATIONAbandonedAug 19, 13Feb 27, 14[B23K]
2013/0313,783 High-Vacuum SealAbandonedMay 13, 13Nov 28, 13[F16L]
2013/0316,365 Method of Preparing a Biological Sample for Inspection with Electron Microscopy and Fluorescent Light MicroscopyAbandonedSep 21, 11Nov 28, 13[G01N]
2013/0250,293 Method and Apparatus for Actively Monitoring an Inductively-Coupled Plasma Ion Source using an Optical SpectrometerAbandonedMar 20, 12Sep 26, 13[G01J]
2013/0192,758 High Resolution Plasma EtchAbandonedNov 05, 12Aug 01, 13[B05C]
2013/0098,871 Internal Split Faraday Shield for an Inductively Coupled Plasma SourceAbandonedOct 19, 11Apr 25, 13[C23F]
2012/0273,677 IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMNAbandonedApr 26, 12Nov 01, 12[H01J]
2012/0199,738 IN-CHAMBER ELECTRON DETECTORAbandonedApr 18, 12Aug 09, 12[H01J]
2012/0138,792 OPTICAL PROBING IN ELECTRON MICROSCOPESAbandonedApr 15, 10Jun 07, 12[H01J]
7800063 Manipulator for rotating and translating a sample holderWithdrawnSep 26, 07Sep 21, 10[G21K, G01N, H02K]
2010/0230,590 Compact Scanning Electron MicroscopeAbandonedJun 07, 07Sep 16, 10[H01J]
2006/0185,424 Integrated measuring instrumentAbandonedJan 17, 06Aug 24, 06[G01B]
2006/0099,519 Method of depositing a material providing a specified attenuation and phase shiftAbandonedNov 10, 04May 11, 06[G03C, C23C, G03F, C25B]
2006/0017,016 Method for the removal of a microscopic sample from a substrateAbandonedJun 27, 05Jan 26, 06[H01J]

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