FSI INTERNATIONAL, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 454
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 1100
 
  
 
F01L CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES 154
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1361

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7681581 Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluidsMar 15, 06Mar 23, 10[B08B]
7364625 Rinsing processes and equipmentMay 20, 02Apr 29, 08[B08B]
6183566 UV/halogen metals removal processJun 01, 99Feb 06, 01[B08B]
6165273 Equipment for UV wafer heating and photochemistryOct 21, 97Dec 26, 00[C23C]
6158446 Ultra-low particle semiconductor cleanerSep 04, 98Dec 12, 00[B08B]
RE36006 Metal selective polymer removalOct 31, 96Dec 22, 98[H01L]
5540136 Reciprocating piston motor operating on pressure mediumFeb 21, 95Jul 30, 96[F01L]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2009/0304,995 HYDROPHILIC FLUOROPOLYMER MATERIALS AND METHODSAbandonedJun 04, 09Dec 10, 09[B24B, B24C, B32B, B44C]
2008/0213,076 Edge grip end effectorAbandonedFeb 28, 08Sep 04, 08[B66C]
2008/0006,303 Liquid aersol particle removal methodAbandonedJul 06, 07Jan 10, 08[B08B]
7312161 Advanced process control for low variation treatment in immersion processingExpiredMay 05, 06Dec 25, 07[H01L]
7238239 Liquid coating device with barometric pressure compensationExpiredJul 28, 03Jul 03, 07[B05C]
2007/0001,638 Robot with vibration sensor deviceAbandonedJun 23, 06Jan 04, 07[G05B, B25J]
2006/0272,677 Cleaning process for semiconductor substratesAbandonedJun 20, 05Dec 07, 06[B08B, C23G]
2006/0266,737 Process for removal of metals and alloys from a substrateAbandonedMay 25, 06Nov 30, 06[B44C]
7134827 Reduced footprint tool for automated processing of microelectronic substratesExpiredSep 28, 04Nov 14, 06[B65G]
2006/0174,828 Processing system with multi-chamber pump, and related apparatus and methodsAbandonedFeb 07, 05Aug 10, 06[B05C]
7089076 Scheduling multi-robot processing systemsExpiredMay 16, 03Aug 08, 06[G06F]
2006/0105,683 Nozzle design for generating fluid streams useful in the manufacture of microelectronic devicesAbandonedNov 08, 05May 18, 06[B24C]
7025831 Apparatus for surface conditioningExpiredNov 19, 99Apr 11, 06[C23C]
2006/0070,979 Using ozone to process wafer like objectsAbandonedSep 13, 05Apr 06, 06[C03C, H01L, B08B]
6996456 Robot with tactile sensor deviceExpiredFeb 19, 03Feb 07, 06[G05B]
6979165 Reduced footprint tool for automated processing of microelectronic substratesExpiredNov 12, 02Dec 27, 05[B65H]
2005/0098,194 Semiconductor wafer immersion systems and treatments using modulated acoustic energyAbandonedSep 10, 04May 12, 05[B08B]
2005/0072,625 Acoustic diffusers for acoustic field uniformityAbandonedSep 10, 04Apr 07, 05[H03G]
6854514 Temperature control apparatus and method with recirculated coolantExpiredAug 06, 01Feb 15, 05[F25B]
2005/0000,549 Wafer processing using gaseous antistatic agent during drying phase to control charge build-upAbandonedJul 03, 03Jan 06, 05[B08B]

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