FUSION SYSTEMS CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H05B ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR 2109
 
  
 
B01D SEPARATION 1133
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 1103

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6117622 Controlled shrinkage of photoresistSep 05, 97Sep 12, 00[G03F]
5571439 Magnetron variable power supply with moding preventionApr 27, 95Nov 05, 96[H05B]
5273723 Resist oxidizer with catalytic reactorMay 14, 92Dec 28, 93[B01D]
5227698 Microwave lamp with rotating fieldMar 12, 92Jul 13, 93[H05B]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6214524 Controlled amine poisoning for reduced shrinkage of features formed in photoresistExpiredMay 12, 99Apr 10, 01[H01L, G03F]
6057084 Controlled amine poisoning for reduced shrinkage of features formed in photoresistExpiredOct 03, 97May 02, 00[G03F]
5767626 Electrodeless lamp starting/operation with sources at different frequenciesExpiredDec 06, 95Jun 16, 98[H01J]
5674039 System for transferring articles between controlled environmentsExpiredAug 21, 96Oct 07, 97[B65G]
5438242 Apparatus for controlling the brightness of a magnetron-excited lampExpiredJun 24, 93Aug 01, 95[H05B]
5412684 Microwave excited gas laserExpiredMar 10, 93May 02, 95[H01S]
5361274 Microwave discharge device with TM.sub.NMO cavityExpiredMar 12, 92Nov 01, 94[H01S]
5118989 Surface discharge radiation sourceExpiredDec 11, 89Jun 02, 92[H01J]
5071485 Method for photoresist stripping using reverse flowExpiredSep 11, 90Dec 10, 91[B08B]
5051663 Electrodeless lamp with improved bulb mounting arrangementExpiredMar 26, 90Sep 24, 91[H05B]
5005519 Reaction chamber having non-clouded windowExpiredMar 14, 90Apr 09, 91[C23C]
5005119 User interactive control of computer programs and corresponding versions of input/output data flowExpiredAug 29, 89Apr 02, 91[G06F]
4978891 Electrodeless lamp system with controllable spectral outputExpiredApr 17, 89Dec 18, 90[H01J, H05B]
4970056 Ozone generator with improved dielectric and method of manufactureExpiredJan 18, 89Nov 13, 90[B01J]
4954755 Electrodeless lamp having hybrid cavityExpiredApr 04, 88Sep 04, 90[H05B]
4947080 Apparatus for rotating an electrodeless light sourceExpiredAug 09, 89Aug 07, 90[H01J]
4887008 Electrodeless lamp bulb of modified shape for providing uniform emission of radiationExpiredApr 19, 88Dec 12, 89[H01J]
4887192 Electrodeless lamp having compound resonant structureExpiredNov 04, 88Dec 12, 89[F21K]
4885047 Apparatus for photoresist strippingExpiredJan 11, 88Dec 05, 89[C03C, B29C, B44C]
4859906 Deep UV lamp bulb with improved fillExpiredOct 06, 82Aug 22, 89[H01J]

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