FILMETRICS, INC.
Patent Owner
Stats
- 7 US PATENTS IN FORCE
- 3 US APPLICATIONS PENDING
- Nov 02, 2017 most recent publication
Details
- 7 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 408 Total Citation Count
- Dec 11, 1998 Earliest Filing
- 8 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9019484 Combining normal-incidence reflectance and transmittance with non-normal-incidence reflectance for model-free characterization of single-layer filmsOct 05, 11Apr 28, 15[G01N, G01B]
8908177 Correction of second-order diffraction effects in fiber-optic-based spectrometersJan 16, 13Dec 09, 14[G01J]
7502119 Thin-film metrology using spectral reflectance with an intermediate in-line referenceJan 29, 07Mar 10, 09[G01B]
6204922 Rapid and accurate thin film measurement of individual layers in a multi-layered or patterned sampleDec 11, 98Mar 20, 01[G01B]
6184985 Spectrometer configured to provide simultaneous multiple intensity spectra from independent light sourcesDec 11, 98Feb 06, 01[G01J, G01B]
6172756 Rapid and accurate end point detection in a noisy environmentDec 11, 98Jan 09, 01[B24B, G01B]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2013/0265,795 HIGH-LIFETIME BROADBAND LIGHT SOURCE FOR LOW-POWER APPLICATIONSAbandonedJan 16, 13Oct 10, 13[F21V]
2011/0170,097 Fiber-Based Optical Probe With Decreased Sample-Positioning SensitivityAbandonedJan 11, 11Jul 14, 11[G01J, G01B]
7095511 Method and apparatus for high-speed thickness mapping of patterned thin filmsExpiredJul 03, 01Aug 22, 06[G01B]
2005/0174,583 Method and apparatus for high-speed thickness mapping of patterned thin filmsAbandonedFeb 10, 05Aug 11, 05[G01B]
2005/0174,584 Method and apparatus for high-speed thickness mapping of patterned thin filmsAbandonedFeb 23, 05Aug 11, 05[G01B]
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