GCA CORPORATION, A CORP. OF DE
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jul 25, 1989 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 1,074 Total Citation Count
- Mar 18, 1977 Earliest Filing
- 32 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
- No Technology to Display
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Recent Publications
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Recent Patents
- No Recent Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
4850299 Semiconductor wafer coating apparatus with angular oscillation meansExpiredMay 24, 88Jul 25, 89[B05C]
4790642 Integrated metrology for microlithographic objective reducing lensExpiredDec 01, 86Dec 13, 88[G02B, G01B, G01R]
4556785 Apparatus for vapor sheathed baking of semiconductor wafersExpiredMay 23, 83Dec 03, 85[H05B]
4509858 Compact, linear measurement interferometer with zero abbe errorExpiredJan 17, 83Apr 09, 85[G01B]
4502871 Apparatus and method for separating wax from an entrainer gasExpiredFeb 01, 83Mar 05, 85[B01D]
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