High Yield Technology
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Oct 20, 1992 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 94 Total Citation Count
- Sep 16, 1986 Earliest Filing
- 6 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
- No Technology to Display
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
- No Recent Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
5157678 Laser safe housing for a particle monitor in vacuum pump linesExpiredJul 03, 91Oct 20, 92[H01S]
4792199 System for detection of extremely small particles in a low pressure environmentExpiredOct 27, 87Dec 20, 88[G01N]
4783599 Particle detector for flowing liquids with the ability to distinguish bubbles via photodiodes disposed 180.degree. apartExpiredFeb 10, 87Nov 08, 88[G01N]
4739177 Light scattering particle detector for wafer processing equipmentExpiredSep 16, 86Apr 19, 88[G01N]
Top Inventors for This Owner
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