HITACHI KOKUSAI ELECTRIC INC.

Patent Owner

Watch Compare Add to Portfolio

Stats

Details

Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 59280
 
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 4014
 
 
 
H04N PICTORIAL COMMUNICATION, e.g. TELEVISION 78165
 
 
 
H04B TRANSMISSION 60150
 
 
 
H04L TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION 60225
 
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 52395
 
 
 
H03F AMPLIFIERS 3847
 
 
 
1303 EQUIPMENT FOR DISTRIBUTION OR CONTROL OF ELECTRIC POWER3637
 
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 3593
 
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 3411

Top Patents (by citation)

Upgrade to the Professional Level to View Top Patents for this Owner. Learn More

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2018/0076,063 SUBSTRATE PROCESSING APPARATUSSep 07, 17Mar 15, 18[C23C, H01L]
2018/0040,488 SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND FLUID CIRCULATION MECHANISMAug 02, 17Feb 08, 18[H01L]
2018/0033,607 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUMJul 21, 17Feb 01, 18[C23C, H01L]
2017/0365,459 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUMSep 06, 17Dec 21, 17[H01L]
2017/0309,490 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICESep 24, 14Oct 26, 17[C23C, H01L]
2017/0300,044 SUBSTRATE PROCESSING APPARATUS AND APPARATUS MANAGEMENT CONTROLLERMar 29, 17Oct 19, 17[G05B]
2017/0294,318 SUBSTRATE PROCESSING DEVICE, MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE, AND REACTION TUBESep 30, 14Oct 12, 17[C23C, H01L]
2017/0283,949 Substrate Processing ApparatusMar 13, 17Oct 05, 17[C23C]
2017/0283,950 SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUMFeb 28, 17Oct 05, 17[C23C, H01L]
2017/0285,613 SUBSTRATE PROCESSING APPARATUS, DEVICE MANAGEMENT CONTROLLER, AND RECORDING MEDIUMMar 24, 17Oct 05, 17[G05B]

View all Publication..

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9922821 Method of manufacturing semiconductor device, using hydrocarbon and halogen-based precursors, substrate processing apparatus for processing same, and recording medium comprising hydrocarbon and halogen-based precursorsMar 27, 15Mar 20, 18[C23C, H01L]
D813065 Gas sampling cellAug 08, 16Mar 20, 18[1004]
D813181 Cover of seal cap for reaction chamber of semiconductorJan 25, 17Mar 20, 18[1303]
9916976 Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumSep 16, 16Mar 13, 18[C23C, H01L]
9911580 Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatusNov 29, 11Mar 06, 18[B08B, G03F, H01J, H01L]
9911635 Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumSep 11, 15Mar 06, 18[C23C, H01L]
9905413 Method of manufacturing semiconductor deviceMar 08, 17Feb 27, 18[C23C, H01L]
9895727 Method of manufacturing semiconductor device, method of cleaning interior of process chamber, substrate processing apparatus, and recording mediumSep 22, 16Feb 20, 18[C23C, B08B, H01L]
9899211 Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording mediumFeb 04, 15Feb 20, 18[C23C, H01L]
9890458 Method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumFeb 23, 15Feb 13, 18[C23C, H01L]

View all patents..

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2017/0283,945 Substrate Processing ApparatusAbandonedJul 06, 16Oct 05, 17[C23C, H01J, H01L]
2017/0198,391 SUBSTRATE PROCESSING APPARATUSAbandonedMar 18, 16Jul 13, 17[C23C, H01J, H01L, B25J]
2017/0186,634 SUBSTRATE PROCESSING APPARATUSAbandonedMar 16, 16Jun 29, 17[C23C, H01J, H01L]
2017/0062,254 SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUMAbandonedSep 22, 15Mar 02, 17[C23C, H01L]
2016/0293,460 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING SYSTEMAbandonedSep 18, 15Oct 06, 16[C23C, H01L]
2016/0284,543 SUBSTRATE PROCESSING APPARATUS, PROGRAM AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICEAbandonedMar 23, 16Sep 29, 16[H01J, H01L]
2016/0237,568 SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER READABLE RECORDING MEDIUMAbandonedMar 30, 15Aug 18, 16[C23C]
2016/0224,209 VIDEO MONITORING SYSTEM AND VIDEO DISPLAY METHODAbandonedSep 20, 13Aug 04, 16[H04N, G06F]
2016/0218,012 METHOD OF FORMING FINE PATTERN, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUMAbandonedSep 29, 14Jul 28, 16[H01J, H01L]
2016/0211,151 SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICEAbandonedJul 26, 13Jul 21, 16[H01J, H01L]
2016/0201,193 Substrate Processing Apparatus, Gas Dispersion Unit, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording MediumAbandonedMar 26, 15Jul 14, 16[C23C]
2016/0177,446 Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording MediumAbandonedJul 17, 15Jun 23, 16[C23C]
2016/0153,085 SUBSTRATE PROCESSING APPARATUSAbandonedMar 31, 15Jun 02, 16[C23C, H01L]
2016/0155,630 SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUMAbandonedJan 27, 16Jun 02, 16[H01L]
2016/0126,337 SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SUBSTRATE PROCESSING METHODAbandonedMay 29, 14May 05, 16[C23C, H01L]
2016/0111,466 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUSAbandonedDec 30, 15Apr 21, 16[C23C, H01L]
2016/0090,651 SUBSTRATE PROCESSING APPARATUSAbandonedAug 31, 15Mar 31, 16[C23C]
2016/0093,508 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUMAbandonedSep 18, 15Mar 31, 16[C23C, H01L]
2016/0083,843 SUBSTRATE PROCESSING APPARATUSAbandonedSep 01, 15Mar 24, 16[C23C]
2016/0083,844 Substrate Processing Apparatus, Gas Introduction Shaft and Gas Supply PlateAbandonedAug 14, 15Mar 24, 16[C23C]

View all patents..

Top Inventors for This Owner

Upgrade to the Professional Level to View Top Inventors for this Owner. Learn More

We are sorry but your current selection exceeds the maximum number of comparisons () for this membership level. Upgrade to our Level for up to -1 comparisons!

We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level. Upgrade to our Level for up to -1 portfolios!.