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INTEVAC, INC.
Patent Owner
Stats
66
total patents issued
72 Total Apps Published
May 02, 2013 most recent publication
Details
66 Issued Patents
8 Issued in last 3 years
29 Published in last 3 years
893 Total Citation Count
Nov 02, 1983 Earliest Filing
15 Expired/Abandoned/Withdrawn Patents
Technologies
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 13 244
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 12 51
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 11 101
H05H PLASMA TECHNIQUE 3 22
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 2 68
B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR LOADING OR TIPPING; SHOP CONVEYER SYSTEMS; PNEUMATIC TUBE CONVEYERS 2 49
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 2 27
B05C APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 1 35
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 1 67
B32B LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM 1 120
Top Patents (by citation)
5,215,420 Substrate handling and processing system Sep 20, 91 Jun 01, 93 [B65G] 47 5,425,611 Substrate handling and processing system Apr 13, 94 Jun 20, 95 [C23C] 35 5,684,360 Electron sources utilizing negative electron affinity photocathodes with ultra-small emission areas Jul 10, 95 Nov 04, 97 [H01J] 32 5,181,556 System for substrate cooling in an evacuated environment Sep 20, 91 Jan 26, 93 [F23F] 27 5,576,559 Heterojunction electron transfer device Nov 01, 94 Nov 19, 96 [H01L] 26 5,374,826 Hybrid photomultiplier tube with high sensitivity Jul 14, 93 Dec 20, 94 [H01J] 26 5,738,767 Substrate handling and processing system for flat panel displays Nov 23, 94 Apr 14, 98 [C23C] 25 6,919,001 Disk coating system Feb 10, 03 Jul 19, 05 [C23C, B65G] 21 6,285,018 Electron bombarded active pixel sensor Jul 20, 99 Sep 04, 01 [H01L] 20 5,475,227 Hybrid photomultiplier tube with ion deflector Nov 28, 94 Dec 12, 95 [H01J] 16
Recent Publications
2013/0105,087 SOLAR WAFER ELECTROSTATIC CHUCK Nov 01, 12 May 02, 13 [H02N, H01L] 2013/0105,928 BACKSIDE-THINNED IMAGE SENSOR USING Al2O3 SURFACE PASSIVATION Sep 14, 12 May 02, 13 [H01L] 2013/0109,189 SYSTEM ARCHITECTURE FOR PLASMA PROCESSING SOLAR WAFERS Nov 01, 12 May 02, 13 [H01L] 2013/0098,761 SYSTEM AND METHOD FOR COMMERCIAL FABRICATION OF PATTERNED MEDIA Dec 12, 12 Apr 25, 13 [G11B] 2013/0087,531 INDUCTIVE/CAPACITIVE HYBRID PLASMA SOURCE AND SYSTEM WITH SUCH CHAMBER Oct 04, 12 Apr 11, 13 [B44C, C23F, H05H] 2012/0291,955 LARGE AREA ICP SOURCE FOR PLASMA APPLICATION May 16, 12 Nov 22, 12 [H01L] 2012/0295,394 METHOD FOR REAR POINT CONTACT FABRICATION FOR SOLAR CELLS May 16, 12 Nov 22, 12 [H01L] 2012/0180,862 NON-CONTACTING BUS BARS FOR SOLAR CELLS AND METHODS OF MAKING NON-CONTACTING BUS BARS Jan 13, 12 Jul 19, 12 [H01L] 2012/0171,807 METHOD AND APPARATUS FOR MASKING SUBSTRATES FOR DEPOSITION Dec 27, 11 Jul 05, 12 [H01L, B05B] 2012/0152,726 METHOD AND APPARATUS TO PRODUCE HIGH DENSITY OVERCOATS Apr 26, 11 Jun 21, 12 [C23C]
Recent Patents
8,421,012 Low energy portable low-light camera with wavelength cutoff Aug 31, 10 Apr 16, 13 [H01L] 8,382,965 Tools and methods for mounting transport rails in a substrate processing system Oct 31, 08 Feb 26, 13 [C23C, C25B] 8,363,378 Method for optimized removal of wafer from electrostatic chuck Feb 17, 09 Jan 29, 13 [H01T] 8,354,001 Processing thin wafers Dec 20, 11 Jan 15, 13 [C23F, C23C] 8,349,196 System and method for commercial fabrication of patterned media Dec 05, 08 Jan 08, 13 [B44C] 8,206,551 Processing thin wafers Jun 16, 09 Jun 26, 12 [C23F, C23C] 8,114,339 Method of and apparatus utilizing carbon cord for evaporation of metals Feb 24, 10 Feb 14, 12 [F27B] 8,087,380 Evaporative system for solar cell fabrication Oct 30, 09 Jan 03, 12 [C23C] 7,611,322 Processing thin wafers Aug 31, 05 Nov 03, 09 [C23F, C23C, H01L, B65H] 7,607,560 Semiconductor die attachment for high vacuum tubes Jul 28, 05 Oct 27, 09 [B23K]
Top Inventors for This Owner
