KLA Instruments Corporation

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 8198
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS594
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 4124
 
  
 
G06K RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS 3195
 
  
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 2203
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1361
 
  
 
H04N PICTORIAL COMMUNICATION, e.g. TELEVISION 1241

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6141038 Alignment correction prior to image sampling in inspection systemsJun 27, 97Oct 31, 00[H04N]
6133576 Broad spectrum ultraviolet inspection methods employing catadioptric imagingOct 14, 97Oct 17, 00[G01N]
6079256 Overlay alignment measurement of wafersDec 07, 98Jun 27, 00[G01B]
6078386 Inspection system simultaneously utilizing monochromatic darkfield and broadband brightfield illumination sourcesJul 13, 98Jun 20, 00[G01N, G01B]
6023338 Overlay alignment measurement of wafersJul 12, 96Feb 08, 00[G01B]
6021214 Inspection method and apparatus for the inspection of either random or repeating patternsSep 07, 95Feb 01, 00[G06K]
5991699 Detecting groups of defects in semiconductor feature spaceApr 02, 97Nov 23, 99[H01L]
5956174 Broad spectrum ultraviolet catadioptric imaging systemJan 15, 98Sep 21, 99[G02B]
5917588 Automated specimen inspection system for and method of distinguishing features or anomalies under either bright field or dark field illuminationNov 04, 96Jun 29, 99[G01N]
5889593 Optical system and method for angle-dependent reflection or transmission measurementFeb 26, 97Mar 30, 99[G01N]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2008/0304,734 Alignment correction prio to image sampling in inspection systemsAbandonedAug 07, 08Dec 11, 08[G06K]
2008/0285,023 Optical inspection of a specimen using multi-channel responses from the specimenAbandonedJun 23, 08Nov 20, 08[G01N]
2007/0291,257 Optical inspection of a specimen using multi-channel responses from the specimenAbandonedAug 27, 07Dec 20, 07[G01N]
2007/0076,198 Optical inspection of a specimen using multi-channel responses from the specimenAbandonedNov 30, 06Apr 05, 07[G01N]
2006/0146,319 Optical inspection of a specimen using multi-channel responses from the specimenAbandonedMar 08, 06Jul 06, 06[G01N]
2005/0254,698 Alignment correction prior to image sampling in inspection systemsAbandonedJul 13, 05Nov 17, 05[H04N, G06K]
2005/0162,645 Optical inspection of a specimen using multi-channel responses from the specimenAbandonedMar 23, 05Jul 28, 05[G01N]
2004/0223,146 Optical inspection of a specimen using multi-channel responses from the specimenAbandonedJun 17, 04Nov 11, 04[G01N]
2004/0017,562 Optical inspection of a specimen using multi-channel responses from the specimenAbandonedJul 28, 03Jan 29, 04[G01N]
2003/0063,190 Alignment correction prior to image sampling in inspection systemsAbandonedDec 09, 02Apr 03, 03[G06K]
2002/0075,385 Alignment correction prior to image sampling in inspection systemsAbandonedJan 31, 02Jun 20, 02[H04N]
5131755 Automatic high speed optical inspection systemExpiredOct 31, 89Jul 21, 92[G01B]
5112129 Method of image enhancement for the coherence probe microscope with applications to integrated circuit metrologyExpiredMar 02, 90May 12, 92[G01B]
5085517 Automatic high speed optical inspection systemExpiredOct 31, 89Feb 04, 92[G01B]
5031976 Catadioptric imaging systemExpiredSep 24, 90Jul 16, 91[G02B]
5030008 Method and apparatus for the automated analysis of three-dimensional objectsExpiredOct 11, 88Jul 09, 91[G01B]
5014627 Stable instrument bench with replicated precision surfaceExpiredNov 06, 89May 14, 91[A47B]
4926489 Reticle inspection systemExpiredOct 05, 87May 15, 90[G06K]
4889676 Method of molding a precision surface on an instrument tableExpiredFeb 19, 88Dec 26, 89[B29C]
4877326 Method and apparatus for optical inspection of substratesExpiredFeb 19, 88Oct 31, 89[G01B]

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