KLA-TENCOR CORPORATION

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Technologies

Intl Class Technology # of Patents Rank
 
 
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 15530
 
 
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS8619
 
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 52248
 
 
 
G06K RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS 4992
 
 
 
G01J MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 4020
 
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 3494
 
 
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 29131
 
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 2785
 
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 26231
 
 
 
G21K TECHNIQUES FOR HANDLING PARTICLES OR ELECTROMAGNETIC RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA- OR X-RAY MICROSCOPES 1024

Top Patents (by citation)

Patent # Title Filing Date Issue Date Intl Class Cited #
5,864,394 Surface inspection systemSep 29, 95Jan 26, 99[G01N]153
6,633,831 Methods and systems for determining a critical dimension and a thin film characteristic of a specimenSep 20, 01Oct 14, 03[G01B]148
6,248,988 Conventional and confocal multi-spot scanning optical microscopeMay 05, 98Jun 19, 01[G02B]132
5,798,829 Single laser bright field and dark field system for detecting anomalies of a sampleMar 05, 96Aug 25, 98[G01N]132
5,747,813 Broadband microspectro-reflectometerApr 14, 94May 05, 98[G01N]129
6,771,806 Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devicesAug 25, 00Aug 03, 04[G06K]125
6,673,638 Method and apparatus for the production of process sensitive lithographic featuresJan 28, 02Jan 06, 04[H01L]123
5,910,842 Focused beam spectroscopic ellipsometry method and systemNov 27, 96Jun 08, 99[G01N]116
5,852,232 Acoustic sensor as proximity detectorJan 02, 97Dec 22, 98[G01B]116
5,917,588 Automated specimen inspection system for and method of distinguishing features or anomalies under either bright field or dark field illuminationNov 04, 96Jun 29, 99[G01N]115

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2013/0105,108 Heat Removal From Substrates In VacuumOct 26, 12May 02, 13[F25B, G05D]
2013/0106,275 PLASMA CELL FOR LASER-SUSTAINED PLASMA LIGHT SOURCEOct 09, 12May 02, 13[H01J]
2013/0107,259 OVERLAY TARGET GEOMETRY FOR MEASURING MULTIPLE PITCHESApr 13, 12May 02, 13[G01B, H01L]
2013/0110,477 PROCESS VARIATION-BASED MODEL OPTIMIZATION FOR METROLOGYOct 31, 11May 02, 13[G06F]
2013/0111,417 Database-Driven Cell-to-Cell Reticle InspectionApr 23, 12May 02, 13[G06F]
2013/0100,275 APPARATUS AND METHOD TO ESTIMATE THE POTENTIAL EFFICIENCY OF A POLYCRYSTALLINE SOLAR CELLJul 25, 12Apr 25, 13[G06T]
2013/0094,023 Back Quartersphere Scattered Light AnalysisDec 10, 12Apr 18, 13[G01N]
2013/0096,873 Acquisition of Information for a Construction SiteOct 15, 12Apr 18, 13[G01C, G01B, G06F]
2013/0088,245 Capacitive Inspection Of EUV PhotomasksOct 08, 12Apr 11, 13[G01R]
2013/0088,706 HYDROGEN PASSIVATION OF NONLINEAR OPTICAL CRYSTALSJun 05, 12Apr 11, 13[C23C, G01N]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8,436,554 LED solar illuminatorApr 07, 11May 07, 13[H05B, G05F]
8,430,234 Solar cell transportSep 25, 12Apr 30, 13[B65G]
8,432,944 Extending the lifetime of a deep UV laser in a wafer inspection toolJun 06, 11Apr 30, 13[H01S]
8,427,185 Inline inspection of photovoltaics for electrical defectsFeb 10, 11Apr 23, 13[G01R]
8,428,762 Spin coating modelingAug 12, 10Apr 23, 13[G06F]
8,421,030 Charged-particle energy analyzerJul 16, 10Apr 16, 13[G01K]
8,414,688 Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shippingJun 15, 11Apr 09, 13[B01D]
8,415,961 Measuring sheet resistance and other properties of a semiconductorDec 07, 10Apr 09, 13[G01R]
8,390,808 Enhanced OVL dummy field enabling “on-the-fly” OVL measurement methodsJul 13, 12Mar 05, 13[G01B]
8,392,136 In-place management of semiconductor equipment recipesJul 09, 10Mar 05, 13[G06F, G01N]

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Top Inventors for This Owner

Inventor Name Address # of Patent/Pub
Fielden John
Los Altos, CA
45
Levy Ady
Sunnyvale, CA
45
Nikoonahad Mehrdad
Menlo Park, CA
42
Opsal Jon
Livermore, CA
37
Chuang Yung-Ho
Cupertino, CA
31
Armstrong J Joseph
Milpitas, CA
28
Wack Dan
Los Altos, CA
27
Zhao Guoheng
Milpitas, CA
24
Brown Kyle A
Irvine, CA
23
Nicolaides Lena
Castro Valley, CA
23