KOKUSAI SEMICONDUCTOR EQUIPMENT CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 299
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 2360
 
  
 
C22F CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS OR NON-FERROUS ALLOYS 136
 
  
 
F23Q IGNITION 116

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
6783627 Reactor with remote plasma system and method of processing a semiconductor substrateJan 20, 00Aug 31, 04[H01L, C22F]
6530994 Platform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processingOct 18, 99Mar 11, 03[C23C, H01L]
6090212 Substrate platform for a semiconductor substrate during rapid high temperature processing and method of supporting a substrateAug 15, 97Jul 18, 00[C23C]
6007635 Platform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processingNov 26, 97Dec 28, 99[C23L]
5257926 Fast, safe, pyrogenic external torch assemblyDec 17, 91Nov 02, 93[F23Q]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6544339 Rectilinear wedge geometry for optimal process control in chemical vapor deposition and rapid thermal processingExpiredMar 22, 00Apr 08, 03[C23C]
RE37546 Reactor and method of processing a semiconductor substrateExpiredSep 28, 00Feb 12, 02[C23C]
6310323 Water cooled support for lamps and rapid thermal processing chamberExpiredMar 24, 00Oct 30, 01[F27B]
5951896 Rapid thermal processing heater technology and method of useExpiredDec 04, 96Sep 14, 99[F26B, A21B]
5948300 Process tube with in-situ gas preheatingExpiredSep 12, 97Sep 07, 99[C23C]
4854266 Cross-flow diffusion furnaceExpiredNov 02, 87Aug 08, 89[C23C, B05C]
4802441 Double wall fast cool-down furnaceExpiredJan 08, 87Feb 07, 89[C23C]
4753192 Movable core fast cool-down furnaceExpiredJan 08, 87Jun 28, 88[C23C]
4573431 Modular V-CVD diffusion furnaceExpiredJul 22, 85Mar 04, 86[C23C]

Top Inventors for This Owner

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