LAM RESEARCH AG

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 77285
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 4321
 
  
 
B05C APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 1134
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 794
 
  
 
F26B DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM 723
 
  
 
B05B SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES 658
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 630
 
  
 
B23B TURNING; BORING 448
 
  
 
B25J MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES 454
 
  
 
F27D DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE 421

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2018/0040,502 APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLESAug 05, 16Feb 08, 18[H01L]
2017/0345,681 METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLESMay 31, 16Nov 30, 17[H01L]
2017/0162,405 SPIN CHUCK WITH HEATED NOZZLE ASSEMBLYDec 04, 15Jun 08, 17[H01L]
2017/0162,426 SPIN CHUCK WITH GAS LEAKAGE PREVENTIONDec 04, 15Jun 08, 17[C23C, H01L]
2017/0148,652 SPIN CHUCK WITH IN SITU TEMPERATURE MONITORINGNov 20, 15May 25, 17[H01L]
2017/0125,266 APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLESOct 30, 15May 04, 17[H01L, B08B]
2016/0376,702 DUAL MODE CHAMBER FOR PROCESSING WAFER-SHAPED ARTICLESJun 26, 15Dec 29, 16[C23C]
2016/0114,359 LIQUID DISPENSER WITH IMPROVED DRIP PREVENTIONOct 28, 14Apr 28, 16[B08B]
2014/0227,884 PROCESS AND APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLESFeb 08, 13Aug 14, 14[H01L]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9911630 Apparatus for treating surfaces of wafer-shaped articlesOct 30, 15Mar 06, 18[H01L]
9887120 Apparatus for treating surfaces of wafer-shaped articlesNov 03, 15Feb 06, 18[B23B, H01L]
9887122 Method and apparatus for processing wafer-shaped articlesMay 06, 16Feb 06, 18[H01L, B05C, G03F]
9870933 Process and apparatus for treating surfaces of wafer-shaped articlesFeb 08, 13Jan 16, 18[H01L]
9799539 Method and apparatus for liquid treatment of wafer shaped articlesJun 16, 14Oct 24, 17[F16K, H01L]
9779979 Apparatus for liquid treatment of wafer shaped articlesFeb 24, 14Oct 03, 17[H01L]
9748120 Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatusJul 01, 13Aug 29, 17[H01L, F27B, F27D]
9698029 Method and apparatus for processing wafer-shaped articlesFeb 19, 14Jul 04, 17[H01L]
9685358 Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatusJan 05, 16Jun 20, 17[H01L, H05B, F27B, F27D]
9662686 Ultrasonic cleaning method and apparatusSep 24, 10May 30, 17[H01L, B08B]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2015/0202,555 METHOD AND APPARATUS FOR CONDITIONING PROCESS LIQUIDSAbandonedJan 17, 14Jul 23, 15[H01L, B08B, C23F, B01D]
2014/0283,994 APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLESAbandonedMar 22, 13Sep 25, 14[H01L]
2014/0053,982 METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLESAbandonedAug 23, 12Feb 27, 14[F17D, B44C]
2014/0041,803 METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLESAbandonedAug 08, 12Feb 13, 14[B44C]
2014/0026,926 METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLESAbandonedJul 30, 12Jan 30, 14[B08B]
2013/0319,472 METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLESAbandonedJun 04, 12Dec 05, 13[B08B]
2013/0309,048 APPARATUS AND METHOD FOR TRANSPORTING WAFER-SHAPED ARTICLESAbandonedMay 16, 12Nov 21, 13[H01L]
2013/0309,874 METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLESAbandonedMay 15, 12Nov 21, 13[H01L]
2013/0284,208 METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLESAbandonedApr 25, 12Oct 31, 13[B08B, E03B]
2013/0260,569 APPARATUS AND METHOD FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLESAbandonedMar 30, 12Oct 03, 13[H01L, B05C, B08B]
2013/0233,356 PROCESS AND APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLESAbandonedMar 12, 12Sep 12, 13[B08B]
2013/0101,372 METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLESAbandonedOct 19, 11Apr 25, 13[H01L]
2013/0098,391 METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLESAbandonedOct 20, 11Apr 25, 13[H01L, B08B, C23G]
2013/0008,602 APPARATUS FOR TREATING A WAFER-SHAPED ARTICLEAbandonedJul 07, 11Jan 10, 13[C23F]
2012/0305,036 DEVICE FOR TREATING SURFACES OF WAFER-SHAPED ARTICLESAbandonedJun 01, 11Dec 06, 12[B08B]
2012/0286,481 DEVICE AND PROCESS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLESAbandonedMay 13, 11Nov 15, 12[B23Q, B23B]
2012/0103,371 METHOD AND APPARATUS FOR DRYING A SEMICONDUCTOR WAFERAbandonedOct 28, 10May 03, 12[B08B]
2012/0100,721 METHOD FOR TREATING A SEMICONDUCTOR WAFERAbandonedJun 14, 10Apr 26, 12[H01L]
2011/0275,221 METHOD FOR TREATMENT SUBSTRATES AND TREATMENT COMPOSITION FOR SAID METHODAbandonedMay 07, 10Nov 10, 11[C09K, H01L, C23F]
2011/0130,009 METHOD AND APPARATUS FOR SURFACE TREATMENT USING A MIXTURE OF ACID AND OXIDIZING GASAbandonedNov 30, 09Jun 02, 11[H01L]

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