LAM RESEARCH CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 952 39
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 397 3
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 251 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 208 3
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 195 28
 
 
H05H PLASMA TECHNIQUE 104 3
 
 
B44C PRODUCING DECORATIVE EFFECTS 72 4
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 68 345
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 54 95
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 48 41
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2016/0138,160 REACTIVE ULTRAVIOLET THERMAL PROCESSING OF LOW DIELECTRIC CONSTANT MATERIALS Nov 18, 14 May 19, 16 [C23C]
2016/0138,166 SYSTEMS AND METHODS FOR FORMING SELECTIVE METAL ELECTRODE LAYERS FOR RESISTIVE SWITCHING MEMORIES Nov 19, 14 May 19, 16 [C23C]
2016/0141,153 DUAL PHASE CLEANING CHAMBERS AND ASSEMBLIES COMPRISING THE SAME Jan 21, 16 May 19, 16 [B08B, H01J]
2016/0141,184 DRY DEVELOPMENT AND IMAGE TRANSFER OF SI-CONTAINING SELF-ASSEMBLED BLOCK COPOLYMERS Nov 17, 14 May 19, 16 [H01J, H01L]
2016/0135,274 ADJUSTMENT OF VUV EMISSION OF A PLASMA VIA COLLISIONAL RESONANT ENERGY TRANSFER TO AN ENERGY ABSORBER GAS Nov 12, 14 May 12, 16 [H05G, H01L]
2016/0117,425 System, Method and Apparatus for Refining RF Transmission System Models Nov 10, 14 Apr 28, 16 [G06F]
2016/0118,227 System, Method and Apparatus for RF Power Compensation in a Plasma Processing System Oct 23, 14 Apr 28, 16 [C23C, H01J]
2016/0118,280 BUFFER STATION FOR THERMAL CONTROL OF SEMICONDUCTOR SUBSTRATES TRANSFERRED THERETHROUGH AND METHOD OF TRANSFERRING SEMICONDUCTOR SUBSTRATES Oct 23, 14 Apr 28, 16 [H01L]
2016/0118,282 BUFFER STATION WITH SINGLE EXIT-FLOW DIRECTION Oct 24, 14 Apr 28, 16 [H01L]
2016/0118,296 Interlevel Conductor Pre-Fill Utilizing Selective Barrier Deposition Oct 02, 15 Apr 28, 16 [H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9,334,566 Multi-tray ballast vapor draw systems Nov 25, 13 May 10, 16 [C23C, B01F]
9,335,248 Systems and methods for quantifying particle performance in a substrate processing system Mar 05, 15 May 10, 16 [G01N]
9,335,768 Cluster mass flow devices and multi-line mass flow devices incorporating the same Sep 12, 13 May 10, 16 [F16K, G05D]
9,336,901 Track and hold feedback control of pulsed RF Mar 17, 14 May 10, 16 [G11C]
9,336,996 Plasma processing systems including side coils and methods related to the plasma processing systems Feb 24, 11 May 10, 16 [C23C, H05H, H01J, H01L]
9,337,000 Control of impedance of RF return path Oct 01, 13 May 10, 16 [H01J]
9,337,002 Corrosion resistant aluminum coating on plasma chamber components Mar 12, 13 May 10, 16 [C23C, H01J, B32B, C22C]
9,337,004 Grounded confinement ring having large surface area Sep 30, 09 May 10, 16 [C23F, C23C, H01J, H01L]
9,337,068 Oxygen-containing ceramic hard masks and associated wet-cleans Dec 12, 13 May 10, 16 [C23C, H01L]
9,328,416 Method for the reduction of defectivity in vapor deposited films Jan 17, 14 May 03, 16 [C23C]
9,330,926 Fabrication of a silicon structure and deep silicon etch with profile control Dec 18, 08 May 03, 16 [B44C, C23F, H01J, C03C, H01L]
9,330,927 System, method and apparatus for generating pressure pulses in small volume confined process reactor Aug 28, 13 May 03, 16 [H01J, H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2015/0155,176 SIDEWALL HEIGHT NONUNIFORMITY REDUCTION FOR SIDEWALL IMAGE TRANSFER PROCESSES ABAN Dec 03, 13 Jun 04, 15 [H01L]
2015/0079,786 METHOD AND SOLUTION FOR CLEANING METAL RESIDUE ABAN Sep 17, 13 Mar 19, 15 [C09K, H01L]
2015/0037,979 CONFORMAL SIDEWALL PASSIVATION ABAN Aug 02, 13 Feb 05, 15 [H01L]
2014/0332,037 Controls of Ambient Environment During Wafer Drying Using Proximity Head ABAN May 28, 14 Nov 13, 14 [H01L]
2014/0261,535 Standing Wave Generation in Holes to Enhance Cleaning in the Holes in Liquid Sonification Cleaning Systems ABAN Mar 13, 13 Sep 18, 14 [B08B]
2014/0263,179 TUNING SYSTEM AND METHOD FOR PLASMA-BASED SUBSTRATE PROCESSING SYSTEMS ABAN Mar 15, 13 Sep 18, 14 [H01J, H01P]
2014/0179,097 DEPOSITION APPARATUS AND METHOD ABAN Dec 21, 12 Jun 26, 14 [H01L]
2014/0170,780 Method of Low-K Dielectric Film Repair ABAN Feb 24, 14 Jun 19, 14 [H01L]
2014/0127,911 PALLADIUM PLATED ALUMINUM COMPONENT OF A PLASMA PROCESSING CHAMBER AND METHOD OF MANUFACTURE THEREOF ABAN Nov 07, 12 May 08, 14 [H01L, C25D]
2014/0113,453 TUNGSTEN CARBIDE COATED METAL COMPONENT OF A PLASMA REACTOR CHAMBER AND METHOD OF COATING ABAN Oct 24, 12 Apr 24, 14 [C23C, B32B, H01L]
2014/0083,463 SYSTEM AND METHOD FOR MONITORING WAFER STRESS ABAN Sep 21, 12 Mar 27, 14 [B08B]
2014/0076,713 Edge Ramping ABAN Oct 24, 12 Mar 20, 14 [H05H]
2014/0059,789 Apparatus for Cleaning a Semiconductor Substrate ABAN Oct 16, 13 Mar 06, 14 [H01L]
2014/0051,255 COPPER DISCOLORATION PREVENTION FOLLOWING BEVEL ETCH PROCESS ABAN Oct 28, 13 Feb 20, 14 [H01L]
2014/0041,581 Single Substrate Processing Head For Particle Removal Using Low Viscosity Fluid ABAN Oct 11, 13 Feb 13, 14 [H01L]
2014/0034,096 Acoustic Assisted Single Wafer Wet Clean For Semiconductor Wafer Process ABAN Oct 09, 13 Feb 06, 14 [H01L]
2014/0030,893 METHOD FOR SHRINK AND TUNE TRENCH/VIA CD ABAN Jul 24, 12 Jan 30, 14 [H01L]
2013/0312,913 ARRANGEMENT FOR DEPOSITING BEVEL PROTECTIVE FILM ABAN Aug 05, 13 Nov 28, 13 [H01L]
2013/0267,097 METHOD AND APPARATUS FOR FORMING FEATURES WITH PLASMA PRE-ETCH TREATMENT ON PHOTORESIST ABAN Apr 05, 12 Oct 10, 13 [C23F, H01L]
2013/0264,309 ACOUSTIC ENERGY UTILIZATION IN PLASMA PROCESSING ABAN Apr 05, 12 Oct 10, 13 [B44C, H05H]

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