LAM RESEARCH CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 821 45
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 296 3
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 261 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 213 3
 
 
H05H PLASMA TECHNIQUE 114 3
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 82 49
 
 
B44C PRODUCING DECORATIVE EFFECTS 73 3
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 66 321
 
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 48 43
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 48 34
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2015/0053,565 BOTTOM-UP FILL IN DAMASCENE FEATURES Aug 26, 13 Feb 26, 15 [C25D]
2015/0056,108 EXHAUST FLOW SPREADING BAFFLE-RISER TO OPTIMIZE REMOTE PLASMA WINDOW CLEAN Aug 23, 13 Feb 26, 15 [H01L]
2015/0047,785 Plasma Processing Devices Having Multi-Port Valve Assemblies Aug 13, 13 Feb 19, 15 [H01J]
2015/0048,740 SUB-PULSING DURING A STATE Aug 22, 14 Feb 19, 15 [H01J, H03L]
2015/0050,808 ADHESION LAYER FOR THROUGH SILICON VIA METALLIZATION Aug 13, 13 Feb 19, 15 [H01L]
2015/0040,941 Method and Apparatus for Cleaning A Semiconductor Substrate Aug 07, 13 Feb 12, 15 [H01L]
2015/0040,947 Method and Systems for Cleaning A Substrate Aug 07, 13 Feb 12, 15 [H01L]
2015/0041,062 PLASMA PROCESSING CHAMBER WITH REMOVABLE BODY Aug 12, 13 Feb 12, 15 [H01J]
2015/0041,327 APPARATUSES AND METHODS FOR MAINTAINING PH IN NICKEL ELECTROPLATING BATHS Aug 06, 13 Feb 12, 15 [H01L, C25D]
2015/0044,873 SILICON CONTAINING CONFINEMENT RING FOR PLASMA PROCESSING APPARATUS AND METHOD OF FORMING THEREOF Aug 07, 13 Feb 12, 15 [B29C, H01J, H01L]
2015/0033,980 METHODS AND MATERIALS FOR ANCHORING GAPFILL METALS Oct 16, 14 Feb 05, 15 [C23C]
2015/0037,972 METHODS AND APPARATUSES FOR ATOMIC LAYER CLEANING OF CONTACTS AND VIAS Jul 29, 14 Feb 05, 15 [C23F, H01L]
2015/0037,973 METHOD FOR CAPPING COPPER INTERCONNECT LINES Jul 30, 13 Feb 05, 15 [H01L]
2015/0037,979 CONFORMAL SIDEWALL PASSIVATION Aug 02, 13 Feb 05, 15 [H01L]
2015/0037,981 FAST-GAS SWITCHING FOR ETCHING Aug 02, 13 Feb 05, 15 [H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8,961,701 Method and system of drying a microelectronic topography Sep 18, 09 Feb 24, 15 [B08B, H01L]
8,963,052 Method for controlling spatial temperature distribution across a semiconductor wafer May 06, 09 Feb 24, 15 [C23C, H05B, H01L]
8,956,461 Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts Dec 16, 10 Feb 17, 15 [B08B, H01J]
8,954,287 Systems and methods for calibrating end effector alignment using at least a light source Dec 19, 08 Feb 10, 15 [G01B, G06F, H01L]
8,945,317 System and method for cleaning gas injectors Oct 12, 12 Feb 03, 15 [B08B]
8,946,087 Electroless copper deposition Feb 02, 12 Feb 03, 15 [H01L]
8,946,091 Prevention of line bending and tilting for etch with tri-layer mask Apr 28, 11 Feb 03, 15 [H01L]
8,940,098 Method for distributing gas for a bevel etcher Jul 02, 13 Jan 27, 15 [B08B, H01J, H01L]
8,940,646 Sequential precursor dosing in an ALD multi-station/batch reactor Dec 18, 13 Jan 27, 15 [C23C, H01L]
8,935,990 Low contamination components for semiconductor processing apparatus and methods for making components Jan 07, 09 Jan 20, 15 [C23C, H01J, H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Filing Date Issue/Pub Date Intl Class
2014/0059,789 Apparatus for Cleaning a Semiconductor Substrate Oct 16, 13 Mar 06, 14 [H01L]
2012/0263,869 Methods for Forming a Barrier Layer with Periodic Concentrations of Elements and Structures Resulting Therefrom Jun 26, 12 Oct 18, 12 [B05D]
2012/0145,202 Cleaning Compound and Method and System for Using the Cleaning Compound Feb 14, 12 Jun 14, 12 [B08B]
2012/0118,320 Methods for Isolated Bevel Edge Clean Jan 24, 12 May 17, 12 [B08B]
2012/0115,332 Method of Post Etch Polymer Residue Removal Jan 19, 12 May 10, 12 [H01L]
2012/0101,917 BUSINESS MOBILE COMMUNICATION SYSTEM Oct 03, 11 Apr 26, 12 [G06Q]
2012/0024,314 PLASMA MEDIATED ASHING PROCESSES Jul 27, 10 Feb 02, 12 [B08B]
2011/0306,203 INTERCONNECT STRUCTURE AND METHOD OF MANUFACTURING A DAMASCENE STRUCTURE Aug 25, 11 Dec 15, 11 [H01L]
2011/0271,905 Methods and System for Processing a Microelectronic Topography Jul 19, 11 Nov 10, 11 [B05C]
2011/0226,280 PLASMA MEDIATED ASHING PROCESSES May 27, 11 Sep 22, 11 [C23F, B08B]
2011/0136,346 Substantially Non-Oxidizing Plasma Treatment Devices and Processes Dec 04, 09 Jun 09, 11 [B08B, G03F, H01L]
2011/0061,687 Apparatus for Contained Chemical Surface Treatment Nov 18, 10 Mar 17, 11 [B08B]
2011/0060,442 METHODS AND ARRANGEMENT FOR DETECTING A WAFER-RELEASED EVENT WITHIN A PLASMA PROCESSING CHAMBER Sep 10, 09 Mar 10, 11 [G06F]
2011/0039,410 Apparatus and Method for Substrate Electroless Plating Oct 25, 10 Feb 17, 11 [H01L]
2011/0036,500 WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE SUBSTRATES Oct 22, 10 Feb 17, 11 [H01Q, H01L]
2011/0014,489 Method for Strengthening Adhesion Between Dielectric Layers Formed Adjacent to Metal Layers Sep 24, 10 Jan 20, 11 [B05C, B05D, B32B]
2010/0258,142 APPARATUS AND METHOD FOR USING A VISCOELASTIC CLEANING MATERIAL TO REMOVE PARTICLES ON A SUBSTRATE Apr 14, 09 Oct 14, 10 [B08B, C25F]
2010/0184,301 Methods for Preventing Precipitation of Etch Byproducts During an Etch Process and/or Subsequent Rinse Process Jan 20, 09 Jul 22, 10 [H01L]
2010/0130,017 FRONT END OF LINE PLASMA MEDIATED ASHING PROCESSES AND APPARATUS Nov 21, 08 May 27, 10 [H01L]
2010/0100,221 Expert knowledge methods and systems for data analysis Dec 15, 09 Apr 22, 10 [G05B, G06F]

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