LAM RESEARCH CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 826 46
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 293 3
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 259 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 214 3
 
 
H05H PLASMA TECHNIQUE 110 3
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 92 45
 
 
B44C PRODUCING DECORATIVE EFFECTS 74 3
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 66 321
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 48 31
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 47 95
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2015/0099,365 TUNABLE UPPER PLASMA-EXCLUSION-ZONE RING FOR A BEVEL ETCHER Oct 04, 13 Apr 09, 15 [H01J, H01L]
2015/0091,440 Control of Impedance of RF Return Path Oct 01, 13 Apr 02, 15 [H01J]
2015/0091,441 Control of Impedance of RF Delivery Path Oct 01, 13 Apr 02, 15 [H01J]
2015/0093,908 HIGH SELECTIVITY AND LOW STRESS CARBON HARDMASK BY PULSED LOW FREQUENCY RF POWER Apr 08, 14 Apr 02, 15 [H01L]
2015/0093,915 SULFUR DOPED CARBON HARD MASKS May 05, 14 Apr 02, 15 [H01L]
2015/0083,582 ION TO NEUTRAL CONTROL FOR WAFER PROCESSING WITH DUAL PLASMA SOURCE REACTOR Sep 20, 13 Mar 26, 15 [H01L]
2015/0087,154 HIGH ASPECT RATIO ETCH WITH COMBINATION MASK Sep 26, 13 Mar 26, 15 [H01L]
2015/0076,112 Method and Apparatus for Controlling Substrate DC-Bias and Ion Energy and Angular Distribution During Substrate Etching Sep 19, 13 Mar 19, 15 [H01J]
2015/0079,786 METHOD AND SOLUTION FOR CLEANING METAL RESIDUE Sep 17, 13 Mar 19, 15 [C09K, H01L]
2015/0068,613 Clutter Mass Flow Devices and Multi-Line Mass Flow Devices Incorporating The Same Sep 12, 13 Mar 12, 15 [G05D]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9,004,086 Methods and apparatus for displacing fluids from substrates using supercritical CO2 Nov 04, 10 Apr 14, 15 [B08B, H01L]
9,006,893 Devices for metallization Aug 22, 13 Apr 14, 15 [H01L]
8,997,684 Prevention of particle adders when contacting a liquid meniscus over a substrate Sep 30, 11 Apr 07, 15 [B05C, B05D, H01L]
8,999,104 Systems, methods and apparatus for separate plasma source control Aug 06, 10 Apr 07, 15 [C23F, H01J]
8,999,184 Method for providing vias Aug 03, 12 Apr 07, 15 [B44C, H01J, H01L]
8,991,331 Integrated steerability array arrangement for minimizing non-uniformity and methods thereof Aug 16, 13 Mar 31, 15 [C23F, C23C, H01J, H05H, H01L]
8,992,722 Direct drive arrangement to control confinement rings positioning and methods thereof Sep 01, 09 Mar 31, 15 [C23F, C23C, H01J]
8,986,492 Spacer formation for array double patterning Feb 09, 12 Mar 24, 15 [C23F, H01L]
8,989,888 Automatic fault detection and classification in a plasma processing system and methods thereof Jun 29, 10 Mar 24, 15 [G01R, H01J, G06F, H01L]
8,980,046 Semiconductor processing system with source for decoupled ion and radical control Mar 27, 12 Mar 17, 15 [C23F]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2014/0059,789 Apparatus for Cleaning a Semiconductor Substrate ABAN Oct 16, 13 Mar 06, 14 [H01L]
2013/0171,820 METHODS FOR THREE-DIMENSIONAL INTEGRATED CIRCUIT THROUGH HOLE VIA GAPFILL AND OVERBURDEN REMOVAL ABAN Nov 30, 12 Jul 04, 13 [H01L]
2012/0263,869 Methods for Forming a Barrier Layer with Periodic Concentrations of Elements and Structures Resulting Therefrom ABAN Jun 26, 12 Oct 18, 12 [B05D]
2012/0145,202 Cleaning Compound and Method and System for Using the Cleaning Compound ABAN Feb 14, 12 Jun 14, 12 [B08B]
2012/0118,320 Methods for Isolated Bevel Edge Clean ABAN Jan 24, 12 May 17, 12 [B08B]
2012/0115,332 Method of Post Etch Polymer Residue Removal ABAN Jan 19, 12 May 10, 12 [H01L]
2012/0101,917 BUSINESS MOBILE COMMUNICATION SYSTEM ABAN Oct 03, 11 Apr 26, 12 [G06Q]
2012/0024,314 PLASMA MEDIATED ASHING PROCESSES ABAN Jul 27, 10 Feb 02, 12 [B08B]
2011/0306,203 INTERCONNECT STRUCTURE AND METHOD OF MANUFACTURING A DAMASCENE STRUCTURE ABAN Aug 25, 11 Dec 15, 11 [H01L]
2011/0271,905 Methods and System for Processing a Microelectronic Topography ABAN Jul 19, 11 Nov 10, 11 [B05C]
2011/0226,280 PLASMA MEDIATED ASHING PROCESSES ABAN May 27, 11 Sep 22, 11 [C23F, B08B]
2011/0206,833 EXTENSION ELECTRODE OF PLASMA BEVEL ETCHING APPARATUS AND METHOD OF MANUFACTURE THEREOF ABAN Feb 11, 11 Aug 25, 11 [B08B, B05D, H01L]
2011/0136,346 Substantially Non-Oxidizing Plasma Treatment Devices and Processes ABAN Dec 04, 09 Jun 09, 11 [B08B, G03F, H01L]
2011/0100,553 MULTI-PERIPHERAL RING ARRANGEMENT FOR PERFORMING PLASMA CONFINEMENT ABAN Aug 31, 10 May 05, 11 [C23F, H01L]
2011/0061,687 Apparatus for Contained Chemical Surface Treatment ABAN Nov 18, 10 Mar 17, 11 [B08B]
2011/0060,442 METHODS AND ARRANGEMENT FOR DETECTING A WAFER-RELEASED EVENT WITHIN A PLASMA PROCESSING CHAMBER ABAN Sep 10, 09 Mar 10, 11 [G06F]
7,897,213 Methods for contained chemical surface treatment Expired Feb 08, 07 Mar 01, 11 [B05D]
7,897,507 Barrier layer configurations and methods for processing microelectronic topographies having barrier layers Expired Mar 08, 10 Mar 01, 11 [H01L]
7,892,357 Gas distribution plate assembly for plasma reactors Expired Jan 12, 04 Feb 22, 11 [C23C]
2011/0039,410 Apparatus and Method for Substrate Electroless Plating ABAN Oct 25, 10 Feb 17, 11 [H01L]

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