LAM RESEARCH CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1070 39
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 454 3
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 285 13
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 240 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 206 3
 
 
H05H PLASMA TECHNIQUE 102 3
 
 
B44C PRODUCING DECORATIVE EFFECTS 71 4
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 70 354
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 58 96
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 50 43
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0130,330 INTERFACE ENGINEERING DURING MGO DEPOSITION FOR MAGNETIC TUNNEL JUNCTIONS Nov 06, 15 May 11, 17 [C23C]
2017/0133,202 COMPUTER ADDRESSABLE PLASMA DENSITY MODIFICATION FOR ETCH AND DEPOSITION PROCESSES Nov 09, 15 May 11, 17 [C23C, H01J, H01L]
2017/0133,255 STACKED WAFER CASSETTE LOADING SYSTEM Nov 05, 15 May 11, 17 [H01L]
2017/0133,260 Lift Pin Assembly and Associated Methods Dec 21, 15 May 11, 17 [H01L]
2017/0133,283 SENSOR AND ADJUSTER FOR A CONSUMABLE Nov 06, 15 May 11, 17 [G05B, H01J, H01L]
2017/0121,819 Systems And Methods For Tilting A Wafer For Achieving Deposition Uniformity Nov 10, 15 May 04, 17 [C23C]
2017/0125,200 SYSTEMS AND METHODS FOR FILTERING RADIO FREQUENCIES FROM A SIGNAL OF A THERMOCOUPLE AND CONTROLLING A TEMPERATURE OF AN ELECTRODE IN A PLASMA CHAMBER Dec 10, 15 May 04, 17 [H05B, H05H, H01J]
2017/0125,216 Methods and Systems for Independent Control of Radical Density, Ion Density, and Ion Energy in Pulsed Plasma Semiconductor Device Fabrication Nov 04, 15 May 04, 17 [H01J, H01L]
2017/0125,218 SYSTEMS AND METHODS FOR CALIBRATING CONVERSION MODELS AND PERFORMING POSITION CONVERSIONS OF VARIABLE CAPACITORS IN MATCH NETWORKS OF PLASMA PROCESSING SYSTEMS Oct 27, 16 May 04, 17 [H01J]
2017/0125,253 Methods and Systems for Plasma Etching Using Bi-Modal Process Gas Composition Responsive to Plasma Power Level Nov 04, 15 May 04, 17 [H01L]
2017/0125,260 Methods and Systems for Advanced Ion Control for Etching Processes Nov 04, 15 May 04, 17 [H01J, H01L]
2017/0125,272 WAFER TRANSFER MICROCLIMATE TECHNIQUES AND APPARATUSES, INCLUDING HORIZONTAL SLOT IMPLEMENTATIONS AND/OR TRAVELLING SHOWERHEADS Oct 05, 16 May 04, 17 [H01L]
2017/0113,355 Automated Replacement of Consumable Parts Using End Effectors Interfacing with Plasma Processing System Feb 19, 16 Apr 27, 17 [B25J]
2017/0115,657 Systems for Removing and Replacing Consumable Parts from a Semiconductor Process Module in Situ Oct 22, 15 Apr 27, 17 [G05B]
2017/0117,155 METHOD OF FORMING LOW RESISTIVITY FLUORINE FREE TUNGSTEN FILM WITHOUT NUCLEATION Jan 04, 17 Apr 27, 17 [C23C, H01L]
2017/0117,170 Front Opening Ring Pod Apr 25, 16 Apr 27, 17 [H01L]
2017/0117,172 Automated Replacement of Consumable Parts Using Interfacing Chambers Feb 19, 16 Apr 27, 17 [H01L]
2017/0117,869 Multiple-Output Radiofrequency Matching Module and Associated Methods Oct 26, 15 Apr 27, 17 [H03H, H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9652567 System, method and apparatus for improving accuracy of RF transmission models for selected portions of an RF transmission path Oct 20, 14 May 16, 17 [G05B, H01J, H05H, G06F]
9644271 Systems and methods for using electrical asymmetry effect to control plasma process space in semiconductor fabrication May 13, 16 May 09, 17 [C23C, H01L]
9646844 Method for forming stair-step structures Feb 26, 16 May 09, 17 [H01L]
9646861 Heating plate with heating zones for substrate processing and method of use thereof Oct 17, 13 May 09, 17 [C23C, H05B, H01J, H01L]
9637821 Method for supplying vaporized precursor Dec 04, 13 May 02, 17 [C23C]
9640371 System and method for detecting a process point in multi-mode pulse processes Oct 24, 14 May 02, 17 [H01J, H01L]
9640408 Fast-gas switching for etching Feb 19, 16 May 02, 17 [H01J, H01L]
9640409 Self-limited planarization of hardmask Feb 02, 16 May 02, 17 [H01L]
9631276 Systems and methods enabling low defect processing via controlled separation and delivery of chemicals during atomic layer deposition Jul 22, 15 Apr 25, 17 [C23C, H01J]
9633846 Internal plasma grid applications for semiconductor fabrication Nov 30, 15 Apr 25, 17 [H01J, H01L]
9633867 Method and apparatus for anisotropic tungsten etching Jan 05, 15 Apr 25, 17 [H01J, H01L]
9633896 Methods for formation of low-k aluminum-containing etch stop films Nov 23, 15 Apr 25, 17 [H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0329,206 METHODS OF MODULATING RESIDUAL STRESS IN THIN FILMS ABAN May 08, 15 Nov 10, 16 [H01L]
2016/0270,237 Copper Interconnect Device Including Surface Functionalized Graphene Capping Layer and Fabrication Method Thereof ABAN Mar 07, 16 Sep 15, 16 [H05K]
2016/0148,813 GAS INJECTION METHOD FOR UNIFORMLY PROCESSING A SEMICONDUCTOR SUBSTRATE IN A SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS ABAN Nov 25, 14 May 26, 16 [H01L]
2016/0138,160 REACTIVE ULTRAVIOLET THERMAL PROCESSING OF LOW DIELECTRIC CONSTANT MATERIALS ABAN Nov 18, 14 May 19, 16 [C23C]
2016/0079,100 VACUUM CARRIER INTERFACE HAVING A SWITCHABLE REDUCED CAPACITY AIRLOCK CHAMBER ABAN Sep 17, 14 Mar 17, 16 [C23C, H01L, B25J]
2016/0042,945 COVERAGE OF HIGH ASPECT RATIO FEATURES USING SPIN-ON DIELECTRIC THROUGH A WETTED SURFACE WITHOUT A PRIOR DRYING STEP ABAN Aug 11, 14 Feb 11, 16 [H01L]
2015/0376,792 ATMOSPHERIC PLASMA APPARATUS FOR SEMICONDUCTOR PROCESSING ABAN Jun 30, 14 Dec 31, 15 [C23C, H01L, C25D]
2015/0380,296 CLEANING OF CARBON-BASED CONTAMINANTS IN METAL INTERCONNECTS FOR INTERCONNECT CAPPING APPLICATIONS ABAN Jun 25, 14 Dec 31, 15 [C23C, H01L]
2015/0299,882 NICKEL ELECTROPLATING SYSTEMS HAVING A GRAIN REFINER RELEASING DEVICE ABAN Apr 18, 14 Oct 22, 15 [H01L, C25D]
2015/0299,886 METHOD AND APPARATUS FOR PREPARING A SUBSTRATE WITH A SEMI-NOBLE METAL LAYER ABAN Apr 18, 14 Oct 22, 15 [H01L, C25D]
2015/0247,238 RF CYCLE PURGING TO REDUCE SURFACE ROUGHNESS IN METAL OXIDE AND METAL NITRIDE FILMS ABAN Mar 03, 14 Sep 03, 15 [C23C, H01L]
2015/0225,679 PROCESSES AND SOLUTIONS FOR SUBSTRATE CLEANING AND ELECTROLESS DEPOSITION ABAN Apr 17, 15 Aug 13, 15 [C23C, C11D, H01L]
2015/0155,176 SIDEWALL HEIGHT NONUNIFORMITY REDUCTION FOR SIDEWALL IMAGE TRANSFER PROCESSES ABAN Dec 03, 13 Jun 04, 15 [H01L]
2015/0136,171 LIQUID OR VAPOR INJECTION PLASMA ASHING SYSTEMS AND METHODS ABAN Nov 18, 13 May 21, 15 [H01J, H01L]
2015/0079,786 METHOD AND SOLUTION FOR CLEANING METAL RESIDUE ABAN Sep 17, 13 Mar 19, 15 [C09K, H01L]
2015/0040,941 Method and Apparatus for Cleaning A Semiconductor Substrate ABAN Aug 07, 13 Feb 12, 15 [H01L]
2015/0040,947 Method and Systems for Cleaning A Substrate ABAN Aug 07, 13 Feb 12, 15 [H01L]
2015/0037,979 CONFORMAL SIDEWALL PASSIVATION ABAN Aug 02, 13 Feb 05, 15 [H01L]
2015/0004,798 CHEMICAL DEPOSITION CHAMBER HAVING GAS SEAL ABAN Jun 28, 13 Jan 01, 15 [H01L]
2014/0367,042 SYSTEMS FOR AUTOMATICALLY CHARACTERIZING A PLASMA ABAN Aug 19, 14 Dec 18, 14 [H01J, H01L]

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