LAM RESEARCH CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1080 38
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 459 3
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 292 14
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 238 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 204 3
 
 
H05H PLASMA TECHNIQUE 101 3
 
 
B44C PRODUCING DECORATIVE EFFECTS 72 4
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 70 366
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 58 102
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 50 44
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0159,164 SURFACE COATING TREATMENT Dec 07, 15 Jun 08, 17 [C23C]
2017/0162,423 DESIGN FOR STORING AND ORGANIZING MINIMUM CONTACT AREA FEATURES AND WAFER TRANSFER PINS DURING SYSTEM MAINTENANCE Jul 20, 16 Jun 08, 17 [H01L, B65D]
2017/0154,804 CONTROL OF THE INCIDENCE ANGLE OF AN ION BEAM ON A SUBSTRATE Dec 01, 15 Jun 01, 17 [H01L]
2017/0146,909 EUV PHOTOPATTERNING OF VAPOR-DEPOSITED METAL OXIDE-CONTAINING HARDMASKS Nov 20, 15 May 25, 17 [G03F]
2017/0148,657 MATCHED TCR JOULE HEATER DESIGNS FOR ELECTROSTATIC CHUCKS Oct 13, 16 May 25, 17 [H01L]
2017/0137,943 APPARATUS FOR UV FLOWABLE DIELECTRIC Nov 16, 15 May 18, 17 [C23C, H01L]
2017/0140,901 PNEUMATIC EXHAUST SYSTEM Nov 13, 15 May 18, 17 [C23C, H01J]
2017/0140,931 LOW K DIELECTRIC DEPOSITION VIA UV DRIVEN PHOTOPOLYMERIZATION Nov 16, 15 May 18, 17 [H01L]
2017/0140,968 Systems and Methods for Controlling Plasma Instability in Semiconductor Fabrication Mar 18, 16 May 18, 17 [C23C, H01L]
2017/0141,000 Systems and Methods for Detection of Plasma Instability by Electrical Measurement Mar 18, 16 May 18, 17 [H01J, H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9670588 Anisotropic high resistance ionic current source (AHRICS) Apr 11, 14 Jun 06, 17 [C25D]
9673025 Electrostatic chuck including embedded faraday cage for RF delivery and associated methods for operation, monitoring, and control Jun 01, 16 Jun 06, 17 [H01J, H01L]
9673026 Edge ramping Jul 07, 16 Jun 06, 17 [H05B, H05H, H01J]
9673037 Substrate freeze dry apparatus and method Oct 13, 11 Jun 06, 17 [F26B, H01L]
9673041 Plasma assisted atomic layer deposition titanium oxide for patterning applications Jun 09, 16 Jun 06, 17 [C23C, H01J, H01L]
9673057 Method for forming stair-step structures Mar 23, 15 Jun 06, 17 [B44C, C03C, H01L]
9673058 Method for etching features in dielectric layers Mar 14, 16 Jun 06, 17 [H01L]
9673071 Buffer station for thermal control of semiconductor substrates transferred therethrough and method of transferring semiconductor substrates Oct 23, 14 Jun 06, 17 [B64D, H01L]
9666427 Method of collapse-free drying of high aspect ratio structures Jun 21, 13 May 30, 17 [F26B, H01L]
9667303 Dual push between a host computer system and an RF generator Dec 18, 15 May 30, 17 [H04L, H04B]
D788134 Mobile device display screen with graphical user interface for supporting service maintenance and tracking activities in semiconductor tool Oct 10, 14 May 30, 17 [1404]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0329,206 METHODS OF MODULATING RESIDUAL STRESS IN THIN FILMS ABAN May 08, 15 Nov 10, 16 [H01L]
2016/0270,237 Copper Interconnect Device Including Surface Functionalized Graphene Capping Layer and Fabrication Method Thereof ABAN Mar 07, 16 Sep 15, 16 [H05K]
2016/0148,813 GAS INJECTION METHOD FOR UNIFORMLY PROCESSING A SEMICONDUCTOR SUBSTRATE IN A SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS ABAN Nov 25, 14 May 26, 16 [H01L]
2016/0138,160 REACTIVE ULTRAVIOLET THERMAL PROCESSING OF LOW DIELECTRIC CONSTANT MATERIALS ABAN Nov 18, 14 May 19, 16 [C23C]
2016/0079,100 VACUUM CARRIER INTERFACE HAVING A SWITCHABLE REDUCED CAPACITY AIRLOCK CHAMBER ABAN Sep 17, 14 Mar 17, 16 [C23C, H01L, B25J]
2016/0042,945 COVERAGE OF HIGH ASPECT RATIO FEATURES USING SPIN-ON DIELECTRIC THROUGH A WETTED SURFACE WITHOUT A PRIOR DRYING STEP ABAN Aug 11, 14 Feb 11, 16 [H01L]
2015/0376,792 ATMOSPHERIC PLASMA APPARATUS FOR SEMICONDUCTOR PROCESSING ABAN Jun 30, 14 Dec 31, 15 [C23C, H01L, C25D]
2015/0380,296 CLEANING OF CARBON-BASED CONTAMINANTS IN METAL INTERCONNECTS FOR INTERCONNECT CAPPING APPLICATIONS ABAN Jun 25, 14 Dec 31, 15 [C23C, H01L]
2015/0307,994 ELECTROLESS DEPOSITION OF CONTINUOUS NICKEL LAYER USING COMPLEXED Ti3+ METAL IONS AS REDUCING AGENTS ABAN Apr 29, 14 Oct 29, 15 [C23C]
2015/0299,882 NICKEL ELECTROPLATING SYSTEMS HAVING A GRAIN REFINER RELEASING DEVICE ABAN Apr 18, 14 Oct 22, 15 [H01L, C25D]
2015/0299,886 METHOD AND APPARATUS FOR PREPARING A SUBSTRATE WITH A SEMI-NOBLE METAL LAYER ABAN Apr 18, 14 Oct 22, 15 [H01L, C25D]
2015/0247,238 RF CYCLE PURGING TO REDUCE SURFACE ROUGHNESS IN METAL OXIDE AND METAL NITRIDE FILMS ABAN Mar 03, 14 Sep 03, 15 [C23C, H01L]
2015/0225,679 PROCESSES AND SOLUTIONS FOR SUBSTRATE CLEANING AND ELECTROLESS DEPOSITION ABAN Apr 17, 15 Aug 13, 15 [C23C, C11D, H01L]
2015/0155,176 SIDEWALL HEIGHT NONUNIFORMITY REDUCTION FOR SIDEWALL IMAGE TRANSFER PROCESSES ABAN Dec 03, 13 Jun 04, 15 [H01L]
2015/0136,171 LIQUID OR VAPOR INJECTION PLASMA ASHING SYSTEMS AND METHODS ABAN Nov 18, 13 May 21, 15 [H01J, H01L]
2015/0079,786 METHOD AND SOLUTION FOR CLEANING METAL RESIDUE ABAN Sep 17, 13 Mar 19, 15 [C09K, H01L]
2015/0040,941 Method and Apparatus for Cleaning A Semiconductor Substrate ABAN Aug 07, 13 Feb 12, 15 [H01L]
2015/0040,947 Method and Systems for Cleaning A Substrate ABAN Aug 07, 13 Feb 12, 15 [H01L]
2015/0037,979 CONFORMAL SIDEWALL PASSIVATION ABAN Aug 02, 13 Feb 05, 15 [H01L]
2015/0004,798 CHEMICAL DEPOSITION CHAMBER HAVING GAS SEAL ABAN Jun 28, 13 Jan 01, 15 [H01L]

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