LAM RESEARCH CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1121 39
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 479 3
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 316 13
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 227 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 208 3
 
 
H05H PLASMA TECHNIQUE 101 3
 
 
B44C PRODUCING DECORATIVE EFFECTS 74 3
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 69 367
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 60 108
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 50 47
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0294,332 CHUCK FOR EDGE BEVEL REMOVAL AND METHOD FOR CENTERING A WAFER PRIOR TO EDGE BEVEL REMOVAL Apr 06, 16 Oct 12, 17 [B08B, H01L]
2017/0287,682 SYSTEMS AND METHODS FOR PERFORMING EDGE RING CHARACTERIZATION Jan 11, 17 Oct 05, 17 [H01J, H01L]
2017/0287,724 SELECTIVE SELF-ALIGNED PATTERNING OF SILICON GERMANIUM, GERMANIUM AND TYPE III/V MATERIALS USING A SULFUR-CONTAINING MASK Dec 13, 16 Oct 05, 17 [H01L]
2017/0287,753 SYSTEMS AND METHODS FOR ALIGNING MEASUREMENT DEVICE IN SUBSTRATE PROCESSING SYSTEMS Mar 01, 17 Oct 05, 17 [G01B, H01L]
2017/0275,756 ASYMMETRIC PEDESTAL/CARRIER RING ARRANGEMENT FOR EDGE IMPEDANCE MODULATION Mar 22, 16 Sep 28, 17 [C23C, H01L]
2017/0278,679 METHOD AND APPARATUS FOR CONTROLLING PROCESS WITHIN WAFER UNIFORMITY Mar 21, 17 Sep 28, 17 [H01J, H01L]
2017/0278,680 SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY SHIELD Mar 23, 17 Sep 28, 17 [H01J, H01L]
2017/0278,681 CARRIER RING WALL FOR REDUCTION OF BACK-DIFFUSION OF REACTIVE SPECIES AND SUPPRESSION OF LOCAL PARASITIC PLASMA IGNITION Mar 25, 16 Sep 28, 17 [C23C, H01J, H01L]
2017/0263,478 Detection System for Tunable/Replaceable Edge Coupling Ring May 31, 17 Sep 14, 17 [H01J, H01L]
2017/0253,974 COMPONENTS SUCH AS EDGE RINGS INCLUDING CHEMICAL VAPOR DEPOSITION (CVD) DIAMOND COATING WITH HIGH PURITY SP3 BONDS FOR PLASMA PROCESSING SYSTEMS Feb 09, 17 Sep 07, 17 [C23C, H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9786496 Method of densifying films in semiconductor device Oct 30, 15 Oct 10, 17 [C23C, H01L]
9777386 Chemistry additives and process for cobalt film electrodeposition Mar 19, 15 Oct 03, 17 [H01L, C25D]
9778083 Metrology method for transient gas flow May 16, 13 Oct 03, 17 [G01F]
9778561 Vacuum-integrated hardmask processes and apparatus Jan 30, 15 Oct 03, 17 [C23C, G03F, B05D, H01L]
9779196 Segmenting a model within a plasma system Apr 04, 14 Oct 03, 17 [G01R, G06F]
9779916 Radio frequency (RF) ground return arrangements Aug 31, 10 Oct 03, 17 [C23F, H01J]
9779955 Ion beam etching utilizing cryogenic wafer temperatures Feb 25, 16 Oct 03, 17 [H01L]
9779956 Hydrogen activated atomic layer etching Feb 06, 17 Oct 03, 17 [H01L]
9779974 System and method for reducing temperature transition in an electrostatic chuck Sep 21, 15 Oct 03, 17 [G01K, H01L, G05D]
9779977 End effector assembly for clean/dirty substrate handling Apr 15, 15 Oct 03, 17 [H01L]
9773643 Apparatus and method for deposition and etch in gap fill Jun 30, 16 Sep 26, 17 [C23C, H01J]
9773649 Dry development and image transfer of si-containing self-assembled block copolymers Nov 17, 14 Sep 26, 17 [H01J, H01L]
9775194 Multiplexed heater array using AC drive for semiconductor processing Mar 15, 16 Sep 26, 17 [H05B, H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0329,206 METHODS OF MODULATING RESIDUAL STRESS IN THIN FILMS ABAN May 08, 15 Nov 10, 16 [H01L]
2016/0270,237 Copper Interconnect Device Including Surface Functionalized Graphene Capping Layer and Fabrication Method Thereof ABAN Mar 07, 16 Sep 15, 16 [H05K]
2016/0148,813 GAS INJECTION METHOD FOR UNIFORMLY PROCESSING A SEMICONDUCTOR SUBSTRATE IN A SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS ABAN Nov 25, 14 May 26, 16 [H01L]
2016/0138,160 REACTIVE ULTRAVIOLET THERMAL PROCESSING OF LOW DIELECTRIC CONSTANT MATERIALS ABAN Nov 18, 14 May 19, 16 [C23C]
2016/0079,100 VACUUM CARRIER INTERFACE HAVING A SWITCHABLE REDUCED CAPACITY AIRLOCK CHAMBER ABAN Sep 17, 14 Mar 17, 16 [C23C, H01L, B25J]
2016/0042,945 COVERAGE OF HIGH ASPECT RATIO FEATURES USING SPIN-ON DIELECTRIC THROUGH A WETTED SURFACE WITHOUT A PRIOR DRYING STEP ABAN Aug 11, 14 Feb 11, 16 [H01L]
2015/0376,792 ATMOSPHERIC PLASMA APPARATUS FOR SEMICONDUCTOR PROCESSING ABAN Jun 30, 14 Dec 31, 15 [C23C, H01L, C25D]
2015/0380,278 HARDWARE FOR THE SEPARATION AND DEGASSING OF DISSOLVED GASES IN SEMICONDUCTOR PRECURSOR CHEMICALS ABAN Jun 30, 14 Dec 31, 15 [H01L, B01D]
2015/0380,296 CLEANING OF CARBON-BASED CONTAMINANTS IN METAL INTERCONNECTS FOR INTERCONNECT CAPPING APPLICATIONS ABAN Jun 25, 14 Dec 31, 15 [C23C, H01L]
2015/0307,994 ELECTROLESS DEPOSITION OF CONTINUOUS NICKEL LAYER USING COMPLEXED Ti3+ METAL IONS AS REDUCING AGENTS ABAN Apr 29, 14 Oct 29, 15 [C23C]
2015/0299,882 NICKEL ELECTROPLATING SYSTEMS HAVING A GRAIN REFINER RELEASING DEVICE ABAN Apr 18, 14 Oct 22, 15 [H01L, C25D]
2015/0299,886 METHOD AND APPARATUS FOR PREPARING A SUBSTRATE WITH A SEMI-NOBLE METAL LAYER ABAN Apr 18, 14 Oct 22, 15 [H01L, C25D]
2015/0247,238 RF CYCLE PURGING TO REDUCE SURFACE ROUGHNESS IN METAL OXIDE AND METAL NITRIDE FILMS ABAN Mar 03, 14 Sep 03, 15 [C23C, H01L]
2015/0235,889 SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK ABAN May 05, 15 Aug 20, 15 [H01L]
2015/0225,679 PROCESSES AND SOLUTIONS FOR SUBSTRATE CLEANING AND ELECTROLESS DEPOSITION ABAN Apr 17, 15 Aug 13, 15 [C23C, C11D, H01L]
2015/0155,176 SIDEWALL HEIGHT NONUNIFORMITY REDUCTION FOR SIDEWALL IMAGE TRANSFER PROCESSES ABAN Dec 03, 13 Jun 04, 15 [H01L]
2015/0136,171 LIQUID OR VAPOR INJECTION PLASMA ASHING SYSTEMS AND METHODS ABAN Nov 18, 13 May 21, 15 [H01J, H01L]
2015/0079,786 METHOD AND SOLUTION FOR CLEANING METAL RESIDUE ABAN Sep 17, 13 Mar 19, 15 [C09K, H01L]
2015/0040,941 Method and Apparatus for Cleaning A Semiconductor Substrate ABAN Aug 07, 13 Feb 12, 15 [H01L]
2015/0040,947 Method and Systems for Cleaning A Substrate ABAN Aug 07, 13 Feb 12, 15 [H01L]

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