LAM RESEARCH CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 823 44
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 297 3
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 261 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 213 3
 
 
H05H PLASMA TECHNIQUE 112 3
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 87 48
 
 
B44C PRODUCING DECORATIVE EFFECTS 73 3
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 67 324
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 48 35
 
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 47 44
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2015/0076,112 Method and Apparatus for Controlling Substrate DC-Bias and Ion Energy and Angular Distribution During Substrate Etching Sep 19, 13 Mar 19, 15 [H01J]
2015/0079,786 METHOD AND SOLUTION FOR CLEANING METAL RESIDUE Sep 17, 13 Mar 19, 15 [C09K, H01L]
2015/0068,613 Clutter Mass Flow Devices and Multi-Line Mass Flow Devices Incorporating The Same Sep 12, 13 Mar 12, 15 [G05D]
2015/0069,912 RF Impedance Model Based Fault Detection Nov 13, 14 Mar 12, 15 [H01J]
2015/0072,538 METHOD AND APPARATUS FOR REMOTE PLASMA TREATMENT FOR REDUCING METAL OXIDES ON A METAL SEED LAYER Sep 06, 13 Mar 12, 15 [H01L]
2015/0059,648 HIGH-CONDUCTANCE, NON-SEALING THROTTLE VALVE WITH PROJECTIONS AND STOP SURFACES Sep 03, 13 Mar 05, 15 [C23C]
2015/0060,404 System, Method and Apparatus for Coordinating Pressure Pulses and RF Modulation in a Small Volume Confined Process Reactor Sep 03, 13 Mar 05, 15 [H01J, H01L]
2015/0064,920 System, Method and Apparatus for Generating Pressure Pulses in Small Volume Confined Process Reactor Aug 28, 13 Mar 05, 15 [H01J, H01L]
2015/0053,565 BOTTOM-UP FILL IN DAMASCENE FEATURES Aug 26, 13 Feb 26, 15 [C25D]
2015/0056,108 EXHAUST FLOW SPREADING BAFFLE-RISER TO OPTIMIZE REMOTE PLASMA WINDOW CLEAN Aug 23, 13 Feb 26, 15 [H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8,980,046 Semiconductor processing system with source for decoupled ion and radical control Mar 27, 12 Mar 17, 15 [C23F]
8,980,746 Adhesion layer for through silicon via metallization Aug 13, 13 Mar 17, 15 [H01L]
8,983,631 Arrangement for identifying uncontrolled events at the process module level and methods thereof Sep 08, 09 Mar 17, 15 [G05B, G06F]
8,975,817 Pressure controlled heat pipe temperature control plate Oct 17, 12 Mar 10, 15 [H01J]
8,968,485 Apparatus and methods for processing a substrate Sep 30, 11 Mar 03, 15 [B08B, H01L]
8,970,027 Metallization mixtures and electronic devices Aug 10, 13 Mar 03, 15 [C23C, H01L, H05K, C25D]
8,970,114 Temperature controlled window of a plasma processing chamber component Feb 01, 13 Mar 03, 15 [H01J]
8,961,701 Method and system of drying a microelectronic topography Sep 18, 09 Feb 24, 15 [B08B, H01L]
8,963,052 Method for controlling spatial temperature distribution across a semiconductor wafer May 06, 09 Feb 24, 15 [C23C, H05B, H01L]
8,956,461 Apparatuses, systems and methods for rapid cleaning of plasma confinement rings with minimal erosion of other chamber parts Dec 16, 10 Feb 17, 15 [B08B, H01J]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Filing Date Issue/Pub Date Intl Class
2014/0059,789 Apparatus for Cleaning a Semiconductor Substrate Oct 16, 13 Mar 06, 14 [H01L]
2013/0171,820 METHODS FOR THREE-DIMENSIONAL INTEGRATED CIRCUIT THROUGH HOLE VIA GAPFILL AND OVERBURDEN REMOVAL Nov 30, 12 Jul 04, 13 [H01L]
2012/0263,869 Methods for Forming a Barrier Layer with Periodic Concentrations of Elements and Structures Resulting Therefrom Jun 26, 12 Oct 18, 12 [B05D]
2012/0145,202 Cleaning Compound and Method and System for Using the Cleaning Compound Feb 14, 12 Jun 14, 12 [B08B]
2012/0118,320 Methods for Isolated Bevel Edge Clean Jan 24, 12 May 17, 12 [B08B]
2012/0115,332 Method of Post Etch Polymer Residue Removal Jan 19, 12 May 10, 12 [H01L]
2012/0101,917 BUSINESS MOBILE COMMUNICATION SYSTEM Oct 03, 11 Apr 26, 12 [G06Q]
2012/0024,314 PLASMA MEDIATED ASHING PROCESSES Jul 27, 10 Feb 02, 12 [B08B]
2011/0306,203 INTERCONNECT STRUCTURE AND METHOD OF MANUFACTURING A DAMASCENE STRUCTURE Aug 25, 11 Dec 15, 11 [H01L]
2011/0271,905 Methods and System for Processing a Microelectronic Topography Jul 19, 11 Nov 10, 11 [B05C]
2011/0226,280 PLASMA MEDIATED ASHING PROCESSES May 27, 11 Sep 22, 11 [C23F, B08B]
2011/0136,346 Substantially Non-Oxidizing Plasma Treatment Devices and Processes Dec 04, 09 Jun 09, 11 [B08B, G03F, H01L]
2011/0100,553 MULTI-PERIPHERAL RING ARRANGEMENT FOR PERFORMING PLASMA CONFINEMENT Aug 31, 10 May 05, 11 [C23F, H01L]
2011/0061,687 Apparatus for Contained Chemical Surface Treatment Nov 18, 10 Mar 17, 11 [B08B]
2011/0060,442 METHODS AND ARRANGEMENT FOR DETECTING A WAFER-RELEASED EVENT WITHIN A PLASMA PROCESSING CHAMBER Sep 10, 09 Mar 10, 11 [G06F]
2011/0039,410 Apparatus and Method for Substrate Electroless Plating Oct 25, 10 Feb 17, 11 [H01L]
2011/0036,500 WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE SUBSTRATES Oct 22, 10 Feb 17, 11 [H01Q, H01L]
2011/0014,489 Method for Strengthening Adhesion Between Dielectric Layers Formed Adjacent to Metal Layers Sep 24, 10 Jan 20, 11 [B05C, B05D, B32B]
7,849,554 Apparatus and system for cleaning substrate Apr 28, 09 Dec 14, 10 [A47L]
2010/0258,142 APPARATUS AND METHOD FOR USING A VISCOELASTIC CLEANING MATERIAL TO REMOVE PARTICLES ON A SUBSTRATE Apr 14, 09 Oct 14, 10 [B08B, C25F]

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