LAM RESEARCH CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 853 44
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 321 3
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 254 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 213 3
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 117 41
 
 
H05H PLASMA TECHNIQUE 107 3
 
 
B44C PRODUCING DECORATIVE EFFECTS 76 3
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 66 327
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 48 35
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 47 106
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2015/0232,995 ELECTROLESS DEPOSITION OF CONTINUOUS PLATINUM LAYER Feb 18, 14 Aug 20, 15 [C23C]
2015/0235,808 SYSTEMS AND METHODS FOR IMPROVING WAFER ETCH NON-UNIFORMITY WHEN USING TRANSFORMER-COUPLED PLASMA Jun 02, 14 Aug 20, 15 [H01J, H01L]
2015/0235,811 TUNABLE MULTI-ZONE GAS INJECTION SYSTEM May 04, 15 Aug 20, 15 [H01J, H01L]
2015/0235,835 HIGH GROWTH RATE PROCESS FOR CONFORMAL ALUMINUM NITRIDE Feb 18, 14 Aug 20, 15 [C23C, H01L]
2015/0235,889 SYSTEM AND METHOD FOR PERFORMING HOT WATER SEAL ON ELECTROSTATIC CHUCK May 05, 15 Aug 20, 15 [H01L]
2015/0225,679 PROCESSES AND SOLUTIONS FOR SUBSTRATE CLEANING AND ELECTROLESS DEPOSITION Apr 17, 15 Aug 13, 15 [C23C, C11D, H01L]
2015/0225,854 BALL SCREW SHOWERHEAD MODULE ADJUSTER ASSEMBLY FOR SHOWERHEAD MODULE OF SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS Feb 11, 14 Aug 13, 15 [C23C, H01L]
2015/0219,499 CALCULATING POWER INPUT TO AN ARRAY OF THERMAL CONTROL ELEMENTS TO ACHIEVE A TWO-DIMENSIONAL TEMPERATURE OUTPUT Feb 05, 14 Aug 06, 15 [G01J, H01L, G01N]
2015/0221,519 VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS Jan 30, 15 Aug 06, 15 [G03F, H01L]
2015/0221,542 METHODS AND APPARATUS FOR SELECTIVE DEPOSITION OF COBALT IN SEMICONDUCTOR PROCESSING Feb 03, 14 Aug 06, 15 [C23C, H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9,111,724 Apparatus and method for controlling plasma potential Oct 14, 10 Aug 18, 15 [C23F, C23C, H01J, H01L]
9,111,728 E-beam enhanced decoupled source for semiconductor processing Jan 24, 12 Aug 18, 15 [H01J]
9,111,729 Small plasma chamber systems and methods Dec 01, 10 Aug 18, 15 [C23F, C23C, H01J, H01L]
9,111,731 Gas feed insert in a plasma processing chamber and methods therefor Sep 14, 12 Aug 18, 15 [B23K, H01J]
9,111,968 Plasma processing chamber with a grounded electrode assembly Jun 28, 10 Aug 18, 15 [C23C, H01J, H01L]
9,103,416 Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assembly and methods thereof May 13, 13 Aug 11, 15 [B23P, B25B, F16H]
9,105,449 Distributed power arrangements for localizing power delivery Jun 24, 08 Aug 11, 15 [C23F, C23C, H01J, H01L]
9,105,676 Method of removing damaged epoxy from electrostatic chuck Sep 21, 12 Aug 11, 15 [B08B, H01L]
9,105,700 Method for forming self-aligned contacts/vias with high corner selectivity Dec 12, 13 Aug 11, 15 [H01L]
9,107,284 Chamber matching using voltage control mode Mar 13, 13 Aug 11, 15 [H01J, H05H]
9,099,398 Gas distribution showerhead for inductively coupled plasma etch reactor Sep 19, 13 Aug 04, 15 [C23F, C23C, H01J, H01L, B05B]
9,101,038 Electrostatic chuck including declamping electrode and method of declamping Dec 20, 13 Aug 04, 15 [H01T, H05F, H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2014/0113,453 TUNGSTEN CARBIDE COATED METAL COMPONENT OF A PLASMA REACTOR CHAMBER AND METHOD OF COATING ABAN Oct 24, 12 Apr 24, 14 [C23C, B32B, H01L]
2014/0076,713 Edge Ramping ABAN Oct 24, 12 Mar 20, 14 [H05H]
2014/0059,789 Apparatus for Cleaning a Semiconductor Substrate ABAN Oct 16, 13 Mar 06, 14 [H01L]
2014/0051,255 COPPER DISCOLORATION PREVENTION FOLLOWING BEVEL ETCH PROCESS ABAN Oct 28, 13 Feb 20, 14 [H01L]
2014/0034,096 Acoustic Assisted Single Wafer Wet Clean For Semiconductor Wafer Process ABAN Oct 09, 13 Feb 06, 14 [H01L]
2013/0267,097 METHOD AND APPARATUS FOR FORMING FEATURES WITH PLASMA PRE-ETCH TREATMENT ON PHOTORESIST ABAN Apr 05, 12 Oct 10, 13 [C23F, H01L]
2013/0264,309 ACOUSTIC ENERGY UTILIZATION IN PLASMA PROCESSING ABAN Apr 05, 12 Oct 10, 13 [B44C, H05H]
2013/0171,820 METHODS FOR THREE-DIMENSIONAL INTEGRATED CIRCUIT THROUGH HOLE VIA GAPFILL AND OVERBURDEN REMOVAL ABAN Nov 30, 12 Jul 04, 13 [H01L]
2013/0074,769 APPARATUS FOR THE DEPOSITION OF A CONFORMAL FILM ON A SUBSTRATE AND METHODS THEREFOR ABAN Sep 28, 12 Mar 28, 13 [H01L]
2013/0062,735 METHOD FOR FORMING STAIR-STEP STRUCTURES ABAN Nov 05, 12 Mar 14, 13 [H01L]
2013/0056,087 UNIVERSAL FLUID FLOW ADAPTOR ABAN Oct 29, 12 Mar 07, 13 [F16L]
2012/0318,455 PASSIVE COMPENSATION FOR TEMPERATURE-DEPENDENT WAFER GAP CHANGES IN PLASMA PROCESSING SYSTEMS ABAN Jun 14, 11 Dec 20, 12 [C23F]
2012/0282,780 ETCH WITH HIGH ETCH RATE RESIST MASK ABAN Dec 19, 08 Nov 08, 12 [C23F, H01L]
2012/0260,517 Apparatus and Method for Reducing Substrate Pattern Collapse During Drying Operations ABAN Apr 18, 11 Oct 18, 12 [F26B]
2012/0263,869 Methods for Forming a Barrier Layer with Periodic Concentrations of Elements and Structures Resulting Therefrom ABAN Jun 26, 12 Oct 18, 12 [B05D]
2012/0175,060 DETECTION OF ARCING EVENTS IN WAFER PLASMA PROCESSING THROUGH MONITORING OF TRACE GAS CONCENTRATIONS ABAN Mar 16, 12 Jul 12, 12 [C23C, H01L]
2012/0145,202 Cleaning Compound and Method and System for Using the Cleaning Compound ABAN Feb 14, 12 Jun 14, 12 [B08B]
2012/0118,320 Methods for Isolated Bevel Edge Clean ABAN Jan 24, 12 May 17, 12 [B08B]
2012/0115,332 Method of Post Etch Polymer Residue Removal ABAN Jan 19, 12 May 10, 12 [H01L]
2012/0101,917 BUSINESS MOBILE COMMUNICATION SYSTEM ABAN Oct 03, 11 Apr 26, 12 [G06Q]

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