LAM RESEARCH CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1019 39
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 425 3
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 251 2
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 229 22
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 206 3
 
 
H05H PLASMA TECHNIQUE 103 3
 
 
B44C PRODUCING DECORATIVE EFFECTS 72 4
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 69 357
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 56 103
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 48 44
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2016/0340,781 DEPOSITION APPARATUS INCLUDING EDGE PLENUM SHOWERHEAD ASSEMBLY May 22, 15 Nov 24, 16 [C23C]
2016/0340,782 LOW VOLUME SHOWERHEAD WITH FACEPLATE HOLES FOR IMPROVED FLOW UNIFORMITY Sep 10, 15 Nov 24, 16 [C23C]
2016/0343,548 SYSTEMS AND METHODS FOR PROVIDING CHARACTERISTICS OF AN IMPEDANCE MATCHING MODEL FOR USE WITH MATCHING NETWORKS May 19, 15 Nov 24, 16 [G01R, H01J]
2016/0343,580 TECHNIQUE TO DEPOSIT SIDEWALL PASSIVATION FOR HIGH ASPECT RATIO CYLINDER ETCH Aug 01, 16 Nov 24, 16 [H01J, H01L]
2016/0343,595 CORROSION RESISTANT GAS DISTRIBUTION MANIFOLD WITH THERMALLY CONTROLLED FACEPLATE May 19, 15 Nov 24, 16 [C23C, H01L]
2016/0343,612 FEATURE FILL WITH MULTI-STAGE NUCLEATION INHIBITION May 16, 16 Nov 24, 16 [H01L]
2016/0343,806 INTERFACE PASSIVATION LAYERS AND METHODS OF FABRICATING May 21, 15 Nov 24, 16 [H01L]
2016/0333,475 SUBSTRATE PEDESTAL MODULE INCLUDING BACKSIDE GAS DELIVERY TUBE AND METHOD OF MAKING May 12, 15 Nov 17, 16 [C23C, B32B, H01L]
2016/0333,495 APPARATUS AND METHOD FOR ELECTODEPOSITION OF METALS WITH THE USE OF AN IONICALLY RESISTIVE IONICALLY PERMEABLE ELEMENT HAVING SPATIALLY TAILORED RESISTIVITY May 14, 15 Nov 17, 16 [H01L, C25D]
2016/0336,178 PLASMA ASSISTED ATOMIC LAYER DEPOSITION OF MULTI-LAYER FILMS FOR PATTERNING APPLICATIONS Jul 29, 16 Nov 17, 16 [H01J, H01L]
2016/0336,213 HIGH TEMPERATURE SUBSTRATE PEDESTAL MODULE AND COMPONENTS THEREOF May 12, 15 Nov 17, 16 [C23C, H01J, H01L]
2016/0329,206 METHODS OF MODULATING RESIDUAL STRESS IN THIN FILMS May 08, 15 Nov 10, 16 [H01L]
2016/0329,213 HIGHLY SELECTIVE DEPOSITION OF AMORPHOUS CARBON AS A METAL DIFFUSION BARRIER LAYER Apr 11, 16 Nov 10, 16 [H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9,505,036 Portable sonic particle removal tool with a chemically controlled working fluid Mar 15, 13 Nov 29, 16 [B08B, C11D, H01L]
9,508,529 System, method and apparatus for RF power compensation in a plasma processing system Oct 23, 14 Nov 29, 16 [H01J]
9,508,530 Plasma processing chamber with flexible symmetric RF return strap Nov 21, 12 Nov 29, 16 [H01J, H01L]
9,508,547 Composition-matched curtain gas mixtures for edge uniformity modulation in large-volume ALD reactors Aug 17, 15 Nov 29, 16 [H01L]
9,499,913 metal ion reducing agent Apr 02, 14 Nov 22, 16 [C23C, H01L]
9,502,216 Using modeling to determine wafer bias associated with a plasma system Jan 31, 13 Nov 22, 16 [H01J]
9,502,221 Etch rate modeling and use thereof with multiple parameters for in-chamber and chamber-to-chamber matching Apr 02, 14 Nov 22, 16 [G05B, H01J]
9,502,238 Deposition of conformal films by atomic layer deposition and atomic layer etch Apr 03, 15 Nov 22, 16 [C23C, H01J, H01L]
9,502,255 Low-k damage repair and pore sealing agents with photosensitive end groups Oct 17, 14 Nov 22, 16 [H01L]
9,502,275 Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs Oct 20, 15 Nov 22, 16 [H01L]
9,502,279 Installation fixture having a micro-grooved non-stick surface Jun 28, 13 Nov 22, 16 [H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0079,100 VACUUM CARRIER INTERFACE HAVING A SWITCHABLE REDUCED CAPACITY AIRLOCK CHAMBER ABAN Sep 17, 14 Mar 17, 16 [C23C, H01L, B25J]
2015/0376,792 ATMOSPHERIC PLASMA APPARATUS FOR SEMICONDUCTOR PROCESSING ABAN Jun 30, 14 Dec 31, 15 [C23C, H01L, C25D]
2015/0299,882 NICKEL ELECTROPLATING SYSTEMS HAVING A GRAIN REFINER RELEASING DEVICE ABAN Apr 18, 14 Oct 22, 15 [H01L, C25D]
2015/0155,176 SIDEWALL HEIGHT NONUNIFORMITY REDUCTION FOR SIDEWALL IMAGE TRANSFER PROCESSES ABAN Dec 03, 13 Jun 04, 15 [H01L]
2015/0136,171 LIQUID OR VAPOR INJECTION PLASMA ASHING SYSTEMS AND METHODS ABAN Nov 18, 13 May 21, 15 [H01J, H01L]
2015/0079,786 METHOD AND SOLUTION FOR CLEANING METAL RESIDUE ABAN Sep 17, 13 Mar 19, 15 [C09K, H01L]
2015/0040,941 Method and Apparatus for Cleaning A Semiconductor Substrate ABAN Aug 07, 13 Feb 12, 15 [H01L]
2015/0040,947 Method and Systems for Cleaning A Substrate ABAN Aug 07, 13 Feb 12, 15 [H01L]
2015/0037,979 CONFORMAL SIDEWALL PASSIVATION ABAN Aug 02, 13 Feb 05, 15 [H01L]
2014/0332,037 Controls of Ambient Environment During Wafer Drying Using Proximity Head ABAN May 28, 14 Nov 13, 14 [H01L]
2014/0261,535 Standing Wave Generation in Holes to Enhance Cleaning in the Holes in Liquid Sonification Cleaning Systems ABAN Mar 13, 13 Sep 18, 14 [B08B]
2014/0263,179 TUNING SYSTEM AND METHOD FOR PLASMA-BASED SUBSTRATE PROCESSING SYSTEMS ABAN Mar 15, 13 Sep 18, 14 [H01J, H01P]
2014/0202,503 METHOD AND SYSTEM FOR UNIFORMLY APPLYING A MULTI-PHASE CLEANING SOLUTION TO A SUBSTRATE ABAN Mar 25, 14 Jul 24, 14 [H01L]
2014/0179,097 DEPOSITION APPARATUS AND METHOD ABAN Dec 21, 12 Jun 26, 14 [H01L]
2014/0179,106 IN-SITU METAL RESIDUE CLEAN ABAN Dec 21, 12 Jun 26, 14 [H01L]
2014/0170,780 Method of Low-K Dielectric Film Repair ABAN Feb 24, 14 Jun 19, 14 [H01L]
2014/0158,167 METHOD AND APPARATUS FOR CLEANING A SUBSTRATE USING NON-NEWTONIAN FLUIDS ABAN Feb 11, 14 Jun 12, 14 [H01L]
2014/0154,406 WET ACTIVATION OF RUTHENIUM CONTAINING LINER/BARRIER ABAN Nov 30, 12 Jun 05, 14 [H01L]
2014/0127,911 PALLADIUM PLATED ALUMINUM COMPONENT OF A PLASMA PROCESSING CHAMBER AND METHOD OF MANUFACTURE THEREOF ABAN Nov 07, 12 May 08, 14 [H01L, C25D]
2014/0116,476 Systems for Surface Treatment of Semiconductor Substrates using Sequential Chemical Applications ABAN Dec 31, 13 May 01, 14 [H01L]

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