LAM RESEARCH CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 835 45
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 303 3
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 254 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 208 3
 
 
H05H PLASMA TECHNIQUE 109 3
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 104 41
 
 
B44C PRODUCING DECORATIVE EFFECTS 76 3
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 66 333
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 47 37
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 46 99
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2015/0174,768 MICROSTRUCTURES FOR IMPROVED WAFER HANDLING Dec 23, 13 Jun 25, 15 [H01L, B25J]
2015/0179,412 EDGE RING DIMENSIONED TO EXTEND LIFETIME OF ELASTOMER SEAL IN A PLASMA PROCESSING CHAMBER Dec 20, 13 Jun 25, 15 [H01J, H01L]
2015/0179,416 ADAPTER PLATE FOR POLISHING AND CLEANING ELECTRODES Dec 20, 13 Jun 25, 15 [B24B, H01J]
2015/0179,461 METHOD FOR DEPOSITING EXTREMELY LOW RESISTIVITY TUNGSTEN Dec 19, 13 Jun 25, 15 [C23C, H01L]
2015/0179,472 METAL HARDMASK ALL IN ONE INTEGRATED ETCH May 02, 12 Jun 25, 15 [H01L]
2015/0179,488 ROBOT WITH INTEGRATED ALIGNER Dec 23, 13 Jun 25, 15 [H01L]
2015/0181,683 ELECTROSTATIC CHUCK INCLUDING DECLAMPING ELECTRODE AND METHOD OF DECLAMPING Dec 20, 13 Jun 25, 15 [H01L, H05F]
2015/0165,492 ELECTROSTATIC CHUCK CLEANING FIXTURE Dec 12, 13 Jun 18, 15 [B08B, H01L]
2015/0167,168 SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS INCLUDING UNIFORMITY BAFFLES Dec 18, 14 Jun 18, 15 [C23C, H01L]
2015/0168,962 METHOD OF DETERMINING THERMAL STABILITY OF A SUBSTRATE SUPPORT ASSEMBLY Dec 17, 13 Jun 18, 15 [G05B, G05D]
2015/0170,942 INSTALLATION FIXTURE FOR ELASTOMER BANDS Dec 17, 13 Jun 18, 15 [H01L]
2015/0170,965 METHOD FOR FORMING SELF-ALIGNED CONTACTS/VIAS WITH HIGH CORNER SELECTIVITY Dec 12, 13 Jun 18, 15 [H01L]
2015/0170,977 PLASMA PROCESSING APPARATUS AND COMPONENT THEREOF INCLUDING AN OPTICAL FIBER FOR DETERMINING A TEMPERATURE THEREOF Dec 16, 13 Jun 18, 15 [C23C, H01J, H01L]
2015/0163,860 APPARATUS AND METHOD FOR UNIFORM IRRADIATION USING SECONDARY IRRADIANT ENERGY FROM A SINGLE LIGHT SOURCE Dec 06, 13 Jun 11, 15 [G02B, H05B, H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9,064,909 Method of processing a semiconductor substrate in a plasma processing apparatus Jun 17, 13 Jun 23, 15 [C23C, H01J, H01L, H05K]
9,058,960 Compression member for use in showerhead electrode assembly May 09, 12 Jun 16, 15 [C23C, H01J]
9,058,975 Cleaning solution formulations for substrates Sep 07, 08 Jun 16, 15 [C09K, C11D, H01L]
9,059,101 Radiofrequency adjustment for instability management in semiconductor processing Mar 11, 13 Jun 16, 15 [H05B, H01J, H05H, H01L]
9,059,116 Etch with pulsed bias Oct 04, 11 Jun 16, 15 [B44C, H01L]
9,059,678 TCCT match circuit for plasma etch chambers Jan 25, 13 Jun 16, 15 [H03H]
9,051,647 Tunable multi-zone gas injection system Oct 23, 09 Jun 09, 15 [C23C, H01J, H01L]
9,053,908 Method and apparatus for controlling substrate DC-bias and ion energy and angular distribution during substrate etching Sep 19, 13 Jun 09, 15 [H01J, C03C]
9,053,925 Configurable bevel etcher Apr 06, 11 Jun 09, 15 [H01J, H01L]
9,054,148 Method for performing hot water seal on electrostatic chuck Aug 26, 11 Jun 09, 15 [C23C, B05D, H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2014/0113,453 TUNGSTEN CARBIDE COATED METAL COMPONENT OF A PLASMA REACTOR CHAMBER AND METHOD OF COATING ABAN Oct 24, 12 Apr 24, 14 [C23C, B32B, H01L]
2014/0059,789 Apparatus for Cleaning a Semiconductor Substrate ABAN Oct 16, 13 Mar 06, 14 [H01L]
2014/0034,096 Acoustic Assisted Single Wafer Wet Clean For Semiconductor Wafer Process ABAN Oct 09, 13 Feb 06, 14 [H01L]
2013/0267,097 METHOD AND APPARATUS FOR FORMING FEATURES WITH PLASMA PRE-ETCH TREATMENT ON PHOTORESIST ABAN Apr 05, 12 Oct 10, 13 [C23F, H01L]
2013/0171,820 METHODS FOR THREE-DIMENSIONAL INTEGRATED CIRCUIT THROUGH HOLE VIA GAPFILL AND OVERBURDEN REMOVAL ABAN Nov 30, 12 Jul 04, 13 [H01L]
2013/0062,735 METHOD FOR FORMING STAIR-STEP STRUCTURES ABAN Nov 05, 12 Mar 14, 13 [H01L]
2013/0056,087 UNIVERSAL FLUID FLOW ADAPTOR ABAN Oct 29, 12 Mar 07, 13 [F16L]
2012/0318,455 PASSIVE COMPENSATION FOR TEMPERATURE-DEPENDENT WAFER GAP CHANGES IN PLASMA PROCESSING SYSTEMS ABAN Jun 14, 11 Dec 20, 12 [C23F]
2012/0260,517 Apparatus and Method for Reducing Substrate Pattern Collapse During Drying Operations ABAN Apr 18, 11 Oct 18, 12 [F26B]
2012/0263,869 Methods for Forming a Barrier Layer with Periodic Concentrations of Elements and Structures Resulting Therefrom ABAN Jun 26, 12 Oct 18, 12 [B05D]
2012/0175,060 DETECTION OF ARCING EVENTS IN WAFER PLASMA PROCESSING THROUGH MONITORING OF TRACE GAS CONCENTRATIONS ABAN Mar 16, 12 Jul 12, 12 [C23C, H01L]
2012/0145,202 Cleaning Compound and Method and System for Using the Cleaning Compound ABAN Feb 14, 12 Jun 14, 12 [B08B]
2012/0118,320 Methods for Isolated Bevel Edge Clean ABAN Jan 24, 12 May 17, 12 [B08B]
2012/0115,332 Method of Post Etch Polymer Residue Removal ABAN Jan 19, 12 May 10, 12 [H01L]
2012/0101,917 BUSINESS MOBILE COMMUNICATION SYSTEM ABAN Oct 03, 11 Apr 26, 12 [G06Q]
2012/0088,370 Substrate Processing System with Multiple Processing Devices Deployed in Shared Ambient Environment and Associated Methods ABAN Oct 06, 10 Apr 12, 12 [C23C, H01L, B05B]
2012/0056,325 METHODS OF FABRICATING ELECTRONIC DEVICES USING DIRECT COPPER PLATING ABAN Nov 10, 11 Mar 08, 12 [H01L]
2012/0024,314 PLASMA MEDIATED ASHING PROCESSES ABAN Jul 27, 10 Feb 02, 12 [B08B]
2011/0306,203 INTERCONNECT STRUCTURE AND METHOD OF MANUFACTURING A DAMASCENE STRUCTURE ABAN Aug 25, 11 Dec 15, 11 [H01L]
2011/0271,905 Methods and System for Processing a Microelectronic Topography ABAN Jul 19, 11 Nov 10, 11 [B05C]

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