LAM RESEARCH CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1039 39
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 440 3
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 252 15
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 250 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 207 3
 
 
H05H PLASMA TECHNIQUE 101 3
 
 
B44C PRODUCING DECORATIVE EFFECTS 73 4
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 69 359
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 59 103
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 50 45
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0040,146 PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING Aug 03, 15 Feb 09, 17 [C23C, H01J]
2017/0040,147 Systems Comprising Silicon Coated Gas Supply Conduits and Methods for Applying Coatings Aug 09, 16 Feb 09, 17 [C23C, C25F, B23K, H01J]
2017/0040,148 HOLLOW RF FEED WITH COAXIAL DC POWER FEED Aug 04, 15 Feb 09, 17 [H01J, H01P]
2017/0040,170 Systems and Methods for Separately Applying Charged Plasma Constituents and Ultraviolet Light in a Mixed Mode Processing Operation Aug 06, 15 Feb 09, 17 [H01J, H01L]
2017/0040,174 Systems And Methods For Reverse Pulsing Sep 23, 15 Feb 09, 17 [H01L]
2017/0040,205 HIGH-HARDNESS-MATERIAL-POWDER INFUSED ELASTOMER FOR HIGH FRICTION AND COMPLIANCE FOR SILICON WAFER TRANSFER Jul 26, 16 Feb 09, 17 [H01L, B25J]
2017/0040,214 ATOMIC LAYER ETCHING OF TUNGSTEN FOR ENHANCED TUNGSTEN DEPOSITION FILL Aug 19, 15 Feb 09, 17 [H01L]
2017/0040,284 METHODS FOR DIRECTLY BONDING SILICON TO SILICON OR SILICON CARBIDE TO SILICON CARBIDE Jul 12, 16 Feb 09, 17 [H01L]
2017/0028,560 SYSTEM AND METHOD FOR WAFER ALIGNMENT AND CENTERING WITH CCD CAMERA AND ROBOT Jul 30, 15 Feb 02, 17 [G06T, B25J]
2017/0031,370 Time Multiplexed Chemical Delivery System Aug 21, 15 Feb 02, 17 [G05D]
2017/0032,510 VISION-BASED WAFER NOTCH POSITION MEASUREMENT Jul 30, 15 Feb 02, 17 [G06T, H01L]
2017/0032,935 Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery and Associated Methods for Operation, Monitoring, and Control Jun 01, 16 Feb 02, 17 [H01J, H01L]
2017/0032,943 TIME VARYING SEGMENTED PRESSURE CONTROL Jul 27, 15 Feb 02, 17 [H01J, H01L]
2017/0032,982 GAS DELIVERY SYSTEM Nov 19, 15 Feb 02, 17 [F16L, H01L]
2017/0021,317 FLUID MIXING HUB FOR SEMICONDUCTOR PROCESSING TOOL Jul 24, 15 Jan 26, 17 [B01F]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9567685 Apparatus and method for dynamic control of plated uniformity with the use of remote electric current Jan 22, 15 Feb 14, 17 [C25D]
9570289 Method and apparatus to minimize seam effect during TEOS oxide film deposition Mar 06, 15 Feb 14, 17 [C23C, H01L]
9570290 Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applications Feb 09, 16 Feb 14, 17 [C23C, H01J, H01L]
9570320 Method to etch copper barrier film Dec 22, 14 Feb 14, 17 [B44C, C23F, C03C, H01L]
9564285 Hybrid feature etching and bevel etching systems Jul 15, 13 Feb 07, 17 [H01J]
9564308 Methods for processing bevel edge etching Nov 10, 15 Feb 07, 17 [H01J, H01L]
9564312 Selective inhibition in atomic layer deposition of silicon-containing films Nov 24, 14 Feb 07, 17 [C23C, H01L]
9558928 Contact clean in high-aspect ratio structures Dec 19, 14 Jan 31, 17 [H01J, H01L]
9551074 Electroless plating solution with at least two borane containing reducing agents Jun 05, 14 Jan 24, 17 [C23C, B22F, H01L]
9553031 Method for integrating germanides in high performance integrated circuits Apr 01, 16 Jan 24, 17 [H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0079,100 VACUUM CARRIER INTERFACE HAVING A SWITCHABLE REDUCED CAPACITY AIRLOCK CHAMBER ABAN Sep 17, 14 Mar 17, 16 [C23C, H01L, B25J]
2015/0376,792 ATMOSPHERIC PLASMA APPARATUS FOR SEMICONDUCTOR PROCESSING ABAN Jun 30, 14 Dec 31, 15 [C23C, H01L, C25D]
2015/0299,882 NICKEL ELECTROPLATING SYSTEMS HAVING A GRAIN REFINER RELEASING DEVICE ABAN Apr 18, 14 Oct 22, 15 [H01L, C25D]
2015/0225,679 PROCESSES AND SOLUTIONS FOR SUBSTRATE CLEANING AND ELECTROLESS DEPOSITION ABAN Apr 17, 15 Aug 13, 15 [C23C, C11D, H01L]
2015/0155,176 SIDEWALL HEIGHT NONUNIFORMITY REDUCTION FOR SIDEWALL IMAGE TRANSFER PROCESSES ABAN Dec 03, 13 Jun 04, 15 [H01L]
2015/0136,171 LIQUID OR VAPOR INJECTION PLASMA ASHING SYSTEMS AND METHODS ABAN Nov 18, 13 May 21, 15 [H01J, H01L]
2015/0079,786 METHOD AND SOLUTION FOR CLEANING METAL RESIDUE ABAN Sep 17, 13 Mar 19, 15 [C09K, H01L]
2015/0040,941 Method and Apparatus for Cleaning A Semiconductor Substrate ABAN Aug 07, 13 Feb 12, 15 [H01L]
2015/0040,947 Method and Systems for Cleaning A Substrate ABAN Aug 07, 13 Feb 12, 15 [H01L]
2015/0037,979 CONFORMAL SIDEWALL PASSIVATION ABAN Aug 02, 13 Feb 05, 15 [H01L]
2014/0332,037 Controls of Ambient Environment During Wafer Drying Using Proximity Head ABAN May 28, 14 Nov 13, 14 [H01L]
2014/0261,535 Standing Wave Generation in Holes to Enhance Cleaning in the Holes in Liquid Sonification Cleaning Systems ABAN Mar 13, 13 Sep 18, 14 [B08B]
2014/0263,179 TUNING SYSTEM AND METHOD FOR PLASMA-BASED SUBSTRATE PROCESSING SYSTEMS ABAN Mar 15, 13 Sep 18, 14 [H01J, H01P]
2014/0202,503 METHOD AND SYSTEM FOR UNIFORMLY APPLYING A MULTI-PHASE CLEANING SOLUTION TO A SUBSTRATE ABAN Mar 25, 14 Jul 24, 14 [H01L]
2014/0179,097 DEPOSITION APPARATUS AND METHOD ABAN Dec 21, 12 Jun 26, 14 [H01L]
2014/0179,106 IN-SITU METAL RESIDUE CLEAN ABAN Dec 21, 12 Jun 26, 14 [H01L]
2014/0170,780 Method of Low-K Dielectric Film Repair ABAN Feb 24, 14 Jun 19, 14 [H01L]
2014/0158,167 METHOD AND APPARATUS FOR CLEANING A SUBSTRATE USING NON-NEWTONIAN FLUIDS ABAN Feb 11, 14 Jun 12, 14 [H01L]
2014/0154,406 WET ACTIVATION OF RUTHENIUM CONTAINING LINER/BARRIER ABAN Nov 30, 12 Jun 05, 14 [H01L]
2014/0127,911 PALLADIUM PLATED ALUMINUM COMPONENT OF A PLASMA PROCESSING CHAMBER AND METHOD OF MANUFACTURE THEREOF ABAN Nov 07, 12 May 08, 14 [H01L, C25D]

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