LAM RESEARCH CORPORATION

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Technologies

Intl Class Technology # of Patents/ App Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 771 45
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 283 3
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 264 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 205 3
 
 
H05H PLASMA TECHNIQUE 117 3
 
 
B44C PRODUCING DECORATIVE EFFECTS 76 3
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 67 322
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 59 62
 
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 53 44
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 47 36
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2014/0299,273 MULTI-SEGMENT ELECTRODE ASSEMBLY AND METHODS THEREFOR Apr 08, 13 Oct 09, 14 [H01J]
2014/0302,681 INTERNAL PLASMA GRID FOR SEMICONDUCTOR FABRICATION Nov 15, 13 Oct 09, 14 [H01L]
2014/0261,535 Standing Wave Generation in Holes to Enhance Cleaning in the Holes in Liquid Sonification Cleaning Systems Mar 13, 13 Sep 18, 14 [B08B]
2014/0261,575 PORTABLE SONIC PARTICLE REMOVAL TOOL WITH A CHEMICALLY CONTROLLED WORKING FLUID Mar 15, 13 Sep 18, 14 [B08B]
2014/0263,177 System and Method for Heating Plasma Exposed Surfaces Mar 29, 13 Sep 18, 14 [B05D]
2014/0263,179 TUNING SYSTEM AND METHOD FOR PLASMA-BASED SUBSTRATE PROCESSING SYSTEMS Mar 15, 13 Sep 18, 14 [H01J, H01P]
2014/0263,274 METHODS OF FAULT DETECTION FOR MULTIPLEXED HEATER ARRAY May 29, 14 Sep 18, 14 [H05B, H01L]
2014/0265,833 Chamber Matching Using Voltage Control Mode Mar 13, 13 Sep 18, 14 [H05H]
2014/0265,851 Chamber Matching For Power Control Mode May 23, 13 Sep 18, 14 [H05H]
2014/0265,852 Dual Control Modes Feb 19, 14 Sep 18, 14 [H01J]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8,859,432 Bare aluminum baffles for resist stripping chambers Oct 31, 12 Oct 14, 14 [C23F, C03C, H01L]
8,860,955 Arrangements and methods for determining positions and offsets Dec 19, 08 Oct 14, 14 [G01B, H01L]
8,851,113 Shared gas panels in plasma processing systems Mar 27, 12 Oct 07, 14 [F16K]
8,852,384 Method and apparatus for detecting plasma unconfinement Aug 13, 12 Oct 07, 14 [H01L, G01N]
8,852,685 Coating method for gas delivery system Apr 23, 10 Oct 07, 14 [C23F, B05D]
8,852,964 Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis Feb 04, 13 Oct 07, 14 [H01L]
8,854,451 Automated bubble detection apparatus and method Oct 19, 11 Oct 07, 14 [H04N, G01N, C25D]
8,844,106 Installation fixture for elastomer bands and methods of using the same Nov 10, 11 Sep 30, 14 [B23P, H01L]
8,844,461 Fluid handling system for wafer electroless plating and associated methods Apr 16, 07 Sep 30, 14 [C23C, B05C, B05D]
8,845,855 Electrode for plasma processes and method for manufacture and use thereof Jul 25, 07 Sep 30, 14 [C23C, H01J, H01L]
8,845,856 Edge ring assembly for plasma etching chambers Dec 01, 10 Sep 30, 14 [H01J, H01L]
8,846,539 Apparatus including showerhead electrode and heater for plasma processing Feb 22, 10 Sep 30, 14 [B44C, H01J, H01L]
8,847,495 Movable grounding arrangements in a plasma processing chamber and methods therefor Sep 14, 12 Sep 30, 14 [H01J]
8,849,585 Methods for automatically characterizing a plasma Jun 02, 09 Sep 30, 14 [G01R, H01J, G01N]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Filing Date Issue/Pub Date Intl Class
2012/0145,202 Cleaning Compound and Method and System for Using the Cleaning Compound Feb 14, 12 Jun 14, 12 [B08B]
2012/0101,917 BUSINESS MOBILE COMMUNICATION SYSTEM Oct 03, 11 Apr 26, 12 [G06Q]
2012/0024,314 PLASMA MEDIATED ASHING PROCESSES Jul 27, 10 Feb 02, 12 [B08B]
2011/0306,203 INTERCONNECT STRUCTURE AND METHOD OF MANUFACTURING A DAMASCENE STRUCTURE Aug 25, 11 Dec 15, 11 [H01L]
2011/0271,905 Methods and System for Processing a Microelectronic Topography Jul 19, 11 Nov 10, 11 [B05C]
2011/0226,280 PLASMA MEDIATED ASHING PROCESSES May 27, 11 Sep 22, 11 [C23F, B08B]
2011/0136,346 Substantially Non-Oxidizing Plasma Treatment Devices and Processes Dec 04, 09 Jun 09, 11 [B08B, G03F, H01L]
2011/0060,442 METHODS AND ARRANGEMENT FOR DETECTING A WAFER-RELEASED EVENT WITHIN A PLASMA PROCESSING CHAMBER Sep 10, 09 Mar 10, 11 [G06F]
2011/0036,500 WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE SUBSTRATES Oct 22, 10 Feb 17, 11 [H01Q, H01L]
2011/0014,489 Method for Strengthening Adhesion Between Dielectric Layers Formed Adjacent to Metal Layers Sep 24, 10 Jan 20, 11 [B05C, B05D, B32B]
2010/0184,301 Methods for Preventing Precipitation of Etch Byproducts During an Etch Process and/or Subsequent Rinse Process Jan 20, 09 Jul 22, 10 [H01L]
2010/0130,017 FRONT END OF LINE PLASMA MEDIATED ASHING PROCESSES AND APPARATUS Nov 21, 08 May 27, 10 [H01L]
2010/0108,491 METHODS FOR REMOVING A METAL OXIDE FROM A SUBSTRATE Jan 07, 10 May 06, 10 [H05F]
2010/0062,164 Methods and Solutions for Preventing the Formation of Metal Particulate Defect Matter Upon a Substrate After a Plating Process Sep 08, 08 Mar 11, 10 [C09K, B05D, C25D]
2010/0015,731 Method of low-k dielectric film repair Feb 20, 07 Jan 21, 10 [C23C, H01L]
2009/0288,688 NON-CORROSIVE CHEMICAL RINSE SYSTEM Mar 11, 06 Nov 26, 09 [C09K, B08B]
2009/0291,562 HELIUM DESCUMMING May 20, 08 Nov 26, 09 [B08B, H01L]
2009/0277,871 PLASMA MEDIATED ASHING PROCESSES THAT INCLUDE FORMATION OF A PROTECTIVE LAYER BEFORE AND/OR DURING THE PLASMA MEDIATED ASHING PROCESS Mar 05, 09 Nov 12, 09 [C23F]
2009/0211,596 Method of post etch polymer residue removal Jul 11, 07 Aug 27, 09 [B08B]
2009/0170,334 Copper Discoloration Prevention Following Bevel Etch Process Dec 22, 08 Jul 02, 09 [H01L]

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