LAM RESEARCH CORPORATION

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Technologies

Intl Class Technology # of Patents/ App Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 181 35
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 55 3
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 37 3
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 37 13
 
 
H05H PLASMA TECHNIQUE 33 2
 
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 24 32
 
 
B44C PRODUCING DECORATIVE EFFECTS 19 2
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 17 25
 
 
B05B SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES 10 10
 
 
B05C APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 10 13
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2014/0261,535 Standing Wave Generation in Holes to Enhance Cleaning in the Holes in Liquid Sonification Cleaning Systems Mar 13, 13 Sep 18, 14 [B08B]
2014/0261,575 PORTABLE SONIC PARTICLE REMOVAL TOOL WITH A CHEMICALLY CONTROLLED WORKING FLUID Mar 15, 13 Sep 18, 14 [B08B]
2014/0263,177 System and Method for Heating Plasma Exposed Surfaces Mar 29, 13 Sep 18, 14 [B05D]
2014/0263,179 TUNING SYSTEM AND METHOD FOR PLASMA-BASED SUBSTRATE PROCESSING SYSTEMS Mar 15, 13 Sep 18, 14 [H01J, H01P]
2014/0263,274 METHODS OF FAULT DETECTION FOR MULTIPLEXED HEATER ARRAY May 29, 14 Sep 18, 14 [H05B, H01L]
2014/0265,833 Chamber Matching Using Voltage Control Mode Mar 13, 13 Sep 18, 14 [H05H]
2014/0265,851 Chamber Matching For Power Control Mode May 23, 13 Sep 18, 14 [H05H]
2014/0265,852 Dual Control Modes Feb 19, 14 Sep 18, 14 [H01J]
2014/0269,821 MULTICHANNEL THERMOCOUPLE COMPENSATION FOR THREE DIMENSIONAL TEMPERATURE GRADIENT Mar 12, 13 Sep 18, 14 [G01K]
2014/0272,459 CORROSION RESISTANT ALUMINUM COATING ON PLASMA CHAMBER COMPONENTS Mar 12, 13 Sep 18, 14 [C23C, H01J, H01L, C22C]
2014/0251,382 Methods for Confinement of Foam Delivered by a Proximity Head May 22, 14 Sep 11, 14 [H01L]
2014/0256,066 Radiofrequency Adjustment for Instability Management in Semiconductor Processing Mar 11, 13 Sep 11, 14 [H01L]
2014/0256,128 METHOD AND APPARATUS FOR REMOTE PLASMA TREATMENT FOR REDUCING METAL OXIDES ON A METAL SEED LAYER Nov 21, 13 Sep 11, 14 [H01L]
2014/0256,142 METHOD OF ETCHING AN ETCH LAYER Mar 08, 13 Sep 11, 14 [H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8,840,754 Polar regions for electrostatic de-chucking with lift pins Dec 16, 10 Sep 23, 14 [H01L]
8,832,916 Methods of dechucking and system thereof Jul 12, 11 Sep 16, 14 [B23P, H01J, H01L, B28B]
8,826,855 C-shaped confinement ring for a plasma processing chamber Jun 30, 10 Sep 09, 14 [C23F, C23C, H01J, H01L]
8,826,857 Plasma processing assemblies including hinge assemblies Dec 09, 11 Sep 09, 14 [C23F, C23C, H01J, E05D, H01L, E05F]
8,828,145 Method of particle contaminant removal Mar 10, 09 Sep 09, 14 [B08B, H01L]
8,828,259 Methods for automatically determining capacitor values and systems thereof Jul 07, 11 Sep 09, 14 [H01J, C03C]
8,828,744 Method for etching with controlled wiggling Sep 24, 12 Sep 09, 14 [H01L]
8,828,863 Electroless copper deposition with suppressor Jun 25, 13 Sep 09, 14 [H01L]
8,821,639 Apparatus for spatial and temporal control of temperature on a substrate Sep 19, 11 Sep 02, 14 [H01R, B23K, H05K]
8,822,344 Method of etching an etch layer Mar 08, 13 Sep 02, 14 [H01L]
8,822,345 Apparatus including gas distribution member supplying process gas and radio frequency (RF) power for plasma processing Nov 07, 12 Sep 02, 14 [H01J, H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Filing Date Issue/Pub Date Intl Class
2012/0145,202 Cleaning Compound and Method and System for Using the Cleaning Compound Feb 14, 12 Jun 14, 12 [B08B]
2012/0101,917 BUSINESS MOBILE COMMUNICATION SYSTEM Oct 03, 11 Apr 26, 12 [G06Q]
2012/0024,314 PLASMA MEDIATED ASHING PROCESSES Jul 27, 10 Feb 02, 12 [B08B]
2011/0306,203 INTERCONNECT STRUCTURE AND METHOD OF MANUFACTURING A DAMASCENE STRUCTURE Aug 25, 11 Dec 15, 11 [H01L]
2011/0271,905 Methods and System for Processing a Microelectronic Topography Jul 19, 11 Nov 10, 11 [B05C]
2011/0226,280 PLASMA MEDIATED ASHING PROCESSES May 27, 11 Sep 22, 11 [C23F, B08B]
2011/0136,346 Substantially Non-Oxidizing Plasma Treatment Devices and Processes Dec 04, 09 Jun 09, 11 [B08B, G03F, H01L]
2011/0060,442 METHODS AND ARRANGEMENT FOR DETECTING A WAFER-RELEASED EVENT WITHIN A PLASMA PROCESSING CHAMBER Sep 10, 09 Mar 10, 11 [G06F]
2011/0036,500 WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE SUBSTRATES Oct 22, 10 Feb 17, 11 [H01Q, H01L]
2011/0014,489 Method for Strengthening Adhesion Between Dielectric Layers Formed Adjacent to Metal Layers Sep 24, 10 Jan 20, 11 [B05C, B05D, B32B]
2010/0184,301 Methods for Preventing Precipitation of Etch Byproducts During an Etch Process and/or Subsequent Rinse Process Jan 20, 09 Jul 22, 10 [H01L]
2010/0130,017 FRONT END OF LINE PLASMA MEDIATED ASHING PROCESSES AND APPARATUS Nov 21, 08 May 27, 10 [H01L]
2010/0108,491 METHODS FOR REMOVING A METAL OXIDE FROM A SUBSTRATE Jan 07, 10 May 06, 10 [H05F]
2010/0062,164 Methods and Solutions for Preventing the Formation of Metal Particulate Defect Matter Upon a Substrate After a Plating Process Sep 08, 08 Mar 11, 10 [C09K, B05D, C25D]
2010/0015,731 Method of low-k dielectric film repair Feb 20, 07 Jan 21, 10 [C23C, H01L]
2009/0288,688 NON-CORROSIVE CHEMICAL RINSE SYSTEM Mar 11, 06 Nov 26, 09 [C09K, B08B]
2009/0291,562 HELIUM DESCUMMING May 20, 08 Nov 26, 09 [B08B, H01L]
2009/0277,871 PLASMA MEDIATED ASHING PROCESSES THAT INCLUDE FORMATION OF A PROTECTIVE LAYER BEFORE AND/OR DURING THE PLASMA MEDIATED ASHING PROCESS Mar 05, 09 Nov 12, 09 [C23F]
2009/0211,596 Method of post etch polymer residue removal Jul 11, 07 Aug 27, 09 [B08B]
2009/0170,334 Copper Discoloration Prevention Following Bevel Etch Process Dec 22, 08 Jul 02, 09 [H01L]

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