LAM RESEARCH CORPORATION

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Technologies

Intl Class Technology # of Patents Rank
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 496 57
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 199 2
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 199 4
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 116 3
 
 
H05H PLASMA TECHNIQUE 78 3
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 51 249
 
 
B44C PRODUCING DECORATIVE EFFECTS 47 5
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 35 35
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 34 94
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 34 78
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Top Patents (by citation)

Patent # Title Filing Date Issue Date Intl Class Cited #
5,401,350 Coil configurations for improved uniformity in inductively coupled plasma systems Mar 08, 93 Mar 28, 95 [H05H] 227
6,444,039 Three-dimensional showerhead apparatus Mar 07, 00 Sep 03, 02 [C23F, C23L] 125
5,534,751 Plasma etching apparatus utilizing plasma confinement Jul 10, 95 Jul 09, 96 [H01J] 111
5,356,478 Plasma cleaning method for removing residues in a plasma treatment chamber Jan 03, 94 Oct 18, 94 [B08B] 110
5,368,710 Method of treating an article with a plasma apparatus in which a uniform electric field is induced by a dielectric window Mar 29, 93 Nov 29, 94 [C23C] 104
6,245,192 Gas distribution apparatus for semiconductor processing Jun 30, 99 Jun 12, 01 [C23F] 102
5,269,879 Method of etching vias without sputtering of underlying electrically conductive layer Oct 16, 91 Dec 14, 93 [H01L] 97
7,015,703 Radio frequency Langmuir probe Apr 30, 04 Mar 21, 06 [G01R] 93
5,647,953 Plasma cleaning method for removing residues in a plasma process chamber Dec 22, 95 Jul 15, 97 [C23C] 93
5,820,723 Universal vacuum chamber including equipment modules such as a plasma generating source, vacuum pumping arrangement and/or cantilevered substrate support Jun 05, 96 Oct 13, 98 [C23F] 86
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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2013/0104,930 METHOD OF CLEANING ALUMINUM PLASMA CHAMBER PARTS Oct 31, 11 May 02, 13 [C23G]
2013/0104,938 Methods For Mixed Acid Cleaning Of Showerhead Electrodes May 30, 12 May 02, 13 [B08B]
2013/0104,942 Mixed Acid Cleaning Assemblies May 30, 12 May 02, 13 [B08B]
2013/0105,083 Systems Comprising Silicon Coated Gas Supply Conduits And Methods For Applying Coatings Nov 01, 11 May 02, 13 [C23C, B23K, H01L]
2013/0097,840 EDGE SEAL FOR LOWER ELECTRODE ASSEMBLY Oct 20, 11 Apr 25, 13 [B23P, H01L]
2013/0098,554 WINDOW AND MOUNTING ARRANGEMENT FOR TWIST-AND-LOCK GAS INJECTOR ASSEMBLY OF INDUCTIVELY COUPLED PLASMA CHAMBER Oct 25, 11 Apr 25, 13 [C23F]
2013/0100,278 AUTOMATED BUBBLE DETECTION APPARATUS AND METHOD Oct 19, 11 Apr 25, 13 [H04N]
2013/0102,156 COMPONENTS OF PLASMA PROCESSING CHAMBERS HAVING TEXTURED PLASMA RESISTANT COATINGS Sep 24, 12 Apr 25, 13 [C23C, B05D, B32B, H01L, B05B]
2013/0093,443 METHOD AND APPARATUS FOR DIAGNOSING STATUS OF PARTS IN REAL TIME IN PLASMA PROCESSING EQUIPMENT Dec 06, 12 Apr 18, 13 [G01N]
2013/0095,666 PLASMA CONFINEMENT RINGS INCLUDING RF ABSORBING MATERIAL FOR REDUCING POLYMER DEPOSITION Dec 06, 12 Apr 18, 13 [H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8,430,970 Methods for preventing corrosion of plasma-exposed yttria-coated constituents Aug 09, 10 Apr 30, 13 [B08B]
8,431,461 Silicon nitride dry trim without top pulldown Dec 16, 11 Apr 30, 13 [H01L]
8,425,682 High strip rate downstream chamber Sep 21, 12 Apr 23, 13 [C23F, C23C, H01L]
8,418,649 Composite showerhead electrode assembly for a plasma processing apparatus Dec 17, 08 Apr 16, 13 [C23F, C23C, H01L]
8,419,917 Electroplating head and method for operating the same Jun 10, 09 Apr 16, 13 [C25D]
8,419,959 Clamped monolithic showerhead electrode Sep 17, 10 Apr 16, 13 [C23F, H01L, C03C]
8,414,719 Clamped monolithic showerhead electrode Jun 19, 12 Apr 09, 13 [H01L, B31B]
8,414,790 Bevel plasma treatment to enhance wet edge clean May 05, 10 Apr 09, 13 [C03C]
8,410,393 Apparatus and method for temperature control of a semiconductor substrate support May 24, 10 Apr 02, 13 [B23K]
8,403,727 Pre-planarization system and method Mar 31, 04 Mar 26, 13 [B24B]

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Top Inventors for This Owner

Inventor Name Address Patent #
Dhindsa Rajinder
San Jose, US
143
Dordi Yezdi
Palo Alto, US
84
Redeker Fred C
Fremont, US
78
de Larios John M
Palo Alto, US
76
Fischer Andreas
Castro Valley, US
76
Boyd John M
Atascadero, US
74
Sadjadi S M Reza
Saratoga, US
74
Korolik Mikhail
San Jose, US
73
Ravkin Michael
Sunnyvale, US
71
Bailey, III Andrew D
Pleasanton, US
68
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