LAM RESEARCH CORPORATION

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 1053 38
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 448 3
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 270 16
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 246 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 209 3
 
 
H05H PLASMA TECHNIQUE 100 3
 
 
B44C PRODUCING DECORATIVE EFFECTS 73 4
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 69 360
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 59 104
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 50 44
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0073,815 METHOD FOR A NON-AQUEOUS ELECTROLESS POLYOL DEPOSITION OF METAL OR METAL ALLOY IN FEATURES OF A SUBSTRATE Sep 10, 15 Mar 16, 17 [C23C, B05D]
2017/0073,832 DURABLE LOW CURE TEMPERATURE HYDROPHOBIC COATING IN ELECTROPLATING CUP ASSEMBLY Jan 22, 16 Mar 16, 17 [C25D]
2017/0074,646 METHOD FOR TREATING A NONHOMOGENOUS SURFACE Sep 15, 15 Mar 16, 17 [G01B, H01J]
2017/0076,916 CYCLE-AVERAGED FREQUENCY TUNING FOR LOW POWER VOLTAGE MODE OPERATION Sep 15, 15 Mar 16, 17 [H01J, H01L]
2017/0076,921 Metrology Methods to Detect Plasma in Wafer Cavity and Use of the Metrology for Station-to-Station and Tool-to-Tool Matching Sep 15, 15 Mar 16, 17 [C23C, H01J, H01L]
2017/0076,955 TECHNIQUE TO DEPOSIT SIDEWALL PASSIVATION FOR HIGH ASPECT RATIO CYLINDER ETCH Nov 29, 16 Mar 16, 17 [C23C, H01J, H01L]
2017/0076,957 SYSTEMS AND METHODS FOR PERFORMING IN-SITU DEPOSITION OF SIDEWALL IMAGE TRANSFER SPACERS Sep 11, 15 Mar 16, 17 [H01J, H01L]
2017/0078,238 Social Network Service for Semiconductor Manufacturing Equipment and Users Sep 11, 15 Mar 16, 17 [H04L, H01L, G01M]
2017/0066,045 METHOD OF CASTING INTERNAL FEATURES Sep 03, 15 Mar 09, 17 [B22C, B22D]
2017/0069,462 ALE SMOOTHNESS: IN AND OUTSIDE SEMICONDUCTOR INDUSTRY Aug 31, 16 Mar 09, 17 [C23F, H01J, H01L]
2017/0056,994 LIQUID PHASE BONDING OF A SILICON OR SILICON CARBIDE COMPONENT TO ANOTHER SILICON OR SILICON CARBIDE COMPONENT Aug 28, 15 Mar 02, 17 [B23K, C22C]
2017/0057,028 MONOLITHIC MANIFOLD MASK AND SUBSTRATE CONCEPTS Sep 02, 15 Mar 02, 17 [B23P]
2017/0058,417 EDGE FLOW ELEMENT FOR ELECTROPLATING APPARATUS Oct 27, 15 Mar 02, 17 [C25D]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9601319 Systems and methods for eliminating flourine residue in a substrate processing chamber using a plasma-based process Jan 07, 16 Mar 21, 17 [C23C, B08B, H01J, H01L]
9601693 Method for encapsulating a chalcogenide material Nov 06, 15 Mar 21, 17 [H01L]
9594105 Cable power loss determination for virtual metrology Jan 10, 14 Mar 14, 17 [G01R]
9595424 Impedance matching circuit for operation with a kilohertz RF generator and a megahertz RF generator to control plasma processes Mar 02, 15 Mar 14, 17 [H03H, H01F, H01J]
9595452 Residue free oxide etch May 27, 15 Mar 14, 17 [H01L]
9595470 Methods of preparing tungsten and tungsten nitride thin films using tungsten chloride precursor May 04, 15 Mar 14, 17 [C23C, H01L]
9596744 Radio frequency generator having multiple mutually exclusive oscillators for use in plasma processing Mar 31, 15 Mar 14, 17 [H05H, H01J]
9589790 Method of depositing ammonia free and chlorine free conformal silicon nitride film Nov 24, 14 Mar 07, 17 [C23C, H01L]
9589799 High selectivity and low stress carbon hardmask by pulsed low frequency RF power Apr 08, 14 Mar 07, 17 [C23C, H01L]
9589808 Method for depositing extremely low resistivity tungsten Dec 19, 13 Mar 07, 17 [C23C, H01L]
9589853 Method of planarizing an upper surface of a semiconductor substrate in a plasma etch chamber Jul 22, 14 Mar 07, 17 [H01L]
9580360 Monolithic ceramic component of gas delivery system and method of making and use thereof Apr 01, 15 Feb 28, 17 [C04B, C23C, B32B, H01J, B33Y, B28B]
9583316 Inert-dominant pulsing in plasma processing systems Dec 10, 15 Feb 28, 17 [H05H, H01J, C03C]
9583357 Systems and methods for reverse pulsing Apr 26, 16 Feb 28, 17 [H01L]
9583377 Installation fixture for elastomer bands Dec 17, 13 Feb 28, 17 [B23Q, H01L]
9583386 Interlevel conductor pre-fill utilizing selective barrier deposition Oct 02, 15 Feb 28, 17 [C23C, H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0148,813 GAS INJECTION METHOD FOR UNIFORMLY PROCESSING A SEMICONDUCTOR SUBSTRATE IN A SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS ABAN Nov 25, 14 May 26, 16 [H01L]
2016/0079,100 VACUUM CARRIER INTERFACE HAVING A SWITCHABLE REDUCED CAPACITY AIRLOCK CHAMBER ABAN Sep 17, 14 Mar 17, 16 [C23C, H01L, B25J]
2015/0376,792 ATMOSPHERIC PLASMA APPARATUS FOR SEMICONDUCTOR PROCESSING ABAN Jun 30, 14 Dec 31, 15 [C23C, H01L, C25D]
2015/0299,882 NICKEL ELECTROPLATING SYSTEMS HAVING A GRAIN REFINER RELEASING DEVICE ABAN Apr 18, 14 Oct 22, 15 [H01L, C25D]
2015/0225,679 PROCESSES AND SOLUTIONS FOR SUBSTRATE CLEANING AND ELECTROLESS DEPOSITION ABAN Apr 17, 15 Aug 13, 15 [C23C, C11D, H01L]
2015/0155,176 SIDEWALL HEIGHT NONUNIFORMITY REDUCTION FOR SIDEWALL IMAGE TRANSFER PROCESSES ABAN Dec 03, 13 Jun 04, 15 [H01L]
2015/0136,171 LIQUID OR VAPOR INJECTION PLASMA ASHING SYSTEMS AND METHODS ABAN Nov 18, 13 May 21, 15 [H01J, H01L]
2015/0079,786 METHOD AND SOLUTION FOR CLEANING METAL RESIDUE ABAN Sep 17, 13 Mar 19, 15 [C09K, H01L]
2015/0040,941 Method and Apparatus for Cleaning A Semiconductor Substrate ABAN Aug 07, 13 Feb 12, 15 [H01L]
2015/0040,947 Method and Systems for Cleaning A Substrate ABAN Aug 07, 13 Feb 12, 15 [H01L]
2015/0037,979 CONFORMAL SIDEWALL PASSIVATION ABAN Aug 02, 13 Feb 05, 15 [H01L]
2014/0367,042 SYSTEMS FOR AUTOMATICALLY CHARACTERIZING A PLASMA ABAN Aug 19, 14 Dec 18, 14 [H01J, H01L]
2014/0332,037 Controls of Ambient Environment During Wafer Drying Using Proximity Head ABAN May 28, 14 Nov 13, 14 [H01L]
2014/0261,535 Standing Wave Generation in Holes to Enhance Cleaning in the Holes in Liquid Sonification Cleaning Systems ABAN Mar 13, 13 Sep 18, 14 [B08B]
2014/0263,179 TUNING SYSTEM AND METHOD FOR PLASMA-BASED SUBSTRATE PROCESSING SYSTEMS ABAN Mar 15, 13 Sep 18, 14 [H01J, H01P]
2014/0202,503 METHOD AND SYSTEM FOR UNIFORMLY APPLYING A MULTI-PHASE CLEANING SOLUTION TO A SUBSTRATE ABAN Mar 25, 14 Jul 24, 14 [H01L]
2014/0179,097 DEPOSITION APPARATUS AND METHOD ABAN Dec 21, 12 Jun 26, 14 [H01L]
2014/0179,106 IN-SITU METAL RESIDUE CLEAN ABAN Dec 21, 12 Jun 26, 14 [H01L]
2014/0170,780 Method of Low-K Dielectric Film Repair ABAN Feb 24, 14 Jun 19, 14 [H01L]
2014/0158,167 METHOD AND APPARATUS FOR CLEANING A SUBSTRATE USING NON-NEWTONIAN FLUIDS ABAN Feb 11, 14 Jun 12, 14 [H01L]

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