LAM RESEARCH CORPORATION

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Technologies

Intl Class Technology MATTERS Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 948 39
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 392 3
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 250 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 208 3
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 191 25
 
 
H05H PLASMA TECHNIQUE 104 3
 
 
B44C PRODUCING DECORATIVE EFFECTS 72 4
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 67 340
 
 
G01R MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES 54 93
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 48 43
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2016/0108,523 MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHNIQUES AND USE CASES THEREFOR Oct 15, 15 Apr 21, 16 [B24B, C23C]
2016/0109,498 Identifying Components Associated With A Fault In A Plasma System Sep 15, 15 Apr 21, 16 [G01R, H01R, C23C, H01J]
2016/0109,863 System, Method and Apparatus for Improving Accuracy of RF Transmission Models for Selected Portions of an RF Transmission Path Oct 20, 14 Apr 21, 16 [G05B, G06F]
2016/0111,257 SUBSTRATE FOR MOUNTING GAS SUPPLY COMPONENTS AND METHODS THEREOF Oct 17, 14 Apr 21, 16 [B32B, H01J, H01L, F17D]
2016/0111,258 GAS SUPPLY DELIVERY ARRANGEMENT INCLUDING A GAS SPLITTER FOR TUNABLE GAS FLOW CONTROL Oct 19, 15 Apr 21, 16 [C23C, H01J, H01L]
2016/0111,261 System and Method for Detecting a Process Point in Multi-Mode Pulse Processes Oct 24, 14 Apr 21, 16 [H01J, H01L]
2016/0111,288 LOW-K DAMAGE REPAIR AND PORE SEALING AGENTS WITH PHOTOSENSITIVE END GROUPS Oct 17, 14 Apr 21, 16 [H01L]
2016/0111,294 USE OF ION BEAM ETCHING TO GENERATE GATE-ALL-AROUND STRUCTURE Oct 21, 14 Apr 21, 16 [H01J, H01L]
2016/0111,307 INTEGRATED SUBSTRATE DEFECT DETECTION USING PRECISION COATING Oct 20, 14 Apr 21, 16 [C23C, H01J, H01L, G01N]
2016/0111,309 EQUIPMENT FRONT END MODULE FOR TRANSFERRING WAFERS AND METHOD OF TRANSFERRING WAFERS Oct 17, 14 Apr 21, 16 [H01L]
2016/0111,314 ESC ASSEMBLY INCLUDING AN ELECTRICALLY CONDUCTIVE GASKET FOR UNIFORM RF POWER DELIVERY THERETHROUGH Oct 17, 14 Apr 21, 16 [H01J, H01L]
2016/0111,342 METHOD AND APPARATUS FOR CHARACTERIZING METAL OXIDE REDUCTION Oct 15, 15 Apr 21, 16 [C23C, H01J, H01L, G01N]
2016/0111,344 METHOD AND APPARATUS FOR CHARACTERIZING METAL OXIDE REDUCTION Mar 13, 15 Apr 21, 16 [C23C, H01J, H01L]
2016/0111,515 AIR GAP SPACER INTEGRATION FOR IMPROVED FIN DEVICE PERFORMANCE Oct 15, 15 Apr 21, 16 [H01L]
2016/0112,390 Method, Apparatus, and System for Establishing a Virtual Tether between a Mobile Device and a Semiconductor Processing Tool Oct 17, 14 Apr 21, 16 [H04L, H04W]
2016/0102,398 INTERNALLY HEATED POROUS FILTER FOR DEFECT REDUCTION WITH LIQUID OR SOLID PRECURSORS Oct 07, 15 Apr 14, 16 [C23C, H01J, B01D]
2016/0103,088 METHOD AND APPARATUS FOR DIAGNOSING STATUS OF PARTS IN REAL TIME IN PLASMA PROCESSING EQUIPMENT Dec 15, 15 Apr 14, 16 [C23C, G01N]
2016/0103,445 MOBILE CONNECTIVITY AND CONTROL OF SEMICONDUCTOR MANUFACTURING EQUIPMENT Oct 06, 15 Apr 14, 16 [G05B]
2016/0104,128 MOBILE DEVICE USER INTERFACE FOR SUPPORTING SERVICE MAINTENANCE AND TRACKING ACTIVITIES IN SEMICONDUCTOR TOOL Oct 06, 15 Apr 14, 16 [G06Q]
2016/0104,630 NOVEL METHOD TO ETCH COPPER BARRIER FILM Dec 22, 14 Apr 14, 16 [H01L]
2016/0097,127 SYSTEMS AND METHODS FOR MEASURING ENTRAINED VAPOR Oct 01, 15 Apr 07, 16 [C23C, F15D, G05D]
2016/0097,590 SYSTEMS AND METHODS FOR DRYING HIGH ASPECT RATIO STRUCTURES WITHOUT COLLAPSE USING SACRIFICIAL BRACING MATERIAL THAT IS REMOVED USING HYDROGEN-RICH PLASMA Oct 06, 14 Apr 07, 16 [F26B]
2016/0099,160 METHOD FOR COLLAPSE-FREE DRYING OF HIGH ASPECT RATIO STRUCTURES Jun 04, 15 Apr 07, 16 [H01L]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9,320,387 Sulfur doped carbon hard masks May 05, 14 Apr 26, 16 [A47J, C11D, H01L]
9,321,000 Airflow management for low particulate count in a process tool Oct 27, 14 Apr 26, 16 [H01L, B01D]
9,322,795 Electrode for use in measuring dielectric properties of parts Apr 22, 13 Apr 26, 16 [G01R, G01N]
9,324,589 Multiplexed heater array using AC drive for semiconductor processing Feb 28, 12 Apr 26, 16 [H05B, H01L]
9,314,854 Ductile mode drilling methods for brittle components of plasma processing apparatuses Jan 30, 13 Apr 19, 16 [H01B, B23B, H01J, B28D]
9,318,349 Plasma chamber top piece assembly Jul 24, 13 Apr 19, 16 [C23F, C23C, H01J, C03C, H01L]
9,320,126 Determining a value of a variable on an RF transmission model Dec 17, 12 Apr 19, 16 [G01R, H03H, G06F, H01J, H05H, H01P]
9,320,127 Tuning a parameter associated with plasma impedance Mar 30, 15 Apr 19, 16 [H01J, H05H]
9,312,832 High power filter with single adjust for multiple channels Jul 23, 14 Apr 12, 16 [H03H, H03G, H04B]
9,304,396 PECVD films for EUV lithography Feb 20, 14 Apr 05, 16 [G03F, H01L]
9,305,750 Adjusting current ratios in inductively coupled plasma processing systems Mar 19, 10 Apr 05, 16 [C23C, H05H, H01J, H01L]
9,307,578 System and method for monitoring temperatures of and controlling multiplexed heater array Aug 16, 12 Apr 05, 16 [H05B]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2015/0155,176 SIDEWALL HEIGHT NONUNIFORMITY REDUCTION FOR SIDEWALL IMAGE TRANSFER PROCESSES ABAN Dec 03, 13 Jun 04, 15 [H01L]
2015/0037,979 CONFORMAL SIDEWALL PASSIVATION ABAN Aug 02, 13 Feb 05, 15 [H01L]
2014/0332,037 Controls of Ambient Environment During Wafer Drying Using Proximity Head ABAN May 28, 14 Nov 13, 14 [H01L]
2014/0261,535 Standing Wave Generation in Holes to Enhance Cleaning in the Holes in Liquid Sonification Cleaning Systems ABAN Mar 13, 13 Sep 18, 14 [B08B]
2014/0263,179 TUNING SYSTEM AND METHOD FOR PLASMA-BASED SUBSTRATE PROCESSING SYSTEMS ABAN Mar 15, 13 Sep 18, 14 [H01J, H01P]
2014/0179,097 DEPOSITION APPARATUS AND METHOD ABAN Dec 21, 12 Jun 26, 14 [H01L]
2014/0127,911 PALLADIUM PLATED ALUMINUM COMPONENT OF A PLASMA PROCESSING CHAMBER AND METHOD OF MANUFACTURE THEREOF ABAN Nov 07, 12 May 08, 14 [H01L, C25D]
2014/0113,453 TUNGSTEN CARBIDE COATED METAL COMPONENT OF A PLASMA REACTOR CHAMBER AND METHOD OF COATING ABAN Oct 24, 12 Apr 24, 14 [C23C, B32B, H01L]
2014/0083,463 SYSTEM AND METHOD FOR MONITORING WAFER STRESS ABAN Sep 21, 12 Mar 27, 14 [B08B]
2014/0076,713 Edge Ramping ABAN Oct 24, 12 Mar 20, 14 [H05H]
2014/0059,789 Apparatus for Cleaning a Semiconductor Substrate ABAN Oct 16, 13 Mar 06, 14 [H01L]
2014/0051,255 COPPER DISCOLORATION PREVENTION FOLLOWING BEVEL ETCH PROCESS ABAN Oct 28, 13 Feb 20, 14 [H01L]
2014/0041,581 Single Substrate Processing Head For Particle Removal Using Low Viscosity Fluid ABAN Oct 11, 13 Feb 13, 14 [H01L]
2014/0034,096 Acoustic Assisted Single Wafer Wet Clean For Semiconductor Wafer Process ABAN Oct 09, 13 Feb 06, 14 [H01L]
2014/0030,893 METHOD FOR SHRINK AND TUNE TRENCH/VIA CD ABAN Jul 24, 12 Jan 30, 14 [H01L]
2013/0312,913 ARRANGEMENT FOR DEPOSITING BEVEL PROTECTIVE FILM ABAN Aug 05, 13 Nov 28, 13 [H01L]
2013/0267,097 METHOD AND APPARATUS FOR FORMING FEATURES WITH PLASMA PRE-ETCH TREATMENT ON PHOTORESIST ABAN Apr 05, 12 Oct 10, 13 [C23F, H01L]
2013/0264,309 ACOUSTIC ENERGY UTILIZATION IN PLASMA PROCESSING ABAN Apr 05, 12 Oct 10, 13 [B44C, H05H]
2013/0240,484 ELECTROLESS COPPER ALLOY CAPPING ABAN Mar 19, 12 Sep 19, 13 [C23C, B05D]
2013/0203,259 PRESSURE CONTROL VALVE ASSEMBLY OF PLASMA PROCESSING CHAMBER AND RAPID ALTERNATING PROCESS ABAN Feb 07, 12 Aug 08, 13 [E21B, H01L]

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