LAM RESEARCH CORPORATION

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Intl Class Technology # of Patents/ App Rank in Class
 
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 723 50
 
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 266 4
 
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 257 2
 
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 201 3
 
 
H05H PLASMA TECHNIQUE 115 3
 
 
B44C PRODUCING DECORATIVE EFFECTS 72 3
 
 
G06F ELECTRIC DIGITAL DATA PROCESSING 62 307
 
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 49 46
 
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 49 68
 
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 44 38
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Top Patents (by citation)

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2014/0195,033 Control of Etch Rate Using Modeling, Feedback and Impedance Match Jan 10, 14 Jul 10, 14 [G05B]
2014/0182,689 GAS SUPPLY SYSTEMS FOR SUBSTRATE PROCESSING CHAMBERS AND METHODS THEREFOR Dec 31, 12 Jul 03, 14 [H01L]
2014/0187,049 SHOWERHEAD ELECTRODE ASSEMBLY WITH GAS FLOW MODIFICATION FOR EXTENDED ELECTRODE LIFE Mar 05, 14 Jul 03, 14 [H01L]
2014/0174,661 PLASMA PROCESSING CHAMBER FOR BEVEL EDGE PROCESSING Feb 25, 14 Jun 26, 14 [H01J]
2014/0174,663 PLASMA STABILIZATION METHOD AND PLASMA APPARATUS Feb 27, 14 Jun 26, 14 [H01J]
2014/0175,617 OXYGEN-CONTAINING CERAMIC HARD MASKS AND ASSOCIATED WET-CLEANS Dec 12, 13 Jun 26, 14 [H01L]
2014/0179,097 DEPOSITION APPARATUS AND METHOD Dec 21, 12 Jun 26, 14 [H01L]
2014/0179,106 IN-SITU METAL RESIDUE CLEAN Dec 21, 12 Jun 26, 14 [H01L]
2014/0167,228 ETCH PROCESS WITH PRE-ETCH TRANSIENT CONDITIONING Dec 14, 12 Jun 19, 14 [H01L]
2014/0167,613 Computation of Statistics for Statistical Data Decimation Nov 21, 13 Jun 19, 14 [H05H]

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8,780,522 Capacitively-coupled electrostatic (CCE) probe arrangement for detecting dechucking in a plasma processing chamber and methods thereof Jul 07, 09 Jul 15, 14 [H01L]
8,771,804 Processes and systems for engineering a copper surface for selective metal deposition Aug 30, 06 Jul 08, 14 [C23C, B05D, H01L]
8,772,171 Gas switching section including valves having different flow coefficients for gas distribution system Oct 31, 12 Jul 08, 14 [H01L]
8,764,907 Servicing a plasma processing system with a robot Sep 29, 09 Jul 01, 14 [B23P]
8,757,177 Multi-stage substrate cleaning method and apparatus Nov 06, 12 Jun 24, 14 [H01L]
8,757,178 Method and apparatus for removing photoresist Sep 22, 11 Jun 24, 14 [B08B, H01L]
8,758,522 Method and apparatus for removing contaminants from substrate May 25, 11 Jun 24, 14 [B08B]
8,753,804 Line width roughness improvement with noble gas plasma Feb 18, 09 Jun 17, 14 [G03F]
8,755,204 RF isolation for power circuitry Oct 21, 09 Jun 17, 14 [H02M]
8,747,559 Substrate support having dynamic temperature control Jun 24, 11 Jun 10, 14 [C23F, C23C, H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Filing Date Issue/Pub Date Intl Class
2012/0101,917 BUSINESS MOBILE COMMUNICATION SYSTEM Oct 03, 11 Apr 26, 12 [G06Q]
2012/0024,314 PLASMA MEDIATED ASHING PROCESSES Jul 27, 10 Feb 02, 12 [B08B]
2011/0306,203 INTERCONNECT STRUCTURE AND METHOD OF MANUFACTURING A DAMASCENE STRUCTURE Aug 25, 11 Dec 15, 11 [H01L]
2011/0271,905 Methods and System for Processing a Microelectronic Topography Jul 19, 11 Nov 10, 11 [B05C]
2011/0226,280 PLASMA MEDIATED ASHING PROCESSES May 27, 11 Sep 22, 11 [C23F, B08B]
2011/0136,346 Substantially Non-Oxidizing Plasma Treatment Devices and Processes Dec 04, 09 Jun 09, 11 [B08B, G03F, H01L]
2011/0060,442 METHODS AND ARRANGEMENT FOR DETECTING A WAFER-RELEASED EVENT WITHIN A PLASMA PROCESSING CHAMBER Sep 10, 09 Mar 10, 11 [G06F]
2011/0036,500 WIDE AREA RADIO FREQUENCY PLASMA APPARATUS FOR PROCESSING MULTIPLE SUBSTRATES Oct 22, 10 Feb 17, 11 [H01Q, H01L]
2011/0014,489 Method for Strengthening Adhesion Between Dielectric Layers Formed Adjacent to Metal Layers Sep 24, 10 Jan 20, 11 [B05C, B05D, B32B]
2010/0184,301 Methods for Preventing Precipitation of Etch Byproducts During an Etch Process and/or Subsequent Rinse Process Jan 20, 09 Jul 22, 10 [H01L]
2010/0130,017 FRONT END OF LINE PLASMA MEDIATED ASHING PROCESSES AND APPARATUS Nov 21, 08 May 27, 10 [H01L]
2010/0108,491 METHODS FOR REMOVING A METAL OXIDE FROM A SUBSTRATE Jan 07, 10 May 06, 10 [H05F]
2010/0062,164 Methods and Solutions for Preventing the Formation of Metal Particulate Defect Matter Upon a Substrate After a Plating Process Sep 08, 08 Mar 11, 10 [C09K, B05D, C25D]
2010/0015,731 Method of low-k dielectric film repair Feb 20, 07 Jan 21, 10 [C23C, H01L]
2009/0288,688 NON-CORROSIVE CHEMICAL RINSE SYSTEM Mar 11, 06 Nov 26, 09 [C09K, B08B]
2009/0291,562 HELIUM DESCUMMING May 20, 08 Nov 26, 09 [B08B, H01L]
2009/0277,871 PLASMA MEDIATED ASHING PROCESSES THAT INCLUDE FORMATION OF A PROTECTIVE LAYER BEFORE AND/OR DURING THE PLASMA MEDIATED ASHING PROCESS Mar 05, 09 Nov 12, 09 [C23F]
2009/0211,596 Method of post etch polymer residue removal Jul 11, 07 Aug 27, 09 [B08B]
2009/0170,334 Copper Discoloration Prevention Following Bevel Etch Process Dec 22, 08 Jul 02, 09 [H01L]
2009/0120,583 METHODS OF MAKING GAS DISTRIBUTION MEMBERS FOR PLASMA PROCESSING APPARATUSES Jan 07, 09 May 14, 09 [C23F, C23C]

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