LEICA MICROSYSTEMS SEMICONDUCTOR GMBH

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G01N INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES 10196
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS495
 
  
 
G06K RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS 3195
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 196
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 1127
 
  
 
H02P CONTROL OR REGULATION OF ELECTRIC MOTORS, GENERATORS, OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS 186
 
  
 
H04N PICTORIAL COMMUNICATION, e.g. TELEVISION 1241

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
7417719 Method, device and software for the optical inspection of a semi-conductor substrateJan 13, 04Aug 26, 08[G01N]
7180585 Apparatus for wafer inspectionMay 17, 04Feb 20, 07[G01N]
7152488 System operating unitMay 26, 04Dec 26, 06[G01N]
7081963 Substrate holder, and use of the substrate holder in a highly accurate measuring instrumentMar 30, 04Jul 25, 06[G01B]
7005638 Apparatus and method for reducing the electron-beam-induced deposition of contamination productsMar 08, 04Feb 28, 06[H01J]
6984947 Apparatus and method for adjusting components of an optical or mechanical systemJul 17, 02Jan 10, 06[H02P]
6920249 Method and measuring instrument for determining the position of an edge of a pattern element on a substrateSep 24, 01Jul 19, 05[G06K]
6825939 Method and measuring arrangement for detecting an objectJul 02, 02Nov 30, 04[G06K]
6816253 Substrate holder, and use of the substrate holder in a highly accurate measuring instrumentOct 11, 00Nov 09, 04[G01N, G03B, G01B]
6816263 Interferometric measurement apparatus for wavelength calibrationJul 05, 02Nov 09, 04[G01B]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2006/0240,580 Method for evaluating reproduced images of wafersAbandonedMay 11, 04Oct 26, 06[H01L, G01R]
2006/0103,838 Method for inspecting a waferAbandonedOct 19, 05May 18, 06[G01N]
2006/0097,438 Adapter apparatus for a substrate workstationAbandonedNov 03, 05May 11, 06[B25B]
6960755 Contact sensor, and apparatus for protecting a protruding componentExpiredJan 16, 02Nov 01, 05[H03K]
2005/0225,642 Apparatus and method for the determination of positioning coordinates for semiconductor substratesAbandonedMar 18, 05Oct 13, 05[H04N]
6924900 Method and microscope for detection of a specimenExpiredJul 02, 02Aug 02, 05[G01B]
2005/0133,073 Substrate carrier for receiving and retaining in position a planar elementAbandonedDec 15, 04Jun 23, 05[B66C]
2005/0031,189 Method for the inspection of features on semiconductor substratesAbandonedJul 09, 04Feb 10, 05[G06K]
2005/0008,217 Method for defect segmentation in features on semiconductor substratesAbandonedJul 06, 04Jan 13, 05[G06K]
2004/0165,764 Method and apparatus for examining semiconductor wafers in a context of die/SAW designAbandonedFeb 05, 04Aug 26, 04[G06K]
2004/0027,580 Method for automatic determination of optical parameters of a layer stack and computer programAbandonedJul 18, 03Feb 12, 04[G01B]
2003/0095,252 Method and apparatus for defect analysis of wafersAbandonedNov 20, 02May 22, 03[G01N]
6549648 Method for determining a position of a structural element on a substrateExpiredFeb 02, 99Apr 15, 03[G06K]
2002/0196,331 Method for reading out a detection chip of an electronic cameraAbandonedJun 14, 02Dec 26, 02[H04N]
2002/0071,745 Apparatus and method for grasping and transporting wafersAbandonedDec 11, 01Jun 13, 02[B65G]
6377870 Device and method for delivering various transparent substrates into a high-precision measuring instrumentExpiredOct 11, 00Apr 23, 02[G06F]
2002/0024,669 Spectral ellipsometer having a refractive illuminating optical systemAbandonedJun 29, 01Feb 28, 02[G01J]

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