Litel Instruments
Patent Owner
Stats
- 30 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Feb 27, 2018 most recent publication
Details
- 30 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 1,077 Total Citation Count
- Nov 05, 1990 Earliest Filing
- 24 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9483816 Method and system for high accuracy and reliability registration of multi modal imagerySep 02, 14Nov 01, 16[G06T, G06K]
9074848 Precision geographic location system and method utilizing an image productApr 10, 12Jul 07, 15[F41G, G01S, G01C]
7871002 Method and apparatus for self-referenced wafer stage positional error mappingApr 06, 06Jan 18, 11[G06K]
7871004 Method and apparatus for self-referenced wafer stage positional error mappingAug 15, 07Jan 18, 11[G06K]
7846624 Systems and methods for determination of focus and telecentricity, amelioration of metrology induced effects and application to determination of precision bossung curvesFeb 20, 07Dec 07, 10[G03C, G03F]
7697138 Method and apparatus for determination of source polarization matrixJan 19, 06Apr 13, 10[G01J]
7295291 Apparatus and process for the determination of static lens field curvatureMay 12, 04Nov 13, 07[G01B]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
7671979 Apparatus and process for determination of dynamic lens field curvatureExpiredApr 28, 04Mar 02, 10[G01B]
7598006 Method and apparatus for embedded encoding of overlay data ordering in an in-situ interferometerExpiredDec 08, 05Oct 06, 09[G03F]
7544449 Method and apparatus for measurement of crossfield chromatic response of projection imaging systemsExpiredNov 14, 05Jun 09, 09[G03C, G03F]
7442951 Reticle for use in rapid determination of average intrafield scanning distortion having transmissivity of a complementary alignment attribute being different than the transmissivity of at least one alignment attributeExpiredApr 04, 07Oct 28, 08[G01N]
7337552 Method and apparatus for registration with integral alignment opticsExpiredAug 24, 04Mar 04, 08[G01D]
2006/0209,410 Method and apparatus for compensation or amelioration of lens field curvature and other imaging defects by utilizing a multi-wavelength setting illumination sourceAbandonedMar 17, 06Sep 21, 06[G02B]
2006/0190,915 Machine specific and machine group correction of masks based on machine subsystem performance parametersAbandonedJan 19, 06Aug 24, 06[G06F]
2006/0164,618 Method and apparatus for measurement of exit pupil telecentricity and source boresightingAbandonedJan 26, 06Jul 27, 06[G03B]
2005/0285,056 Process for manufacture of semiconductor chips utilizing a posteriori corrections to machine control system and settingsAbandonedJun 10, 05Dec 29, 05[G01N]
6975382 Method and apparatus for self-referenced dynamic step and scan intra-field lens distortionExpiredJun 15, 04Dec 13, 05[G03B]
2005/0240,895 Method of emulation of lithographic projection toolsAbandonedApr 20, 05Oct 27, 05[G06F, G06G]
6906303 Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortionExpiredSep 20, 02Jun 14, 05[H01L]
6906780 Method and apparatus for self-referenced dynamic step and scan intra-field lens distortionExpiredSep 20, 02Jun 14, 05[G03B]
6899982 Method and apparatus for proper ordering of registration dataExpiredMar 05, 04May 31, 05[G01B, G03F]
6833221 Method and apparatus for proper ordering of registration dataExpiredJan 04, 02Dec 21, 04[G03F]
6734971 Method and apparatus for self-referenced wafer stage positional error mappingExpiredJun 26, 01May 11, 04[G01B]
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