Litel Instruments

Patent Owner

Watch Compare Add to Portfolio

Stats

Details

Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 1186
 
  
 
G01B MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS1089
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 4100
 
  
 
G01C MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY 3102
 
  
 
G03C PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES 343
 
  
 
G06K RECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS 3195
 
  
 
G01J MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED, VISIBLE OR ULTRA-VIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY 276
 
  
 
G01S RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES2107
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 2360
 
  
 
F41G WEAPON SIGHTS; AIMING 128

Top Patents (by citation)

Upgrade to the Professional Level to View Top Patents for this Owner. Learn More

Recent Publications

  • No Recent Publications to Display

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9903719 System and method for advanced navigationSep 02, 14Feb 27, 18[G06T, G08G, G01C, G01S]
9483816 Method and system for high accuracy and reliability registration of multi modal imagerySep 02, 14Nov 01, 16[G06T, G06K]
9074848 Precision geographic location system and method utilizing an image productApr 10, 12Jul 07, 15[F41G, G01S, G01C]
8786827 Method and apparatus for measurement of exit pupil transmittanceFeb 09, 10Jul 22, 14[G03B]
7871002 Method and apparatus for self-referenced wafer stage positional error mappingApr 06, 06Jan 18, 11[G06K]
7871004 Method and apparatus for self-referenced wafer stage positional error mappingAug 15, 07Jan 18, 11[G06K]
7846624 Systems and methods for determination of focus and telecentricity, amelioration of metrology induced effects and application to determination of precision bossung curvesFeb 20, 07Dec 07, 10[G03C, G03F]
7697138 Method and apparatus for determination of source polarization matrixJan 19, 06Apr 13, 10[G01J]
7688426 Method and apparatus for measurement of exit pupil transmittanceApr 13, 05Mar 30, 10[G03B]
7295291 Apparatus and process for the determination of static lens field curvatureMay 12, 04Nov 13, 07[G01B]

View all patents..

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
7671979 Apparatus and process for determination of dynamic lens field curvatureExpiredApr 28, 04Mar 02, 10[G01B]
7598006 Method and apparatus for embedded encoding of overlay data ordering in an in-situ interferometerExpiredDec 08, 05Oct 06, 09[G03F]
7544449 Method and apparatus for measurement of crossfield chromatic response of projection imaging systemsExpiredNov 14, 05Jun 09, 09[G03C, G03F]
7515250 In-situ interferometer arrangementExpiredSep 17, 07Apr 07, 09[G03B]
7442951 Reticle for use in rapid determination of average intrafield scanning distortion having transmissivity of a complementary alignment attribute being different than the transmissivity of at least one alignment attributeExpiredApr 04, 07Oct 28, 08[G01N]
7381503 Reference wafer calibration reticleExpiredApr 30, 07Jun 03, 08[G03F]
7337552 Method and apparatus for registration with integral alignment opticsExpiredAug 24, 04Mar 04, 08[G01D]
2006/0209,410 Method and apparatus for compensation or amelioration of lens field curvature and other imaging defects by utilizing a multi-wavelength setting illumination sourceAbandonedMar 17, 06Sep 21, 06[G02B]
2006/0190,915 Machine specific and machine group correction of masks based on machine subsystem performance parametersAbandonedJan 19, 06Aug 24, 06[G06F]
2006/0164,618 Method and apparatus for measurement of exit pupil telecentricity and source boresightingAbandonedJan 26, 06Jul 27, 06[G03B]
2005/0285,056 Process for manufacture of semiconductor chips utilizing a posteriori corrections to machine control system and settingsAbandonedJun 10, 05Dec 29, 05[G01N]
6975382 Method and apparatus for self-referenced dynamic step and scan intra-field lens distortionExpiredJun 15, 04Dec 13, 05[G03B]
6963390 In-situ interferometer arrangementExpiredJul 18, 03Nov 08, 05[G03B]
2005/0240,895 Method of emulation of lithographic projection toolsAbandonedApr 20, 05Oct 27, 05[G06F, G06G]
6906303 Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortionExpiredSep 20, 02Jun 14, 05[H01L]
6906780 Method and apparatus for self-referenced dynamic step and scan intra-field lens distortionExpiredSep 20, 02Jun 14, 05[G03B]
6899982 Method and apparatus for proper ordering of registration dataExpiredMar 05, 04May 31, 05[G01B, G03F]
6833221 Method and apparatus for proper ordering of registration dataExpiredJan 04, 02Dec 21, 04[G03F]
6741338 In-situ source metrology instrument and method of useExpiredOct 09, 01May 25, 04[G01J]
6734971 Method and apparatus for self-referenced wafer stage positional error mappingExpiredJun 26, 01May 11, 04[G01B]

View all patents..

Top Inventors for This Owner

Upgrade to the Professional Level to View Top Inventors for this Owner. Learn More

We are sorry but your current selection exceeds the maximum number of comparisons () for this membership level. Upgrade to our Level for up to -1 comparisons!

We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level. Upgrade to our Level for up to -1 portfolios!.