MERCOTRUST AKTIENGESELLSCHAFT, A CORP. OF LIECOTENSTEIN

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
4662754 Method for facilitating the alignment of a photomask with individual fields on the surfaces of a number of wafersExpiredDec 20, 85May 05, 87[G03B]
4621922 Device for the projection copying of masks onto a workpieceExpiredAug 10, 84Nov 11, 86[G03B]
4619524 Device for the projection copying of masksExpiredOct 02, 84Oct 28, 86[G03B]
4592648 Device for projection copying of masks onto a workpieceExpiredJan 23, 85Jun 03, 86[G03B]
4592650 Apparatus for projecting a pattern on a semiconductor substrateExpiredJan 23, 85Jun 03, 86[G03B]
4540277 Device for the projection printing of masks into a workpieceExpiredJun 24, 83Sep 10, 85[G03B]
4509852 Apparatus for the photolithographic manufacture of integrated circuit elementsExpiredAug 17, 82Apr 09, 85[G03B]
4496241 Process and device for relatively aligning the image and object surfaces in optical copying systemsExpiredMar 18, 83Jan 29, 85[G01B]
4461567 Method of and apparatus for the positioning of disk-shaped workpieces, particularly semiconductor wafersExpiredSep 28, 82Jul 24, 84[G03B]
4449650 Metering pump especially for volatile materialsExpiredNov 19, 81May 22, 84[B65D, B67D]
4432635 Temperature-controlled support for semiconductor waferExpiredMar 31, 82Feb 21, 84[G03B]
4431304 Apparatus for the projection copying of mask patterns on a workpieceExpiredNov 25, 81Feb 14, 84[G03B]
4405229 Method of projecting printing on semiconductor substrate and workpiece including such substrateExpiredMay 20, 81Sep 20, 83[G03B]
4379831 Process for transferring a pattern onto a semiconductor diskExpiredMay 21, 81Apr 12, 83[G03C, G03B]
4376581 Method of positioning disk-shaped workpieces, preferably semiconductor wafersExpiredDec 29, 80Mar 15, 83[G03B]
4362385 Process and arrangement for copying masks on a workpiece with arrangement for correction of alignment errorsExpiredOct 14, 80Dec 07, 82[G05B, G03B, G01B]
4357100 Arrangement for projection copying masks on to a work pieceExpiredJan 02, 80Nov 02, 82[G03B]
4355892 Method for the projection printingExpiredDec 18, 80Oct 26, 82[G03B]
4346164 Photolithographic method for the manufacture of integrated circuitsExpiredOct 06, 80Aug 24, 82[G03C]
4270649 Method for controlling operating processesExpiredDec 04, 78Jun 02, 81[B65G]

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