MICRO LITHOGRAPHY, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 1094
 
  
 
G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR 295
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 2360
 
  
 
B32B LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM1156
 
  
 
D04D TRIMMINGS; RIBBONS, TAPES, OR BANDS, NOT OTHERWISE PROVIDED FOR 14
 
  
 
G02B OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS 1204
 
  
 
G03C PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES 145

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
8968971 Pellicles with reduced particulatesMar 08, 13Mar 03, 15[G03F]
6841317 Vent for an optical pellicle systemAug 27, 02Jan 11, 05[G03F]
6594073 Antistatic optical pellicleMay 30, 01Jul 15, 03[G02B]
6586159 Method for using a coated fluoropolymer substrate pellicle in semiconductor fabricationJan 30, 01Jul 01, 03[G03C]
6582859 Dust cover for use in semiconductor fabricationJan 30, 01Jun 24, 03[G03F]
6573980 Removable optical pellicleJul 26, 01Jun 03, 03[G03B]
6566021 Fluoropolymer-coated photomasks for photolithographyJul 26, 01May 20, 03[G03F]
6280885 Dust cover comprising anti-reflective coatingAug 11, 99Aug 28, 01[G03F]
6190743 Photomask protection systemJul 06, 98Feb 20, 01[G03F]
5820950 Optical pellicle and packageOct 30, 96Oct 13, 98[G03F]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6103427 Pressure relieving pellicleExpiredApr 13, 93Aug 15, 00[G03F]
5061024 Amorphous fluoropolymer pellicle filmsExpiredSep 06, 89Oct 29, 91[G02B]
5042655 Pellicle packaging and handling systemExpiredSep 27, 89Aug 27, 91[B65D]
4880667 Photochromic plastic article and method for preparing sameExpiredOct 15, 87Nov 14, 89[B05D, D06D]
4470508 Dustfree packaging container and methodExpiredAug 19, 83Sep 11, 84[B65D]

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