Micronix Corporation
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Feb 02, 1988 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 218 Total Citation Count
- Nov 21, 1984 Earliest Filing
- 10 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
- No Technology to Display
Top Patents (by citation)
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Recent Publications
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Recent Patents
- No Recent Patents to Display
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
4708919 Process for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structureExpiredAug 02, 85Nov 24, 87[G21K, G03C, G03F]
4704033 Multiple wavelength linear zone plate alignment apparatus and methodExpiredMar 06, 86Nov 03, 87[G01B]
4696878 Additive process for manufacturing a mask for use in X-ray photolithography and the resulting maskExpiredAug 02, 85Sep 29, 87[G03F]
4680243 Method for producing a mask for use in X-ray photolithography and resulting structureExpiredAug 02, 85Jul 14, 87[G21K, G03F, C23F, B44C]
4671850 Mask using polyimide to support a patterned x-ray opaque layerExpiredAug 16, 85Jun 09, 87[C03C, H01L, C23F, B44C]
4668336 Process for making a mask used in x-ray photolithographyExpiredMay 23, 86May 26, 87[C03C, H01L, C23F, B44C]
Top Inventors for This Owner
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