NAWOTEC GMBH
Patent Owner
Stats
- 8 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- May 26, 2009 most recent publication
Details
- 8 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 238 Total Citation Count
- Jul 09, 1998 Earliest Filing
- 6 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
7537708 Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surfaceJul 02, 07May 26, 09[B44C]
7238294 Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surfaceMay 02, 03Jul 03, 07[C23F]
7232997 Apparatus and method for investigating or modifying a surface with a beam of charged particlesApr 14, 05Jun 19, 07[G01N]
6291139 Process for fabricating three-dimensional polymer layer structuresJul 09, 98Sep 18, 01[G03F]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2004/0173,759 Device, set and method for carrying a gas or a liquid to a surface through a tubeAbandonedJun 27, 03Sep 09, 04[G01N]
6232046 Process for improving the contrast in the structure of 3-dimensional surfacesExpiredSep 22, 98May 15, 01[G03F]
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