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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
5197089 Pin chuck for lithography systemExpiredMay 21, 90Mar 23, 93[G21K]
5165094 Partially constrained minimum energy state controllerExpiredMay 21, 90Nov 17, 92[G21K]
4980896 X-ray lithography systemExpiredNov 20, 89Dec 25, 90[H01S]
4969169 X-ray lithography systemExpiredJun 02, 88Nov 06, 90[G21K]
4896341 Long life X-ray source targetExpiredOct 13, 87Jan 23, 90[G21K]
4872189 Target structure for x-ray lithography systemExpiredAug 25, 87Oct 03, 89[H05H]
4870668 Gap sensing/adjustment apparatus and method for a lithography machineExpiredDec 30, 87Sep 26, 89[G21K]
4860328 Target positioning for minimum debrisExpiredAug 25, 87Aug 22, 89[G21K]
4837793 Mass limited targetExpiredAug 25, 87Jun 06, 89[G21K]
4734923 Lithographic system mask inspection deviceExpiredMay 19, 86Mar 29, 88[G21K]
4700371 Long life x-ray source targetExpiredNov 08, 84Oct 13, 87[G21I]
4692934 X-ray lithography systemExpiredNov 08, 84Sep 08, 87[G21K]

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