NIKON CORPORATION
Patent Owner
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- 72 6,839 total patents issued
- 4,414 Total Apps Published
- Jun 13, 2013 most recent publication
Details
- 6,839 Issued Patents
- 1,028 Issued in last 3 years
- 1,139 Published in last 3 years
- 72,795 Total Citation Count
- May 04, 1977 Earliest Filing
- 2,738 Expired/Abandoned/Withdrawn Patents
Technologies
Intl Class
Technology
# of Patents
Rank
Top Patents (by citation)
Patent #
Title
Filing Date
Issue Date
Intl Class
Cited #
6,811,953
Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice
May 22, 01
Nov 02, 04
[G01B]
216
6,795,169
Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
Mar 07, 03
Sep 21, 04
[G03B]
214
Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2013/0148,359
Illumination Device for optimizing polarization in an illumination pupil
Oct 26, 12
Jun 13, 13
[F21V]
2013/0148,859
IMAGE PROCESSING APPARATUS, IMAGE PROCESSING METHOD, DISPLAY APPARATUS, DISPLAY METHOD, AND COMPUTER READABLE RECORDING MEDIUM
Feb 08, 13
Jun 13, 13
[G02B, G06K]
2013/0140,372
TEMPERATURE CONTROL OF A MOVER WITH ACTIVE BYPASS, PREDICTIVE FEEDFORWARD CONTROL, AND PHASE CHANGE HOUSING
Jan 31, 13
Jun 06, 13
[F27D]
2013/0141,610
RECORDING MEDIUM FOR DATA FILE MANAGEMENT, APPARATUS FOR DATA FILE MANAGEMENT, HANDLING APPARATUS FOR IMAGE DATA, AND IMAGE CAPTURING SYSTEM
Feb 06, 13
Jun 06, 13
[H04N]
2013/0141,701
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Jan 30, 13
Jun 06, 13
[G03F]
2013/0141,702
APPARATUS AND METHODS FOR KEEPING IMMERSION FLUID ADJACENT TO AN OPTICAL ASSEMBLY DURING WAFER EXCHANGE IN AN IMMERSION LITHOGRAPHY MACHINE
Jan 30, 13
Jun 06, 13
[G03F]
2013/0141,703
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
Jan 30, 13
Jun 06, 13
[G03F]
2013/0141,734
PROFILE MEASURING APPARATUS, STRUCTURE MANUFACTURING SYSTEM, METHOD FOR MEASURING PROFILE, METHOD FOR MANUFACTURING STRUCTURE, AND NON-TRANSITORY COMPUTER READABLE MEDIUM
Oct 10, 12
Jun 06, 13
[G01B]
2013/0133,168
PROFILE MEASURING APPARATUS, STRUCTURE MANUFACTURING SYSTEM, METHOD FOR MEASURING PROFILE, METHOD FOR MANUFACTURING STRUCTURE, AND NON-TRANSITORY COMPUTER READABLE MEDIUM
Nov 29, 12
May 30, 13
[H04N, B23Q, G01B]
2013/0135,594
LIQUID IMMERSION MEMBER, IMMERSION EXPOSURE APPARATUS, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, PROGRAM, AND RECORDING MEDIUM
Nov 20, 12
May 30, 13
[G03F]
2013/0135,596
LIQUID RECOVERY APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
Jan 28, 13
May 30, 13
[G03F]
2013/0135,597
EXPOSURE APPARATUS, METHOD FOR PRODUCING DEVICE, AND METHOD FOR CONTROLLING EXPOSURE APPARATUS
Jan 28, 13
May 30, 13
[G03F]
2013/0138,451
INFECTION SPREAD PREVENTION SUPPORT SYSTEM, INFECTION SPREAD PREVENTION SUPPORT SERVER, EXAMINATION TERMINAL, MOBILE TERMINAL AND PROGRAM
Dec 21, 12
May 30, 13
[G06Q, G06F]
2013/0128,244
Exposure Apparatus and Device Manufacturing Method Having Lower Scanning Speed to Expose Peripheral Shot Area
Dec 13, 12
May 23, 13
[G03F]
2013/0128,248
LIGHT SOURCE APPARATUS, OPTICAL APPARATUS, EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, ILLUMINATING METHOD, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING OPTICAL APPARATUS
Mar 31, 11
May 23, 13
[G02B, G03F]
2013/0128,255
ENCODER DEVICE, METHOD FOR MEASURING MOVING AMOUNT, OPTICAL APPARATUS, EXPOSURE APPARATUS, EXPOSURE METHOD AND METHOD FOR PRODUCING DEVICE
Nov 16, 12
May 23, 13
[G03B, G01D]
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
8,462,317
Illumination optical system, exposure apparatus, and device manufacturing method
Oct 15, 08
Jun 11, 13
[G03B, G02B]
8,456,608
Maintenance method, maintenance device, exposure apparatus, and device manufacturing method
Aug 16, 10
Jun 04, 13
[G03B]
8,456,610
Environmental system including vacuum scavenge for an immersion lithography apparatus
Mar 20, 09
Jun 04, 13
[G03B]
8,456,617
Exposure method, exposure device, and micro device manufacturing method
Jul 22, 09
Jun 04, 13
[G03B]
8,456,624
Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method
Nov 22, 10
Jun 04, 13
[G01N]
8,456,750
Zoom lens, optical apparatus and zoom lens manufacturing method
Aug 23, 11
Jun 04, 13
[G02B]
8,451,424
Exposure apparatus, method for producing device, and method for controlling exposure apparatus
Jan 25, 06
May 28, 13
[G03B]
8,451,425
Exposure apparatus, exposure method, cleaning apparatus, and device manufacturing method
Dec 24, 08
May 28, 13
[G03B]
8,451,427
Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method
Aug 14, 08
May 28, 13
[G03B, G02B]
8,451,430
Illumination optical system, exposure apparatus, and device manufacturing method
Jun 22, 11
May 28, 13
[G03B]
8,451,431
Control systems and methods applying iterative feedback tuning for feed-forward and synchronization control of microlithography stages and the like
Jan 27, 10
May 28, 13
[G03B]
8,445,266
Apparatus for judging cell detachment, method of judging cell detachment, and cell culture apparatus
Oct 30, 08
May 21, 13
[C12M, C12C, C12Q]
8,445,837
Vibration actuator for rotating a rotating axle and image capturing apparatus
Jun 07, 10
May 21, 13
[H01J, H02N]
8,446,350
Liquid crystal panel, liquid crystal panel device, display device, and projector
Mar 19, 09
May 21, 13
[G09G]
8,446,493
Image processing apparatus, imaging apparatus, computer readable storage medium storing image processing program, and image processing method for performing color processing on a raw image
Feb 03, 12
May 21, 13
[H04N]
8,446,569
Exposure apparatus, exposure method and device manufacturing method
Jun 18, 10
May 21, 13
[G03B]
8,446,578
Defect inspection apparatus, defect inspection method and method of inspecting hole pattern
Nov 16, 09
May 21, 13
[G01N]
8,446,579
Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method
Mar 12, 12
May 21, 13
[G01N]
8,446,672
Vibration reduction apparatus with a center of gravity adjusting member to reduce detection errors and optical apparatus
Mar 28, 08
May 21, 13
[G02B]
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