OEM GROUP, INC.

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2008/0318,432 REACTOR WITH HEATED AND TEXTURED ELECTRODES AND SURFACESAbandonedSep 02, 08Dec 25, 08[C23C, H01L]
6830664 Cluster tool with a hollow cathode arrayExpiredAug 05, 02Dec 14, 04[C23C]
6783638 Flat magnetronExpiredSep 07, 01Aug 31, 04[C23C]
2004/0163,952 Magnetron with adjustable target positioningAbandonedFeb 21, 03Aug 26, 04[C23C]
6410448 Plasma etch reactor and method for emerging filmsExpiredAug 27, 99Jun 25, 02[H01L]
6406925 Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processingExpiredNov 14, 00Jun 18, 02[H01L]
6235656 Dual degas/cool loadlock cluster toolExpiredJul 03, 00May 22, 01[H01L]
6086947 Method of depositing materials on a wafer to eliminate the effect of cracks in the depositionExpiredOct 10, 96Jul 11, 00[B05D]

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