Oesterreichische Investitionskredit Aktiengesellschaft and Ionen Mikrofabrications

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
4985634 Ion beam lithographyExpiredJul 29, 88Jan 15, 91[H01J]
4967088 Method and apparatus for image alignment in ion lithographyExpiredJun 02, 88Oct 30, 90[H01J]
4958074 Apparatus and method for inspecting a maskExpiredJul 13, 88Sep 18, 90[H01J]
4924104 Ion beam apparatus and method of modifying substrateExpiredSep 09, 88May 08, 90[H01J]
4916322 Arrangement for stabilizing an irradiated maskExpiredSep 13, 88Apr 10, 90[H01J]
4894549 Apparatus for demagnification or full-size ion projection lithographyExpiredMar 04, 88Jan 16, 90[H01J]
4859857 Ion-projection apparatus and method of operating sameExpiredJan 30, 87Aug 22, 89[H01J]
4835392 Ion-projection apparatusExpiredNov 20, 87May 30, 89[H01J]
4823011 Ion-projection lithographic apparatus with means for aligning the mask image with the substrateExpiredMay 15, 87Apr 18, 89[H01J]
4775797 Method of stabilizing a maskExpiredNov 13, 86Oct 04, 88[G01J]

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