Oesterreichische Investitionskredit Aktiengesellschaft and Ionen Mikrofabrications
Patent Owner
Stats
- 0 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Jan 15, 1991 most recent publication
Details
- 0 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 221 Total Citation Count
- Nov 13, 1986 Earliest Filing
- 10 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
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Recent Publications
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Recent Patents
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Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
4967088 Method and apparatus for image alignment in ion lithographyExpiredJun 02, 88Oct 30, 90[H01J]
4894549 Apparatus for demagnification or full-size ion projection lithographyExpiredMar 04, 88Jan 16, 90[H01J]
4823011 Ion-projection lithographic apparatus with means for aligning the mask image with the substrateExpiredMay 15, 87Apr 18, 89[H01J]
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