PSK INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 12116
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 11351
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 454
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 398
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 333
 
  
 
B05B SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES 163
 
  
 
F16K VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING172
 
  
 
F24F AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING 144

Top Patents (by citation)

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Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0301,514 PLASMA SOURCE AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAMEJul 25, 16Oct 19, 17[H01J]
2017/0221,720 APPARATUS AND METHOD FOR TREATING SUBSTRATESApr 18, 17Aug 03, 17[H01J, H01L, B08B]
2016/0042,925 BAFFLE AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAMEAug 22, 14Feb 11, 16[H01J]
2015/0136,734 Substrate Treating Apparatus and MethodNov 14, 14May 21, 15[H01J]
2014/0190,635 PLASMA CHAMBER AND APPARATUS FOR TREATING SUBSTRATEDec 27, 13Jul 10, 14[H01J]
2014/0083,612 BAFFLE AND METHOD FOR TREATING SURFACE OF THE BAFFLE, AND SUBSTRATE TREATING APPARATUS AND METHOD FOR TREATING SURFACE OF THE APPARATUSAug 09, 13Mar 27, 14[H01L]

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9779918 Substrate treating apparatus and methodNov 17, 14Oct 03, 17[C23C, H01J, H01L, C23F]
9536708 Plasma generating device, method of controlling the same, and substrate processing device including the plasma generating deviceMar 27, 14Jan 03, 17[H01J]
9514919 Baffle and substrate treating apparatuses including the sameJul 25, 12Dec 06, 16[C23C, H01J, H01L, C23F]
9508541 Apparatus and method for treating substrateJan 02, 14Nov 29, 16[H01J, H01L, B08B]
9477031 Apparatus and method for manufacturing light guiding plateSep 03, 13Oct 25, 16[C23C, F21V, B05B]
9390957 Substrate transfer apparatus and method, and substrate processing apparatusNov 25, 14Jul 12, 16[H01L]
9214357 Substrate treating apparatus and methodAug 21, 14Dec 15, 15[H01L]
8007218 Unit and method for transferring substrates and apparatus and method for treating substrates with the unitJun 30, 09Aug 30, 11[H01L]
7111629 Method for cleaning substrate surfaceMay 20, 04Sep 26, 06[B08B]

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2016/0020,070 PLASMA GENERATING APPARATUS USING DUAL PLASMA SOURCE AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAMEAbandonedAug 25, 14Jan 21, 16[H01J]
2016/0020,073 PLASMA GENERATION DEVICE, METHOD OF CONTROLLING CHARACTERISTIC OF PLASMA, AND SUBSTRATE PROCESSING DEVICE USING SAMEAbandonedAug 12, 14Jan 21, 16[H01J, H01L]
2016/0013,029 Apparatus For Generating Plasma Using Dual Plasma Source And Apparatus For Treating Substrate Including The SameAbandonedAug 13, 14Jan 14, 16[H01J, H01L]
2016/0013,031 Substrate Processing Device and Method of Handling Particles ThereofAbandonedAug 13, 14Jan 14, 16[H01J, B08B]
2015/0311,042 SUBSTRATE TREATING APPARATUSAbandonedDec 24, 14Oct 29, 15[H01J]
2015/0303,094 APPARATUS AND METHOD FOR TREATING SUBSTRATEAbandonedDec 19, 14Oct 22, 15[H01L]
2015/0293,526 Substrate Treating Apparatus, Substrate Treating Method, and Recording MediumAbandonedDec 04, 14Oct 15, 15[G05B]
2015/0101,754 APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR CARRYING SUBSTRATEAbandonedOct 02, 14Apr 16, 15[H01L]
2015/0020,974 BAFFLE AND APPARATUS FOR TREATING SURFACE OF BAFFLE, AND SUBSTRATE TREATING APPARATUSAbandonedJul 19, 13Jan 22, 15[H05H]
2014/0318,710 APPARATUS FOR GENERATING PLASMA USING ELECTROMAGNETIC FIELD APPLICATOR AND APPARATUS FOR TREATING SUBSTRATE COMPRISING THE SAMEAbandonedJul 19, 13Oct 30, 14[H01J]
2013/0319,615 APPARATUS AND METHOD FOR TREATING SUBSTRATESAbandonedMay 31, 13Dec 05, 13[B08B]
8574445 Method for generating hollow cathode plasma and method for treating large area substrate using hollow cathode plasmaExpiredJun 05, 09Nov 05, 13[C23F]
2010/0006,226 Apparatus for generating hollow cathode plasma and apparatus for treating large area substrate using hollow cathode plasmaAbandonedJun 05, 09Jan 14, 10[H01L, C23F]
2008/0175,694 Unit and method for transferring substrates and apparatus and method for treating substrates with the unitAbandonedAug 21, 07Jul 24, 08[H01L]
2008/0008,569 Substrate transfer apparatus and substrate processing system using the sameAbandonedJan 19, 07Jan 10, 08[B65G]
2006/0157,079 Method for cleaning substrate surfaceAbandonedMar 21, 06Jul 20, 06[B08B]
2005/0199,262 Method for ashingAbandonedMay 13, 05Sep 15, 05[B08B]

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