Planar Semiconductor, Inc.
Patent Owner
Stats
- 7 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Dec 19, 2017 most recent publication
Details
- 7 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 156 Total Citation Count
- Aug 27, 2004 Earliest Filing
- 1 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9846934 Pattern weakness and strength detection and tracking during a semiconductor device fabrication processMar 10, 16Dec 19, 17[G06T, G06K]
9799536 Apparatus and method for cleaning flat objects in a vertical orientation with pulsed liquid jetNov 09, 05Oct 24, 17[H01L, B08B]
9275849 Single-chamber apparatus for precision cleaning and drying of flat objectsJul 30, 07Mar 01, 16[H01L]
7765515 Pattern match based optical proximity correction and verification of integrated circuit layoutFeb 03, 07Jul 27, 10[G06F]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2007/0261,718 Method and apparatus for ozone-enhanced cleaning of flat objects with pulsed liquid jetAbandonedMay 10, 06Nov 15, 07[B08B]
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