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Patent Owner
Stats
- 6 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Apr 26, 2016 most recent publication
Details
- 6 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 114 Total Citation Count
- Nov 02, 1983 Earliest Filing
- 11 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9322098 Valve-cell vacuum deposition apparatus including a leak detection device and method for detecting a leak in a vacuum deposition apparatusMar 20, 13Apr 26, 16[C23C, G01M, F22B]
8894769 Material evaporation chamber with differential vacuum pumpingJun 18, 03Nov 25, 14[C23C, C30B]
8858713 Apparatus for depositing a thin film of material on a substrate and regeneration process for such an apparatusJun 17, 10Oct 14, 14[C23C, B23P, C30B]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2014/0245,955 INJECTION SYSTEM FOR AN APPARATUS FOR DEPOSITING THIN LAYERS BY VACUUM EVAPORATIONAbandonedOct 18, 12Sep 04, 14[C23C]
2014/0007,814 EVAPORATION DEVICE FOR A VACCUM DEPOSITION APPARATUS AND VACUUM DEPOSITION APPARATUS COMPRISING SUCH AN EVAPORATION DEVICEAbandonedJul 03, 13Jan 09, 14[C23C]
2012/0295,014 INJECTOR FOR A VACUUM VAPOUR DEPOSITION SYSTEMAbandonedMay 02, 12Nov 22, 12[C23C, B23P]
2012/0097,105 MOLECULAR BEAM EPITAXY APPARATUS FOR PRODUCING WAFERS OF SEMICONDUCTOR MATERIALAbandonedJun 17, 10Apr 26, 12[C23C, H01L, C30B]
2012/0097,328 APPARATUS FOR FABRICATING SEMICONDUCTOR WAFERS AND APPARATUS FOR THE DEPOSITION OF MATERIALS BY EVAPORATION USING A MOLECULAR BEAMAbandonedJun 23, 10Apr 26, 12[C23C, H01L]
8110322 Method of mask forming and method of three-dimensional microfabricationExpiredApr 25, 05Feb 07, 12[G03C, G03F]
7432176 Method of three-dimensional microfabrication and high-density three-dimentional fine structureExpiredApr 13, 04Oct 07, 08[H01L]
4498416 Installation for treatment of materials for the production of semi-conductorsExpiredNov 02, 83Feb 12, 85[C23C]
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