SC TECHNOLOGY, INC.

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
6650426 Endpoint determination for recess etching to a precise depthExpiredJul 12, 00Nov 18, 03[G01B]
5014217 Apparatus and method for automatically identifying chemical species within a plasma reactor environmentExpiredFeb 09, 89May 07, 91[H01L, G06F, C23F]
4977330 In-line photoresist thickness monitorExpiredFeb 13, 89Dec 11, 90[G01N]
4938555 Optical switchExpiredAug 16, 88Jul 03, 90[G02B]

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