SCP SERVICES, INC. (F/K/A AKRION SCP ACQUISITION CORP.)

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2006/0143,937 Method for drying substratesAbandonedNov 13, 03Jul 06, 06[F26B]
6878213 Process and system for rinsing of semiconductor substratesExpiredSep 29, 99Apr 12, 05[C23G]
6730177 Method and apparatus for washing and/or drying using a revolved coanda profileExpiredJul 31, 01May 04, 04[B08B]
6379096 Buffer storage systemExpiredFeb 22, 00Apr 30, 02[B65G]
6264036 Process cassetteExpiredMar 05, 99Jul 24, 01[B65D]
6245250 Process vesselExpiredMar 05, 99Jun 12, 01[C23G]
6170703 Chemical Dispensing system and methodExpiredJan 08, 99Jan 09, 01[G01F]
6165912 Electroless metal deposition of electronic components in an enclosable vesselExpiredSep 14, 99Dec 26, 00[H01L, B05D]
6153533 Method of using a compliant process cassetteExpiredJan 21, 99Nov 28, 00[H01L]
6138694 Multiple stage wet processing platform and method of useExpiredMar 05, 99Oct 31, 00[B08B]
6136724 Multiple stage wet processing chamberExpiredFeb 18, 98Oct 24, 00[H01L]
6132522 Wet processing methods for the manufacture of electronic components using sequential chemical processingExpiredJul 19, 96Oct 17, 00[B08B]
6041938 Compliant process cassetteExpiredAug 27, 97Mar 28, 00[A47F, B65D]
6032682 Method for sulfuric acid resist strippingExpiredJun 24, 97Mar 07, 00[H01L, B08B, B44C]
5882598 Wafer gap conductivity cell for characterizing process vessels and semiconductor fabrication processes and method of useExpiredJun 07, 96Mar 16, 99[G01N]
5383484 Static megasonic cleaning system for cleaning objectsExpiredJul 16, 93Jan 24, 95[B08B]
4860643 Ventilated clean room work station with aerodynamic exhaust baffleExpiredJul 21, 88Aug 29, 89[B08B]

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