SCREEN SEMICONDUCTOR SOLUTIONS CO., LTD.
Patent Owner
Stats
- 97 US PATENTS IN FORCE
- 1 US APPLICATIONS PENDING
- Feb 15, 2018 most recent publication
Details
- 97 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 1,932 Total Citation Count
- Jun 11, 1996 Earliest Filing
- 6 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
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Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9828676 Substrate processing apparatus and substrate processing methodJun 17, 16Nov 28, 17[C23C, H01J, B05C, H01L, G03D, G03F]
9741594 Substrate processing apparatus and substrate processing method for performing heat treatment on substrateNov 02, 12Aug 22, 17[H01L, F27B, F25B, F27D]
9728434 Substrate processing apparatus, storage device, and method of transporting substrate storing containerAug 06, 14Aug 08, 17[H01L, B65G]
9687874 Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating unitsSep 23, 15Jun 27, 17[C23C, B05C, H01L, G03F]
9623450 Substrate cleaning apparatus for cleaning a lower surface of a substrateFeb 01, 13Apr 18, 17[H01L, B08B]
9606454 Substrate processing apparatus and substrate processing systemSep 10, 13Mar 28, 17[G03B, G03F]
9566598 Substrate processing apparatus and substrate processing methodNov 19, 13Feb 14, 17[H01L, B05B]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2014/0261,571 SUBSTRATE CLEANING AND DRYING METHOD AND SUBSTRATE DEVELOPING METHODAbandonedJan 16, 14Sep 18, 14[B08B]
2012/0055,916 METHOD AND SYSTEM FOR THERMAL TREATMENT OF SUBSTRATESAbandonedFeb 28, 11Mar 08, 12[H05B]
2012/0037,593 METHOD AND SYSTEM FOR REMOVAL OF FILMS FROM PERIPHERAL PORTIONS OF A SUBSTRATEAbandonedOct 28, 11Feb 16, 12[C23F]
Top Inventors for This Owner
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