SEMATECH, INC.
Patent Owner
Stats
- 22 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Nov 19, 2015 most recent publication
Details
- 22 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 5,638 Total Citation Count
- Jan 31, 1983 Earliest Filing
- 111 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9097994 Abrasive-free planarization for EUV mask substratesJan 25, 13Aug 04, 15[B24B, H01L, C03C, G03F]
9029218 Tunneling field-effect transistor with direct tunneling for enhanced tunneling currentApr 04, 13May 12, 15[H01L]
8888086 Apparatus with surface protector to inhibit contaminationMay 11, 11Nov 18, 14[B23Q, H01L, G03F]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2015/0333,128 N-TYPE III-V SEMICONDUCTOR STRUCTURES HAVING ULTRA-SHALLOW JUNCTIONS AND METHODS OF FORMING SAMEAbandonedMay 15, 14Nov 19, 15[H01L]
2015/0206,738 Surface Cleaning Method and Apparatus Using Surface Acoustic Wave DevicesAbandonedJan 21, 14Jul 23, 15[H01L, B08B]
2015/0111,372 PHOSPHORUS AND ARSENIC DOPING OF SEMICONDUCTOR MATERIALSAbandonedOct 21, 14Apr 23, 15[H01L]
2015/0062,546 APPARATUS WITH SURFACE PROTECTOR TO INHIBIT CONTAMINATIONAbandonedNov 10, 14Mar 05, 15[H01L, G03F]
2014/0242,500 Process For Cleaning Shield Surfaces In Deposition SystemsAbandonedMay 08, 14Aug 28, 14[C23C, B08B, G03F]
2014/0242,501 Coating Of Shield Surfaces In Deposition SystemsAbandonedMay 08, 14Aug 28, 14[C23C, G03F]
2014/0206,112 METHOD FOR REDUCING CHARGE IN CRITICAL DIMENSION-SCANNING ELECTRON MICROSCOPE METROLOGYAbandonedJan 17, 14Jul 24, 14[H01L]
2014/0170,533 EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL) ALTERNATING PHASE SHIFT MASKAbandonedDec 19, 12Jun 19, 14[G03F]
2014/0054,549 GATED CIRCUIT STRUCTURE WITH ULTRA-THIN, EPITAXIALLY-GROWN TUNNEL AND CHANNEL LAYERAbandonedAug 23, 12Feb 27, 14[H01L]
8614145 Through substrate via formation processing using sacrificial materialExpiredDec 14, 11Dec 24, 13[H01L]
2013/0320,359 HETEROGENEOUS STACK STRUCTURES WITH OPTICAL TO ELECTRICAL TIMING REFERENCE DISTRIBUTIONAbandonedJun 04, 12Dec 05, 13[H01L]
2013/0299,950 SEMICONDUCTOR STRUCTURE WITH BURIED THROUGH SUBSTRATE VIASAbandonedMay 11, 12Nov 14, 13[H01L]
8574480 Partial die process for uniform etch loading of imprint wafersExpiredJan 04, 13Nov 05, 13[B29C]
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