SEMATECH, INC.

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Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 12350
 
  
 
B08B CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL 355
 
  
 
G03C PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES 343
 
  
 
G03F PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR 3101
 
  
 
B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 285
 
  
 
B23K SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM 192
 
  
 
B23Q DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING 139
 
  
 
B24B MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING 165
 
  
 
B29C SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING 1124
 
  
 
C03C CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS159

Top Patents (by citation)

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Recent Publications

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Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9097994 Abrasive-free planarization for EUV mask substratesJan 25, 13Aug 04, 15[B24B, H01L, C03C, G03F]
9029218 Tunneling field-effect transistor with direct tunneling for enhanced tunneling currentApr 04, 13May 12, 15[H01L]
8888086 Apparatus with surface protector to inhibit contaminationMay 11, 11Nov 18, 14[B23Q, H01L, G03F]
8865376 EUVL process structure fabrication methodsMar 08, 13Oct 21, 14[G03F]
8829567 Metal alloy with an abrupt interface to III-V semiconductorDec 28, 12Sep 09, 14[H01L]
8734586 Process for cleaning shield surfaces in deposition systemsFeb 02, 12May 27, 14[B08B]
8734907 Coating of shield surfaces in deposition systemsFeb 02, 12May 27, 14[B05D]
8673746 Ammonium sulfide passivation of semiconductorsApr 13, 11Mar 18, 14[H01L]
7921859 Method and apparatus for an in-situ ultraviolet cleaning toolDec 13, 05Apr 12, 11[B08B]
7772710 Zero-order overlay targetsOct 31, 07Aug 10, 10[H01L]

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Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2015/0333,128 N-TYPE III-V SEMICONDUCTOR STRUCTURES HAVING ULTRA-SHALLOW JUNCTIONS AND METHODS OF FORMING SAMEAbandonedMay 15, 14Nov 19, 15[H01L]
2015/0206,738 Surface Cleaning Method and Apparatus Using Surface Acoustic Wave DevicesAbandonedJan 21, 14Jul 23, 15[H01L, B08B]
2015/0158,056 LIGHT-ASSISTED ACOUSTIC CLEANING TOOLAbandonedDec 06, 13Jun 11, 15[B08B]
2015/0118,834 SULFUR AND SELENIUM PASSIVATION OF SEMICONDUCTORSAbandonedOct 27, 14Apr 30, 15[H01L]
2015/0111,372 PHOSPHORUS AND ARSENIC DOPING OF SEMICONDUCTOR MATERIALSAbandonedOct 21, 14Apr 23, 15[H01L]
2015/0062,546 APPARATUS WITH SURFACE PROTECTOR TO INHIBIT CONTAMINATIONAbandonedNov 10, 14Mar 05, 15[H01L, G03F]
2014/0242,500 Process For Cleaning Shield Surfaces In Deposition SystemsAbandonedMay 08, 14Aug 28, 14[C23C, B08B, G03F]
2014/0242,501 Coating Of Shield Surfaces In Deposition SystemsAbandonedMay 08, 14Aug 28, 14[C23C, G03F]
2014/0206,112 METHOD FOR REDUCING CHARGE IN CRITICAL DIMENSION-SCANNING ELECTRON MICROSCOPE METROLOGYAbandonedJan 17, 14Jul 24, 14[H01L]
2014/0170,533 EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL) ALTERNATING PHASE SHIFT MASKAbandonedDec 19, 12Jun 19, 14[G03F]
2014/0162,465 PLASMA SHIELD SURFACE PROTECTIONAbandonedDec 11, 12Jun 12, 14[H01L]
2014/0123,997 Gigasonic Brush for Cleaning SurfacesAbandonedSep 24, 13May 08, 14[H01L]
2014/0053,868 Method And Apparatus For Surface CleaningAbandonedAug 22, 12Feb 27, 14[H01L, B08B]
2014/0054,549 GATED CIRCUIT STRUCTURE WITH ULTRA-THIN, EPITAXIALLY-GROWN TUNNEL AND CHANNEL LAYERAbandonedAug 23, 12Feb 27, 14[H01L]
2013/0340,838 FACILITATING STREAMING FLUID USING ACOUSTIC WAVESAbandonedJun 25, 12Dec 26, 13[F15D]
8614145 Through substrate via formation processing using sacrificial materialExpiredDec 14, 11Dec 24, 13[H01L]
2013/0320,359 HETEROGENEOUS STACK STRUCTURES WITH OPTICAL TO ELECTRICAL TIMING REFERENCE DISTRIBUTIONAbandonedJun 04, 12Dec 05, 13[H01L]
2013/0299,950 SEMICONDUCTOR STRUCTURE WITH BURIED THROUGH SUBSTRATE VIASAbandonedMay 11, 12Nov 14, 13[H01L]
8574480 Partial die process for uniform etch loading of imprint wafersExpiredJan 04, 13Nov 05, 13[B29C]
8539969 Gigasonic brush for cleaning surfacesExpiredJul 30, 10Sep 24, 13[B08B]

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